APA (7th ed.) Citation

(1989). Lithography in microelectronics. Nova Science Publ.

Chicago Style (17th ed.) Citation

Lithography in Microelectronics. Commack: Nova Science Publ, 1989.

MLA (9th ed.) Citation

Lithography in Microelectronics. Nova Science Publ, 1989.

Warning: These citations may not always be 100% accurate.