Lithography in microelectronics:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Commack
Nova Science Publ.
1989
|
| Schriftenreihe: | Proceedings of the Institute of General Physics, Academy of Sciences of the USSR / Institut Obščej Fiziki <Moskva>
8 |
| Schlagworte: | |
| Beschreibung: | Aus d. Russ. übers. - Literaturangaben |
| Beschreibung: | X, 207 S. Ill., graph. Darst. |
| ISBN: | 0941743306 |
Internformat
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| 264 | 1 | |a Commack |b Nova Science Publ. |c 1989 | |
| 300 | |a X, 207 S. |b Ill., graph. Darst. | ||
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| 490 | 1 | |a Proceedings of the Institute of General Physics, Academy of Sciences of the USSR / Institut Obščej Fiziki <Moskva> |v 8 | |
| 500 | |a Aus d. Russ. übers. - Literaturangaben | ||
| 650 | 7 | |a Lithographie |2 ram | |
| 650 | 7 | |a Microélectronique |2 ram | |
| 650 | 4 | |a Microelectronics | |
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Datensatz im Suchindex
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| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_tum | ELT 285f |
| ctrlnum | (OCoLC)20115828 (DE-599)BVBBV002644590 |
| discipline | Elektrotechnik |
| format | Book |
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| genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV002644590 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:47:50Z |
| institution | BVB |
| isbn | 0941743306 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001696927 |
| oclc_num | 20115828 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | X, 207 S. Ill., graph. Darst. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Nova Science Publ. |
| record_format | marc |
| series2 | Proceedings of the Institute of General Physics, Academy of Sciences of the USSR / Institut Obščej Fiziki <Moskva> |
| spelling | Lithography in microelectronics ed. by T. M. Makhviladze Commack Nova Science Publ. 1989 X, 207 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings of the Institute of General Physics, Academy of Sciences of the USSR / Institut Obščej Fiziki <Moskva> 8 Aus d. Russ. übers. - Literaturangaben Lithographie ram Microélectronique ram Microelectronics Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Machviladze, T. M. Sonstige oth Institut Obščej Fiziki <Moskva> Proceedings of the Institute of General Physics, Academy of Sciences of the USSR 8 (DE-604)BV000746375 8 |
| spellingShingle | Lithography in microelectronics Lithographie ram Microélectronique ram Microelectronics Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4191584-7 (DE-588)4143413-4 |
| title | Lithography in microelectronics |
| title_auth | Lithography in microelectronics |
| title_exact_search | Lithography in microelectronics |
| title_full | Lithography in microelectronics ed. by T. M. Makhviladze |
| title_fullStr | Lithography in microelectronics ed. by T. M. Makhviladze |
| title_full_unstemmed | Lithography in microelectronics ed. by T. M. Makhviladze |
| title_short | Lithography in microelectronics |
| title_sort | lithography in microelectronics |
| topic | Lithographie ram Microélectronique ram Microelectronics Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Lithographie Microélectronique Microelectronics Lithografie Halbleitertechnologie Aufsatzsammlung |
| volume_link | (DE-604)BV000746375 |
| work_keys_str_mv | AT machviladzetm lithographyinmicroelectronics |