Microelectronics processing: chemical engineering aspects
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Washington, DC
American Chem. Soc.
1989
|
| Series: | Advances in chemistry series
221 |
| Subjects: | |
| Physical Description: | XIV, 547 S. Ill. |
| ISBN: | 0841214751 |
Staff View
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Record in the Search Index
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| dewey-ones | 621 - Applied physics |
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| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre_facet | Aufsatzsammlung |
| id | DE-604.BV002461615 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:45:28Z |
| institution | BVB |
| isbn | 0841214751 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001591309 |
| oclc_num | 19623575 |
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| physical | XIV, 547 S. Ill. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | American Chem. Soc. |
| record_format | marc |
| series | Advances in chemistry series |
| series2 | Advances in chemistry series |
| spelling | Microelectronics processing chemical engineering aspects Dennis W. Hess ... Washington, DC American Chem. Soc. 1989 XIV, 547 S. Ill. txt rdacontent n rdamedia nc rdacarrier Advances in chemistry series 221 Integrated circuits Design and construction Microelectronics Materials Surface chemistry Mikroelektronikindustrie (DE-588)4129351-4 gnd rswk-swf Technische Chemie (DE-588)4078178-1 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Mikroelektronikindustrie (DE-588)4129351-4 s Technische Chemie (DE-588)4078178-1 s DE-604 Hess, Dennis W. Sonstige oth Advances in chemistry series 221 (DE-604)BV000000874 221 |
| spellingShingle | Microelectronics processing chemical engineering aspects Advances in chemistry series Integrated circuits Design and construction Microelectronics Materials Surface chemistry Mikroelektronikindustrie (DE-588)4129351-4 gnd Technische Chemie (DE-588)4078178-1 gnd |
| subject_GND | (DE-588)4129351-4 (DE-588)4078178-1 (DE-588)4143413-4 |
| title | Microelectronics processing chemical engineering aspects |
| title_auth | Microelectronics processing chemical engineering aspects |
| title_exact_search | Microelectronics processing chemical engineering aspects |
| title_full | Microelectronics processing chemical engineering aspects Dennis W. Hess ... |
| title_fullStr | Microelectronics processing chemical engineering aspects Dennis W. Hess ... |
| title_full_unstemmed | Microelectronics processing chemical engineering aspects Dennis W. Hess ... |
| title_short | Microelectronics processing |
| title_sort | microelectronics processing chemical engineering aspects |
| title_sub | chemical engineering aspects |
| topic | Integrated circuits Design and construction Microelectronics Materials Surface chemistry Mikroelektronikindustrie (DE-588)4129351-4 gnd Technische Chemie (DE-588)4078178-1 gnd |
| topic_facet | Integrated circuits Design and construction Microelectronics Materials Surface chemistry Mikroelektronikindustrie Technische Chemie Aufsatzsammlung |
| volume_link | (DE-604)BV000000874 |
| work_keys_str_mv | AT hessdennisw microelectronicsprocessingchemicalengineeringaspects |