Microelectronics processing: chemical engineering aspects
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Washington, DC
American Chem. Soc.
1989
|
| Schriftenreihe: | Advances in chemistry series
221 |
| Schlagworte: | |
| Beschreibung: | XIV, 547 S. Ill. |
| ISBN: | 0841214751 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV002461615 | ||
| 003 | DE-604 | ||
| 005 | 20120927 | ||
| 007 | t | ||
| 008 | 900206s1989 a||| |||| 00||| engod | ||
| 020 | |a 0841214751 |9 0-8412-1475-1 | ||
| 035 | |a (OCoLC)19623575 | ||
| 035 | |a (DE-599)BVBBV002461615 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-12 |a DE-634 |a DE-83 | ||
| 050 | 0 | |a QD1 | |
| 050 | 0 | |a TK7874 | |
| 082 | 0 | |a 621.381 |2 20 | |
| 084 | |a ZN 4154 |0 (DE-625)157362: |2 rvk | ||
| 245 | 1 | 0 | |a Microelectronics processing |b chemical engineering aspects |c Dennis W. Hess ... |
| 264 | 1 | |a Washington, DC |b American Chem. Soc. |c 1989 | |
| 300 | |a XIV, 547 S. |b Ill. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Advances in chemistry series |v 221 | |
| 650 | 4 | |a Integrated circuits |x Design and construction | |
| 650 | 4 | |a Microelectronics |x Materials | |
| 650 | 4 | |a Surface chemistry | |
| 650 | 0 | 7 | |a Mikroelektronikindustrie |0 (DE-588)4129351-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Technische Chemie |0 (DE-588)4078178-1 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
| 689 | 0 | 0 | |a Mikroelektronikindustrie |0 (DE-588)4129351-4 |D s |
| 689 | 0 | 1 | |a Technische Chemie |0 (DE-588)4078178-1 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Hess, Dennis W. |e Sonstige |4 oth | |
| 830 | 0 | |a Advances in chemistry series |v 221 |w (DE-604)BV000000874 |9 221 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-001591309 | ||
Datensatz im Suchindex
| _version_ | 1804116876133924864 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV002461615 |
| callnumber-first | Q - Science |
| callnumber-label | QD1 |
| callnumber-raw | QD1 TK7874 |
| callnumber-search | QD1 TK7874 |
| callnumber-sort | QD 11 |
| callnumber-subject | QD - Chemistry |
| classification_rvk | ZN 4154 |
| ctrlnum | (OCoLC)19623575 (DE-599)BVBBV002461615 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01479nam a2200433 cb4500</leader><controlfield tag="001">BV002461615</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20120927 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">900206s1989 a||| |||| 00||| engod</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0841214751</subfield><subfield code="9">0-8412-1475-1</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)19623575</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV002461615</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-12</subfield><subfield code="a">DE-634</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">QD1</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7874</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381</subfield><subfield code="2">20</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4154</subfield><subfield code="0">(DE-625)157362:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Microelectronics processing</subfield><subfield code="b">chemical engineering aspects</subfield><subfield code="c">Dennis W. Hess ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Washington, DC</subfield><subfield code="b">American Chem. Soc.</subfield><subfield code="c">1989</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XIV, 547 S.</subfield><subfield code="b">Ill.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Advances in chemistry series</subfield><subfield code="v">221</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Integrated circuits</subfield><subfield code="x">Design and construction</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectronics</subfield><subfield code="x">Materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Surface chemistry</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikroelektronikindustrie</subfield><subfield code="0">(DE-588)4129351-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Technische Chemie</subfield><subfield code="0">(DE-588)4078178-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4143413-4</subfield><subfield code="a">Aufsatzsammlung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikroelektronikindustrie</subfield><subfield code="0">(DE-588)4129351-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Technische Chemie</subfield><subfield code="0">(DE-588)4078178-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hess, Dennis W.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Advances in chemistry series</subfield><subfield code="v">221</subfield><subfield code="w">(DE-604)BV000000874</subfield><subfield code="9">221</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-001591309</subfield></datafield></record></collection> |
| genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV002461615 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:45:28Z |
| institution | BVB |
| isbn | 0841214751 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001591309 |
| oclc_num | 19623575 |
| open_access_boolean | |
| owner | DE-12 DE-634 DE-83 |
| owner_facet | DE-12 DE-634 DE-83 |
| physical | XIV, 547 S. Ill. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | American Chem. Soc. |
| record_format | marc |
| series | Advances in chemistry series |
| series2 | Advances in chemistry series |
| spelling | Microelectronics processing chemical engineering aspects Dennis W. Hess ... Washington, DC American Chem. Soc. 1989 XIV, 547 S. Ill. txt rdacontent n rdamedia nc rdacarrier Advances in chemistry series 221 Integrated circuits Design and construction Microelectronics Materials Surface chemistry Mikroelektronikindustrie (DE-588)4129351-4 gnd rswk-swf Technische Chemie (DE-588)4078178-1 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Mikroelektronikindustrie (DE-588)4129351-4 s Technische Chemie (DE-588)4078178-1 s DE-604 Hess, Dennis W. Sonstige oth Advances in chemistry series 221 (DE-604)BV000000874 221 |
| spellingShingle | Microelectronics processing chemical engineering aspects Advances in chemistry series Integrated circuits Design and construction Microelectronics Materials Surface chemistry Mikroelektronikindustrie (DE-588)4129351-4 gnd Technische Chemie (DE-588)4078178-1 gnd |
| subject_GND | (DE-588)4129351-4 (DE-588)4078178-1 (DE-588)4143413-4 |
| title | Microelectronics processing chemical engineering aspects |
| title_auth | Microelectronics processing chemical engineering aspects |
| title_exact_search | Microelectronics processing chemical engineering aspects |
| title_full | Microelectronics processing chemical engineering aspects Dennis W. Hess ... |
| title_fullStr | Microelectronics processing chemical engineering aspects Dennis W. Hess ... |
| title_full_unstemmed | Microelectronics processing chemical engineering aspects Dennis W. Hess ... |
| title_short | Microelectronics processing |
| title_sort | microelectronics processing chemical engineering aspects |
| title_sub | chemical engineering aspects |
| topic | Integrated circuits Design and construction Microelectronics Materials Surface chemistry Mikroelektronikindustrie (DE-588)4129351-4 gnd Technische Chemie (DE-588)4078178-1 gnd |
| topic_facet | Integrated circuits Design and construction Microelectronics Materials Surface chemistry Mikroelektronikindustrie Technische Chemie Aufsatzsammlung |
| volume_link | (DE-604)BV000000874 |
| work_keys_str_mv | AT hessdennisw microelectronicsprocessingchemicalengineeringaspects |