APA (7th ed.) Citation

(1989). Microelectronics processing: Chemical engineering aspects. American Chem. Soc.

Chicago Style (17th ed.) Citation

Microelectronics Processing: Chemical Engineering Aspects. Washington, DC: American Chem. Soc, 1989.

MLA (9th ed.) Citation

Microelectronics Processing: Chemical Engineering Aspects. American Chem. Soc, 1989.

Warning: These citations may not always be 100% accurate.