Excimer Laser-Lithographie bei lambda = 193 nm: Probleme und Lösungen
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | German |
| Veröffentlicht: |
1988
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| Schlagworte: | |
| Beschreibung: | 144 S. Ill. |
Internformat
MARC
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| 264 | 1 | |c 1988 | |
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Datensatz im Suchindex
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| any_adam_object | |
| author | Eden, Klaus |
| author_facet | Eden, Klaus |
| author_role | aut |
| author_sort | Eden, Klaus |
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| bvnumber | BV002416386 |
| ctrlnum | (OCoLC)246525202 (DE-599)BVBBV002416386 |
| format | Thesis Book |
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| illustrated | Illustrated |
| indexdate | 2024-07-09T15:44:53Z |
| institution | BVB |
| language | German |
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| physical | 144 S. Ill. |
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| publishDate | 1988 |
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| spelling | Eden, Klaus Verfasser aut Excimer Laser-Lithographie bei lambda = 193 nm Probleme und Lösungen 1988 144 S. Ill. txt rdacontent n rdamedia nc rdacarrier Aachen, Techn. Hochsch., Diss., 1988 (DE-588)4113937-9 Hochschulschrift gnd-content |
| spellingShingle | Eden, Klaus Excimer Laser-Lithographie bei lambda = 193 nm Probleme und Lösungen |
| subject_GND | (DE-588)4113937-9 |
| title | Excimer Laser-Lithographie bei lambda = 193 nm Probleme und Lösungen |
| title_auth | Excimer Laser-Lithographie bei lambda = 193 nm Probleme und Lösungen |
| title_exact_search | Excimer Laser-Lithographie bei lambda = 193 nm Probleme und Lösungen |
| title_full | Excimer Laser-Lithographie bei lambda = 193 nm Probleme und Lösungen |
| title_fullStr | Excimer Laser-Lithographie bei lambda = 193 nm Probleme und Lösungen |
| title_full_unstemmed | Excimer Laser-Lithographie bei lambda = 193 nm Probleme und Lösungen |
| title_short | Excimer Laser-Lithographie bei lambda = 193 nm |
| title_sort | excimer laser lithographie bei lambda 193 nm probleme und losungen |
| title_sub | Probleme und Lösungen |
| topic_facet | Hochschulschrift |
| work_keys_str_mv | AT edenklaus excimerlaserlithographiebeilambda193nmproblemeundlosungen |