Sputtering by particle bombardment: 1 Physical sputtering of single element solids
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Berlin
Springer
1981
|
| Schriftenreihe: | Topics in applied physics
47 |
| Beschreibung: | X, 281 S. graph. Darst. |
| ISBN: | 3540105212 0387105212 9783662308882 |
Internformat
MARC
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Datensatz im Suchindex
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| id | DE-604.BV002356010 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:44:15Z |
| institution | BVB |
| isbn | 3540105212 0387105212 9783662308882 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001538204 |
| oclc_num | 310856723 |
| open_access_boolean | |
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| physical | X, 281 S. graph. Darst. |
| publishDate | 1981 |
| publishDateSearch | 1981 |
| publishDateSort | 1981 |
| publisher | Springer |
| record_format | marc |
| series | Topics in applied physics |
| series2 | Topics in applied physics |
| spelling | Sputtering by particle bombardment 1 Physical sputtering of single element solids ed. by R. Behrisch ... Berlin Springer 1981 X, 281 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Topics in applied physics 47 Topics in applied physics Behrisch, Rainer 1934-2011 Sonstige (DE-588)1031698396 oth (DE-604)BV002356009 1 Erscheint auch als Online-Ausgabe 978-3-540-38514-1 Topics in applied physics 47 (DE-604)BV008007504 47 |
| spellingShingle | Sputtering by particle bombardment Topics in applied physics |
| title | Sputtering by particle bombardment |
| title_auth | Sputtering by particle bombardment |
| title_exact_search | Sputtering by particle bombardment |
| title_full | Sputtering by particle bombardment 1 Physical sputtering of single element solids ed. by R. Behrisch ... |
| title_fullStr | Sputtering by particle bombardment 1 Physical sputtering of single element solids ed. by R. Behrisch ... |
| title_full_unstemmed | Sputtering by particle bombardment 1 Physical sputtering of single element solids ed. by R. Behrisch ... |
| title_short | Sputtering by particle bombardment |
| title_sort | sputtering by particle bombardment physical sputtering of single element solids |
| volume_link | (DE-604)BV002356009 (DE-604)BV008007504 |
| work_keys_str_mv | AT behrischrainer sputteringbyparticlebombardment1 |