Sputtering by particle bombardment:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Berlin
Springer
|
| Schriftenreihe: | Topics in applied physics
|
| Schlagworte: | |
| ISBN: | 3540105212 0387105212 3540125930 3540534288 |
Internformat
MARC
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| 245 | 1 | 0 | |a Sputtering by particle bombardment |c ed. by R. Behrisch ... |
| 264 | 1 | |a Berlin |b Springer | |
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Topics in applied physics | |
| 650 | 4 | |a Pulvérisation cathodique | |
| 650 | 4 | |a Solides, Effets du rayonnement sur les | |
| 650 | 4 | |a Surfaces (Physique), Effet du rayonnement sur les | |
| 650 | 4 | |a Solids |x Effect of radiation on | |
| 650 | 4 | |a Sputtering (Physics) | |
| 650 | 4 | |a Surfaces (Physics) |x Effect of radiation on | |
| 650 | 0 | 7 | |a Sputtern |0 (DE-588)4182614-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Zerstäubung |0 (DE-588)4067687-0 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
| 689 | 0 | 0 | |a Sputtern |0 (DE-588)4182614-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Zerstäubung |0 (DE-588)4067687-0 |D s |
| 689 | 1 | |5 DE-604 | |
| 700 | 1 | |a Behrisch, Rainer |d 1934-2011 |e Sonstige |0 (DE-588)1031698396 |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-012153217 | ||
Datensatz im Suchindex
| _version_ | 1804131992007081984 |
|---|---|
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| callnumber-first | Q - Science |
| callnumber-label | QC176 |
| callnumber-raw | QC176.8.S72 |
| callnumber-search | QC176.8.S72 |
| callnumber-sort | QC 3176.8 S72 |
| callnumber-subject | QC - Physics |
| classification_rvk | UP 9350 |
| classification_tum | FER 786f PHY 480f PHY 790f |
| ctrlnum | (OCoLC)7306737 (DE-599)BVBBV002356009 |
| dewey-full | 530.4/1 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 530 - Physics |
| dewey-raw | 530.4/1 |
| dewey-search | 530.4/1 |
| dewey-sort | 3530.4 11 |
| dewey-tens | 530 - Physics |
| discipline | Physik Fertigungstechnik |
| format | Book |
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| genre_facet | Aufsatzsammlung |
| id | DE-604.BV002356009 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T19:45:44Z |
| institution | BVB |
| isbn | 3540105212 0387105212 3540125930 3540534288 |
| language | English |
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| publisher | Springer |
| record_format | marc |
| series2 | Topics in applied physics |
| spelling | Sputtering by particle bombardment ed. by R. Behrisch ... Berlin Springer txt rdacontent n rdamedia nc rdacarrier Topics in applied physics Pulvérisation cathodique Solides, Effets du rayonnement sur les Surfaces (Physique), Effet du rayonnement sur les Solids Effect of radiation on Sputtering (Physics) Surfaces (Physics) Effect of radiation on Sputtern (DE-588)4182614-0 gnd rswk-swf Zerstäubung (DE-588)4067687-0 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Sputtern (DE-588)4182614-0 s DE-604 Zerstäubung (DE-588)4067687-0 s Behrisch, Rainer 1934-2011 Sonstige (DE-588)1031698396 oth |
| spellingShingle | Sputtering by particle bombardment Pulvérisation cathodique Solides, Effets du rayonnement sur les Surfaces (Physique), Effet du rayonnement sur les Solids Effect of radiation on Sputtering (Physics) Surfaces (Physics) Effect of radiation on Sputtern (DE-588)4182614-0 gnd Zerstäubung (DE-588)4067687-0 gnd |
| subject_GND | (DE-588)4182614-0 (DE-588)4067687-0 (DE-588)4143413-4 |
| title | Sputtering by particle bombardment |
| title_auth | Sputtering by particle bombardment |
| title_exact_search | Sputtering by particle bombardment |
| title_full | Sputtering by particle bombardment ed. by R. Behrisch ... |
| title_fullStr | Sputtering by particle bombardment ed. by R. Behrisch ... |
| title_full_unstemmed | Sputtering by particle bombardment ed. by R. Behrisch ... |
| title_short | Sputtering by particle bombardment |
| title_sort | sputtering by particle bombardment |
| topic | Pulvérisation cathodique Solides, Effets du rayonnement sur les Surfaces (Physique), Effet du rayonnement sur les Solids Effect of radiation on Sputtering (Physics) Surfaces (Physics) Effect of radiation on Sputtern (DE-588)4182614-0 gnd Zerstäubung (DE-588)4067687-0 gnd |
| topic_facet | Pulvérisation cathodique Solides, Effets du rayonnement sur les Surfaces (Physique), Effet du rayonnement sur les Solids Effect of radiation on Sputtering (Physics) Surfaces (Physics) Effect of radiation on Sputtern Zerstäubung Aufsatzsammlung |
| work_keys_str_mv | AT behrischrainer sputteringbyparticlebombardment |