Integrated circuit metrology:
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Bellingham, Wash., USA
SPIE
|
| Series: | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE.
... |
| Subjects: | |
| Item Description: | Bandzählung teilw. fingiert |
| ISBN: | 0892523778 |
Staff View
MARC
| LEADER | 00000nam a2200000 ca4500 | ||
|---|---|---|---|
| 001 | BV002333638 | ||
| 003 | DE-604 | ||
| 005 | 20220112 | ||
| 007 | t | ||
| 008 | 891002nuuuuuuuu |||| 10||| eng d | ||
| 020 | |a 0892523778 |9 0-89252-377-8 | ||
| 035 | |a (DE-599)BVBBV002333638 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 084 | |a ELT 285f |2 stub | ||
| 245 | 1 | 0 | |a Integrated circuit metrology |c Hrsg. von Diana Nyyssonen* |
| 264 | 1 | |a Bellingham, Wash., USA |b SPIE | |
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE. |v ... | |
| 500 | |a Bandzählung teilw. fingiert | ||
| 650 | 0 | 7 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Messtechnik |0 (DE-588)4114575-6 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1982 |z Arlington, Va. |2 gnd-content | |
| 689 | 0 | 0 | |a Messtechnik |0 (DE-588)4114575-6 |D s |
| 689 | 0 | 1 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Nyyssonen, Diana |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-012149779 | ||
Record in the Search Index
| _version_ | 1804131987264372736 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV002333638 |
| classification_tum | ELT 285f |
| ctrlnum | (DE-599)BVBBV002333638 |
| discipline | Elektrotechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01171nam a2200325 ca4500</leader><controlfield tag="001">BV002333638</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20220112 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">891002nuuuuuuuu |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0892523778</subfield><subfield code="9">0-89252-377-8</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV002333638</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 285f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Integrated circuit metrology</subfield><subfield code="c">Hrsg. von Diana Nyyssonen*</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Bellingham, Wash., USA</subfield><subfield code="b">SPIE</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE.</subfield><subfield code="v">...</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Bandzählung teilw. fingiert</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Fotolithografie</subfield><subfield code="g">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4174516-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Messtechnik</subfield><subfield code="0">(DE-588)4114575-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1982</subfield><subfield code="z">Arlington, Va.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Messtechnik</subfield><subfield code="0">(DE-588)4114575-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Fotolithografie</subfield><subfield code="g">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4174516-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Nyyssonen, Diana</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-012149779</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1982 Arlington, Va. gnd-content |
| genre_facet | Konferenzschrift 1982 Arlington, Va. |
| id | DE-604.BV002333638 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T19:45:39Z |
| institution | BVB |
| isbn | 0892523778 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-012149779 |
| open_access_boolean | |
| publishDateSort | 0000 |
| publisher | SPIE |
| record_format | marc |
| series2 | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE. |
| spelling | Integrated circuit metrology Hrsg. von Diana Nyyssonen* Bellingham, Wash., USA SPIE txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE. ... Bandzählung teilw. fingiert Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf Messtechnik (DE-588)4114575-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1982 Arlington, Va. gnd-content Messtechnik (DE-588)4114575-6 s Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s DE-604 Nyyssonen, Diana Sonstige oth |
| spellingShingle | Integrated circuit metrology Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd Messtechnik (DE-588)4114575-6 gnd |
| subject_GND | (DE-588)4174516-4 (DE-588)4114575-6 (DE-588)1071861417 |
| title | Integrated circuit metrology |
| title_auth | Integrated circuit metrology |
| title_exact_search | Integrated circuit metrology |
| title_full | Integrated circuit metrology Hrsg. von Diana Nyyssonen* |
| title_fullStr | Integrated circuit metrology Hrsg. von Diana Nyyssonen* |
| title_full_unstemmed | Integrated circuit metrology Hrsg. von Diana Nyyssonen* |
| title_short | Integrated circuit metrology |
| title_sort | integrated circuit metrology |
| topic | Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd Messtechnik (DE-588)4114575-6 gnd |
| topic_facet | Fotolithografie Halbleitertechnologie Messtechnik Konferenzschrift 1982 Arlington, Va. |
| work_keys_str_mv | AT nyyssonendiana integratedcircuitmetrology |