Integrated circuit metrology:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash., USA
SPIE
|
| Schriftenreihe: | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE.
... |
| Schlagworte: | |
| Beschreibung: | Bandzählung teilw. fingiert |
| ISBN: | 0892523778 |
Internformat
MARC
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| 245 | 1 | 0 | |a Integrated circuit metrology |c Hrsg. von Diana Nyyssonen* |
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| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Nyyssonen, Diana |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-012149779 | ||
Datensatz im Suchindex
| _version_ | 1804131987264372736 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV002333638 |
| classification_tum | ELT 285f |
| ctrlnum | (DE-599)BVBBV002333638 |
| discipline | Elektrotechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1982 Arlington, Va. gnd-content |
| genre_facet | Konferenzschrift 1982 Arlington, Va. |
| id | DE-604.BV002333638 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T19:45:39Z |
| institution | BVB |
| isbn | 0892523778 |
| language | English |
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| publisher | SPIE |
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| series2 | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE. |
| spelling | Integrated circuit metrology Hrsg. von Diana Nyyssonen* Bellingham, Wash., USA SPIE txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE. ... Bandzählung teilw. fingiert Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf Messtechnik (DE-588)4114575-6 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1982 Arlington, Va. gnd-content Messtechnik (DE-588)4114575-6 s Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s DE-604 Nyyssonen, Diana Sonstige oth |
| spellingShingle | Integrated circuit metrology Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd Messtechnik (DE-588)4114575-6 gnd |
| subject_GND | (DE-588)4174516-4 (DE-588)4114575-6 (DE-588)1071861417 |
| title | Integrated circuit metrology |
| title_auth | Integrated circuit metrology |
| title_exact_search | Integrated circuit metrology |
| title_full | Integrated circuit metrology Hrsg. von Diana Nyyssonen* |
| title_fullStr | Integrated circuit metrology Hrsg. von Diana Nyyssonen* |
| title_full_unstemmed | Integrated circuit metrology Hrsg. von Diana Nyyssonen* |
| title_short | Integrated circuit metrology |
| title_sort | integrated circuit metrology |
| topic | Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd Messtechnik (DE-588)4114575-6 gnd |
| topic_facet | Fotolithografie Halbleitertechnologie Messtechnik Konferenzschrift 1982 Arlington, Va. |
| work_keys_str_mv | AT nyyssonendiana integratedcircuitmetrology |