APA (7th ed.) Citation

(1984). Dry etching for microelectronics. North-Holland Phys. Publ.

Chicago Style (17th ed.) Citation

Dry Etching for Microelectronics. Amsterdam u.a: North-Holland Phys. Publ, 1984.

MLA (9th ed.) Citation

Dry Etching for Microelectronics. North-Holland Phys. Publ, 1984.

Warning: These citations may not always be 100% accurate.