Mikromechanik: Mikrofertigung mit Methoden d. Halbleitertechnologie
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | German |
| Veröffentlicht: |
Berlin u.a.
Springer
1989
|
| Schlagworte: | |
| Beschreibung: | XVII, 501 S. Ill., graph. Darst. |
| ISBN: | 9783642466229 3540187219 0387187219 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV002294073 | ||
| 003 | DE-604 | ||
| 005 | 20220328 | ||
| 007 | t | ||
| 008 | 890928s1989 ad|| |||| 00||| ger d | ||
| 020 | |a 9783642466229 |9 978-3-642-46622-9 | ||
| 020 | |a 3540187219 |9 3-540-18721-9 | ||
| 020 | |a 0387187219 |9 0-387-18721-9 | ||
| 035 | |a (OCoLC)246822790 | ||
| 035 | |a (DE-599)BVBBV002294073 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a ger | |
| 049 | |a DE-91G |a DE-91 |a DE-859 |a DE-Aug4 |a DE-92 |a DE-898 |a DE-355 |a DE-29T |a DE-706 |a DE-523 |a DE-526 |a DE-634 |a DE-11 |a DE-188 |a DE-B1550 | ||
| 082 | 0 | |a 621.381/52 | |
| 084 | |a ZN 3600 |0 (DE-625)157328: |2 rvk | ||
| 084 | |a ZN 3700 |0 (DE-625)157333: |2 rvk | ||
| 084 | |a ZN 4100 |0 (DE-625)157351: |2 rvk | ||
| 084 | |a ZN 4980 |0 (DE-625)157428: |2 rvk | ||
| 084 | |a MAS 990f |2 stub | ||
| 084 | |a FER 792f |2 stub | ||
| 245 | 1 | 0 | |a Mikromechanik |b Mikrofertigung mit Methoden d. Halbleitertechnologie |c Anton Heuberger (Hrsg.) |
| 264 | 1 | |a Berlin u.a. |b Springer |c 1989 | |
| 300 | |a XVII, 501 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 0 | 7 | |a Mikromechanik |0 (DE-588)4205811-9 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Mikromechanik |0 (DE-588)4205811-9 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Heuberger, Anton |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-001507584 | ||
Datensatz im Suchindex
| _version_ | 1804116754031443968 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV002294073 |
| classification_rvk | ZN 3600 ZN 3700 ZN 4100 ZN 4980 |
| classification_tum | MAS 990f FER 792f |
| ctrlnum | (OCoLC)246822790 (DE-599)BVBBV002294073 |
| dewey-full | 621.381/52 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381/52 |
| dewey-search | 621.381/52 |
| dewey-sort | 3621.381 252 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik Maschinenbau |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01368nam a2200397 c 4500</leader><controlfield tag="001">BV002294073</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20220328 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">890928s1989 ad|| |||| 00||| ger d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783642466229</subfield><subfield code="9">978-3-642-46622-9</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3540187219</subfield><subfield code="9">3-540-18721-9</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0387187219</subfield><subfield code="9">0-387-18721-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)246822790</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV002294073</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">ger</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91G</subfield><subfield code="a">DE-91</subfield><subfield code="a">DE-859</subfield><subfield code="a">DE-Aug4</subfield><subfield code="a">DE-92</subfield><subfield code="a">DE-898</subfield><subfield code="a">DE-355</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-706</subfield><subfield code="a">DE-523</subfield><subfield code="a">DE-526</subfield><subfield code="a">DE-634</subfield><subfield code="a">DE-11</subfield><subfield code="a">DE-188</subfield><subfield code="a">DE-B1550</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381/52</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3600</subfield><subfield code="0">(DE-625)157328:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3700</subfield><subfield code="0">(DE-625)157333:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4100</subfield><subfield code="0">(DE-625)157351:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4980</subfield><subfield code="0">(DE-625)157428:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">MAS 990f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">FER 792f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Mikromechanik</subfield><subfield code="b">Mikrofertigung mit Methoden d. Halbleitertechnologie</subfield><subfield code="c">Anton Heuberger (Hrsg.)</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin u.a.</subfield><subfield code="b">Springer</subfield><subfield code="c">1989</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XVII, 501 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikromechanik</subfield><subfield code="0">(DE-588)4205811-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikromechanik</subfield><subfield code="0">(DE-588)4205811-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Heuberger, Anton</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-001507584</subfield></datafield></record></collection> |
| id | DE-604.BV002294073 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:43:32Z |
| institution | BVB |
| isbn | 9783642466229 3540187219 0387187219 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001507584 |
| oclc_num | 246822790 |
| open_access_boolean | |
| owner | DE-91G DE-BY-TUM DE-91 DE-BY-TUM DE-859 DE-Aug4 DE-92 DE-898 DE-BY-UBR DE-355 DE-BY-UBR DE-29T DE-706 DE-523 DE-526 DE-634 DE-11 DE-188 DE-B1550 |
| owner_facet | DE-91G DE-BY-TUM DE-91 DE-BY-TUM DE-859 DE-Aug4 DE-92 DE-898 DE-BY-UBR DE-355 DE-BY-UBR DE-29T DE-706 DE-523 DE-526 DE-634 DE-11 DE-188 DE-B1550 |
| physical | XVII, 501 S. Ill., graph. Darst. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Springer |
| record_format | marc |
| spelling | Mikromechanik Mikrofertigung mit Methoden d. Halbleitertechnologie Anton Heuberger (Hrsg.) Berlin u.a. Springer 1989 XVII, 501 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikromechanik (DE-588)4205811-9 s DE-604 Heuberger, Anton Sonstige oth |
| spellingShingle | Mikromechanik Mikrofertigung mit Methoden d. Halbleitertechnologie Mikromechanik (DE-588)4205811-9 gnd |
| subject_GND | (DE-588)4205811-9 |
| title | Mikromechanik Mikrofertigung mit Methoden d. Halbleitertechnologie |
| title_auth | Mikromechanik Mikrofertigung mit Methoden d. Halbleitertechnologie |
| title_exact_search | Mikromechanik Mikrofertigung mit Methoden d. Halbleitertechnologie |
| title_full | Mikromechanik Mikrofertigung mit Methoden d. Halbleitertechnologie Anton Heuberger (Hrsg.) |
| title_fullStr | Mikromechanik Mikrofertigung mit Methoden d. Halbleitertechnologie Anton Heuberger (Hrsg.) |
| title_full_unstemmed | Mikromechanik Mikrofertigung mit Methoden d. Halbleitertechnologie Anton Heuberger (Hrsg.) |
| title_short | Mikromechanik |
| title_sort | mikromechanik mikrofertigung mit methoden d halbleitertechnologie |
| title_sub | Mikrofertigung mit Methoden d. Halbleitertechnologie |
| topic | Mikromechanik (DE-588)4205811-9 gnd |
| topic_facet | Mikromechanik |
| work_keys_str_mv | AT heubergeranton mikromechanikmikrofertigungmitmethodendhalbleitertechnologie |