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Ion implantation:

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Bibliographic Details
Main Authors:	Ryssel, Heiner 1941- (Author), Ruge, Ingolf 1934- (Author)
Format:	Book
Language:	English German
Published:	Chichester u.a. Wiley 1986
Series:	A Wiley-Interscience publication
Subjects:	Ion implantation Semiconductors Halbleitertechnologie Halbleiter Ionenimplantation
Item Description:	EST: Ionenimplantation <engl.>
Physical Description:	XVII, 459 S.
ISBN:	047110311X

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MARC


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245	1	0	\|a Ion implantation \|c Heiner Ryssel and Ingolf Ruge
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490	0		\|a A Wiley-Interscience publication
500			\|a EST: Ionenimplantation <engl.>
650		4	\|a Ion implantation
650		4	\|a Semiconductors
650	0	7	\|a Halbleitertechnologie \|0 (DE-588)4158814-9 \|2 gnd \|9 rswk-swf
650	0	7	\|a Halbleiter \|0 (DE-588)4022993-2 \|2 gnd \|9 rswk-swf
650	0	7	\|a Ionenimplantation \|0 (DE-588)4027606-5 \|2 gnd \|9 rswk-swf
689	0	0	\|a Halbleiter \|0 (DE-588)4022993-2 \|D s
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689	0		\|5 DE-604
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700	1		\|a Ruge, Ingolf \|d 1934- \|e Verfasser \|0 (DE-588)106083392 \|4 aut
999			\|a oai:aleph.bib-bvb.de:BVB01-001505211
883	1		\|8 1\p \|a cgwrk \|d 20201028 \|q DE-101 \|u https://d-nb.info/provenance/plan#cgwrk

Record in the Search Index

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classification_tum	ELT 293f
ctrlnum	(OCoLC)10505298 (DE-599)BVBBV002290577
dewey-full	621.3815/2 660.2/9723
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dewey-ones	621 - Applied physics 660 - Chemical engineering
dewey-raw	621.3815/2 660.2/9723
dewey-search	621.3815/2 660.2/9723
dewey-sort	3621.3815 12
dewey-tens	620 - Engineering and allied operations 660 - Chemical engineering
discipline	Chemie / Pharmazie Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik
format	Book
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id	DE-604.BV002290577
illustrated	Not Illustrated
indexdate	2024-07-09T15:43:28Z
institution	BVB
isbn	047110311X
language	English German
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-001505211
oclc_num	10505298
open_access_boolean
owner	DE-91 DE-BY-TUM DE-29T DE-11
owner_facet	DE-91 DE-BY-TUM DE-29T DE-11
physical	XVII, 459 S.
publishDate	1986
publishDateSearch	1986
publishDateSort	1986
publisher	Wiley
record_format	marc
series2	A Wiley-Interscience publication
spelling	Ryssel, Heiner 1941- Verfasser (DE-588)108187802 aut Ion implantation Heiner Ryssel and Ingolf Ruge Chichester u.a. Wiley 1986 XVII, 459 S. txt rdacontent n rdamedia nc rdacarrier A Wiley-Interscience publication EST: Ionenimplantation <engl.> Ion implantation Semiconductors Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Halbleiter (DE-588)4022993-2 s Ionenimplantation (DE-588)4027606-5 s DE-604 Halbleitertechnologie (DE-588)4158814-9 s 1\p DE-604 Ruge, Ingolf 1934- Verfasser (DE-588)106083392 aut 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk
spellingShingle	Ryssel, Heiner 1941- Ruge, Ingolf 1934- Ion implantation Ion implantation Semiconductors Halbleitertechnologie (DE-588)4158814-9 gnd Halbleiter (DE-588)4022993-2 gnd Ionenimplantation (DE-588)4027606-5 gnd
subject_GND	(DE-588)4158814-9 (DE-588)4022993-2 (DE-588)4027606-5
title	Ion implantation
title_auth	Ion implantation
title_exact_search	Ion implantation
title_full	Ion implantation Heiner Ryssel and Ingolf Ruge
title_fullStr	Ion implantation Heiner Ryssel and Ingolf Ruge
title_full_unstemmed	Ion implantation Heiner Ryssel and Ingolf Ruge
title_short	Ion implantation
title_sort	ion implantation
topic	Ion implantation Semiconductors Halbleitertechnologie (DE-588)4158814-9 gnd Halbleiter (DE-588)4022993-2 gnd Ionenimplantation (DE-588)4027606-5 gnd
topic_facet	Ion implantation Semiconductors Halbleitertechnologie Halbleiter Ionenimplantation
work_keys_str_mv	AT rysselheiner ionimplantation AT rugeingolf ionimplantation

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