Ion implantation:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English German |
| Veröffentlicht: |
Chichester u.a.
Wiley
1986
|
| Schriftenreihe: | A Wiley-Interscience publication
|
| Schlagworte: | |
| Beschreibung: | EST: Ionenimplantation <engl.> |
| Beschreibung: | XVII, 459 S. |
| ISBN: | 047110311X |
Internformat
MARC
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|---|---|---|---|
| 001 | BV002290577 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 890928s1986 |||| 00||| eng d | ||
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| 100 | 1 | |a Ryssel, Heiner |d 1941- |e Verfasser |0 (DE-588)108187802 |4 aut | |
| 245 | 1 | 0 | |a Ion implantation |c Heiner Ryssel and Ingolf Ruge |
| 264 | 1 | |a Chichester u.a. |b Wiley |c 1986 | |
| 300 | |a XVII, 459 S. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a A Wiley-Interscience publication | |
| 500 | |a EST: Ionenimplantation <engl.> | ||
| 650 | 4 | |a Ion implantation | |
| 650 | 4 | |a Semiconductors | |
| 650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
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| 689 | 1 | 1 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |D s |
| 689 | 1 | |8 1\p |5 DE-604 | |
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Datensatz im Suchindex
| _version_ | 1804116750210433024 |
|---|---|
| any_adam_object | |
| author | Ryssel, Heiner 1941- Ruge, Ingolf 1934- |
| author_GND | (DE-588)108187802 (DE-588)106083392 |
| author_facet | Ryssel, Heiner 1941- Ruge, Ingolf 1934- |
| author_role | aut aut |
| author_sort | Ryssel, Heiner 1941- |
| author_variant | h r hr i r ir |
| building | Verbundindex |
| bvnumber | BV002290577 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 |
| callnumber-search | TK7871.85 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_tum | ELT 293f |
| ctrlnum | (OCoLC)10505298 (DE-599)BVBBV002290577 |
| dewey-full | 621.3815/2 660.2/9723 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics 660 - Chemical engineering |
| dewey-raw | 621.3815/2 660.2/9723 |
| dewey-search | 621.3815/2 660.2/9723 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations 660 - Chemical engineering |
| discipline | Chemie / Pharmazie Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV002290577 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T15:43:28Z |
| institution | BVB |
| isbn | 047110311X |
| language | English German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001505211 |
| oclc_num | 10505298 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-29T DE-11 |
| owner_facet | DE-91 DE-BY-TUM DE-29T DE-11 |
| physical | XVII, 459 S. |
| publishDate | 1986 |
| publishDateSearch | 1986 |
| publishDateSort | 1986 |
| publisher | Wiley |
| record_format | marc |
| series2 | A Wiley-Interscience publication |
| spelling | Ryssel, Heiner 1941- Verfasser (DE-588)108187802 aut Ion implantation Heiner Ryssel and Ingolf Ruge Chichester u.a. Wiley 1986 XVII, 459 S. txt rdacontent n rdamedia nc rdacarrier A Wiley-Interscience publication EST: Ionenimplantation <engl.> Ion implantation Semiconductors Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Halbleiter (DE-588)4022993-2 s Ionenimplantation (DE-588)4027606-5 s DE-604 Halbleitertechnologie (DE-588)4158814-9 s 1\p DE-604 Ruge, Ingolf 1934- Verfasser (DE-588)106083392 aut 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Ryssel, Heiner 1941- Ruge, Ingolf 1934- Ion implantation Ion implantation Semiconductors Halbleitertechnologie (DE-588)4158814-9 gnd Halbleiter (DE-588)4022993-2 gnd Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)4022993-2 (DE-588)4027606-5 |
| title | Ion implantation |
| title_auth | Ion implantation |
| title_exact_search | Ion implantation |
| title_full | Ion implantation Heiner Ryssel and Ingolf Ruge |
| title_fullStr | Ion implantation Heiner Ryssel and Ingolf Ruge |
| title_full_unstemmed | Ion implantation Heiner Ryssel and Ingolf Ruge |
| title_short | Ion implantation |
| title_sort | ion implantation |
| topic | Ion implantation Semiconductors Halbleitertechnologie (DE-588)4158814-9 gnd Halbleiter (DE-588)4022993-2 gnd Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Ion implantation Semiconductors Halbleitertechnologie Halbleiter Ionenimplantation |
| work_keys_str_mv | AT rysselheiner ionimplantation AT rugeingolf ionimplantation |