APA-Zitierstil (7. Ausg.)

Elliott, D. J. (1986). Microlithography: Process technology for IC fabrication. McGraw-Hill.

Chicago-Zitierstil (17. Ausg.)

Elliott, David J. Microlithography: Process Technology for IC Fabrication. New York u.a: McGraw-Hill, 1986.

MLA-Zitierstil (9. Ausg.)

Elliott, David J. Microlithography: Process Technology for IC Fabrication. McGraw-Hill, 1986.