Tungsten and other refractory metals for VLSI applications: proceedings of the 1985 workshop held Oct. 7 - 9, 1985, Albuquerque, New Mexico, USA and the 1984 workshop held Nov. 12 - 13, 1984, Albuquerque, New Mexico, USA
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
Pittsburgh, Pa.
Materials Research Soc.
1986
|
| Schlagworte: | |
| Beschreibung: | Literaturangaben |
| Beschreibung: | XV, 571 S. Ill., graph. Darst. |
| ISBN: | 0931837324 |
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| genre_facet | Konferenzschrift 1984 Albuquerque NM |
| id | DE-604.BV002196010 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:41:54Z |
| institution | BVB |
| isbn | 0931837324 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001442720 |
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| physical | XV, 571 S. Ill., graph. Darst. |
| publishDate | 1986 |
| publishDateSearch | 1986 |
| publishDateSort | 1986 |
| publisher | Materials Research Soc. |
| record_format | marc |
| spelling | Tungsten and other refractory metals for VLSI applications proceedings of the 1985 workshop held Oct. 7 - 9, 1985, Albuquerque, New Mexico, USA and the 1984 workshop held Nov. 12 - 13, 1984, Albuquerque, New Mexico, USA ed.: Robert S. Blewer Pittsburgh, Pa. Materials Research Soc. 1986 XV, 571 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben Feuerfester Stoff (DE-588)4154265-4 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf Wolfram (DE-588)4066862-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1984 Albuquerque NM gnd-content Feuerfester Stoff (DE-588)4154265-4 s VLSI (DE-588)4117388-0 s DE-604 Wolfram (DE-588)4066862-9 s Blewer, Robert S. Sonstige oth |
| spellingShingle | Tungsten and other refractory metals for VLSI applications proceedings of the 1985 workshop held Oct. 7 - 9, 1985, Albuquerque, New Mexico, USA and the 1984 workshop held Nov. 12 - 13, 1984, Albuquerque, New Mexico, USA Feuerfester Stoff (DE-588)4154265-4 gnd VLSI (DE-588)4117388-0 gnd Wolfram (DE-588)4066862-9 gnd |
| subject_GND | (DE-588)4154265-4 (DE-588)4117388-0 (DE-588)4066862-9 (DE-588)1071861417 |
| title | Tungsten and other refractory metals for VLSI applications proceedings of the 1985 workshop held Oct. 7 - 9, 1985, Albuquerque, New Mexico, USA and the 1984 workshop held Nov. 12 - 13, 1984, Albuquerque, New Mexico, USA |
| title_auth | Tungsten and other refractory metals for VLSI applications proceedings of the 1985 workshop held Oct. 7 - 9, 1985, Albuquerque, New Mexico, USA and the 1984 workshop held Nov. 12 - 13, 1984, Albuquerque, New Mexico, USA |
| title_exact_search | Tungsten and other refractory metals for VLSI applications proceedings of the 1985 workshop held Oct. 7 - 9, 1985, Albuquerque, New Mexico, USA and the 1984 workshop held Nov. 12 - 13, 1984, Albuquerque, New Mexico, USA |
| title_full | Tungsten and other refractory metals for VLSI applications proceedings of the 1985 workshop held Oct. 7 - 9, 1985, Albuquerque, New Mexico, USA and the 1984 workshop held Nov. 12 - 13, 1984, Albuquerque, New Mexico, USA ed.: Robert S. Blewer |
| title_fullStr | Tungsten and other refractory metals for VLSI applications proceedings of the 1985 workshop held Oct. 7 - 9, 1985, Albuquerque, New Mexico, USA and the 1984 workshop held Nov. 12 - 13, 1984, Albuquerque, New Mexico, USA ed.: Robert S. Blewer |
| title_full_unstemmed | Tungsten and other refractory metals for VLSI applications proceedings of the 1985 workshop held Oct. 7 - 9, 1985, Albuquerque, New Mexico, USA and the 1984 workshop held Nov. 12 - 13, 1984, Albuquerque, New Mexico, USA ed.: Robert S. Blewer |
| title_short | Tungsten and other refractory metals for VLSI applications |
| title_sort | tungsten and other refractory metals for vlsi applications proceedings of the 1985 workshop held oct 7 9 1985 albuquerque new mexico usa and the 1984 workshop held nov 12 13 1984 albuquerque new mexico usa |
| title_sub | proceedings of the 1985 workshop held Oct. 7 - 9, 1985, Albuquerque, New Mexico, USA and the 1984 workshop held Nov. 12 - 13, 1984, Albuquerque, New Mexico, USA |
| topic | Feuerfester Stoff (DE-588)4154265-4 gnd VLSI (DE-588)4117388-0 gnd Wolfram (DE-588)4066862-9 gnd |
| topic_facet | Feuerfester Stoff VLSI Wolfram Konferenzschrift 1984 Albuquerque NM |
| work_keys_str_mv | AT blewerroberts tungstenandotherrefractorymetalsforvlsiapplicationsproceedingsofthe1985workshopheldoct791985albuquerquenewmexicousaandthe1984workshopheldnov12131984albuquerquenewmexicousa |