Proceedings of the thirteenth annual Symposium of the Greater New York Chapter of the AVS on Plasma and Ion-Beam Processing: 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, NY
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
New York
American Vacuum Soc.
1982
|
| Schriftenreihe: | Journal of vacuum science and technology
21,3 |
| Schlagworte: | |
| Beschreibung: | Einzelaufnahme eines Zeitschr.-H. |
| Beschreibung: | S. 725 - 1134 Ill., graph. Darst. |
Internformat
MARC
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| 111 | 2 | |a Symposium on Plasma and Ion Beam Processing |n 13 |d 1982 |c Yorktown Heights, NY |j Verfasser |0 (DE-588)5322662-8 |4 aut | |
| 245 | 1 | 0 | |a Proceedings of the thirteenth annual Symposium of the Greater New York Chapter of the AVS on Plasma and Ion-Beam Processing |b 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, NY |c Symposium on Plasma and Ion-Beam Processing <13, 1982, Yorktown Heights, NY> ; American Vacuum Society / Greater New York Chapter. Hrsg. von Roger Kelly* |
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Datensatz im Suchindex
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| author_corporate | Symposium on Plasma and Ion Beam Processing Yorktown Heights, NY |
| author_corporate_role | aut |
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| author_sort | Symposium on Plasma and Ion Beam Processing Yorktown Heights, NY |
| building | Verbundindex |
| bvnumber | BV002162862 |
| classification_tum | PHY 790f |
| ctrlnum | (OCoLC)630961140 (DE-599)BVBBV002162862 |
| discipline | Physik |
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| genre_facet | Konferenzschrift 1982 Yorktown Heights NY |
| id | DE-604.BV002162862 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:41:23Z |
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| physical | S. 725 - 1134 Ill., graph. Darst. |
| publishDate | 1982 |
| publishDateSearch | 1982 |
| publishDateSort | 1982 |
| publisher | American Vacuum Soc. |
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| series2 | Journal of vacuum science and technology |
| spelling | Symposium on Plasma and Ion Beam Processing 13 1982 Yorktown Heights, NY Verfasser (DE-588)5322662-8 aut Proceedings of the thirteenth annual Symposium of the Greater New York Chapter of the AVS on Plasma and Ion-Beam Processing 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, NY Symposium on Plasma and Ion-Beam Processing <13, 1982, Yorktown Heights, NY> ; American Vacuum Society / Greater New York Chapter. Hrsg. von Roger Kelly* New York American Vacuum Soc. 1982 S. 725 - 1134 Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Journal of vacuum science and technology 21,3 Einzelaufnahme eines Zeitschr.-H. Plasmaätzen (DE-588)4174821-9 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1982 Yorktown Heights NY gnd-content Plasmaätzen (DE-588)4174821-9 s DE-604 Sputtern (DE-588)4182614-0 s Kelly, Roger Sonstige oth American Vacuum Society Greater New York Chapter Sonstige (DE-588)8116-4 oth |
| spellingShingle | Proceedings of the thirteenth annual Symposium of the Greater New York Chapter of the AVS on Plasma and Ion-Beam Processing 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, NY Plasmaätzen (DE-588)4174821-9 gnd Sputtern (DE-588)4182614-0 gnd |
| subject_GND | (DE-588)4174821-9 (DE-588)4182614-0 (DE-588)1071861417 |
| title | Proceedings of the thirteenth annual Symposium of the Greater New York Chapter of the AVS on Plasma and Ion-Beam Processing 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, NY |
| title_auth | Proceedings of the thirteenth annual Symposium of the Greater New York Chapter of the AVS on Plasma and Ion-Beam Processing 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, NY |
| title_exact_search | Proceedings of the thirteenth annual Symposium of the Greater New York Chapter of the AVS on Plasma and Ion-Beam Processing 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, NY |
| title_full | Proceedings of the thirteenth annual Symposium of the Greater New York Chapter of the AVS on Plasma and Ion-Beam Processing 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, NY Symposium on Plasma and Ion-Beam Processing <13, 1982, Yorktown Heights, NY> ; American Vacuum Society / Greater New York Chapter. Hrsg. von Roger Kelly* |
| title_fullStr | Proceedings of the thirteenth annual Symposium of the Greater New York Chapter of the AVS on Plasma and Ion-Beam Processing 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, NY Symposium on Plasma and Ion-Beam Processing <13, 1982, Yorktown Heights, NY> ; American Vacuum Society / Greater New York Chapter. Hrsg. von Roger Kelly* |
| title_full_unstemmed | Proceedings of the thirteenth annual Symposium of the Greater New York Chapter of the AVS on Plasma and Ion-Beam Processing 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, NY Symposium on Plasma and Ion-Beam Processing <13, 1982, Yorktown Heights, NY> ; American Vacuum Society / Greater New York Chapter. Hrsg. von Roger Kelly* |
| title_short | Proceedings of the thirteenth annual Symposium of the Greater New York Chapter of the AVS on Plasma and Ion-Beam Processing |
| title_sort | proceedings of the thirteenth annual symposium of the greater new york chapter of the avs on plasma and ion beam processing 2 june 1982 ibm thomas j watson research center yorktown heights ny |
| title_sub | 2 June 1982, IBM Thomas J. Watson Research Center, Yorktown Heights, NY |
| topic | Plasmaätzen (DE-588)4174821-9 gnd Sputtern (DE-588)4182614-0 gnd |
| topic_facet | Plasmaätzen Sputtern Konferenzschrift 1982 Yorktown Heights NY |
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