Submicron lithography: March 29 - 30, 1982, Santa Clara, Calif.
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Bellingham, Washington
Internat. Soc. for Optical Engineering
1982
|
| Series: | International Society for Optical Engineering: Proceedings of SPIE.
333. |
| Subjects: | |
| Physical Description: | VIII, 179 S. zahlr. Ill. u. graph. Darst. |
| ISBN: | 0892523689 |
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MARC
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Record in the Search Index
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik Industrien, sonstige |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1982 Santa Clara Calif. gnd-content |
| genre_facet | Konferenzschrift 1982 Santa Clara Calif. |
| id | DE-604.BV002162851 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:41:23Z |
| institution | BVB |
| isbn | 0892523689 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001420325 |
| oclc_num | 8619934 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-83 DE-11 |
| owner_facet | DE-91 DE-BY-TUM DE-83 DE-11 |
| physical | VIII, 179 S. zahlr. Ill. u. graph. Darst. |
| psigel | TUB-nseb |
| publishDate | 1982 |
| publishDateSearch | 1982 |
| publishDateSort | 1982 |
| publisher | Internat. Soc. for Optical Engineering |
| record_format | marc |
| series | International Society for Optical Engineering: Proceedings of SPIE. |
| series2 | International Society for Optical Engineering: Proceedings of SPIE. |
| spelling | Submicron lithography March 29 - 30, 1982, Santa Clara, Calif. Hrsg. von Phillip D. Blais* Bellingham, Washington Internat. Soc. for Optical Engineering 1982 VIII, 179 S. zahlr. Ill. u. graph. Darst. txt rdacontent n rdamedia nc rdacarrier International Society for Optical Engineering: Proceedings of SPIE. 333. Photolithography Congresses Photoresists Congresses Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1982 Santa Clara Calif. gnd-content Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s DE-604 Blais, Phillip D. Sonstige oth International Society for Optical Engineering: Proceedings of SPIE. 333. (DE-604)BV000010887 333. |
| spellingShingle | Submicron lithography March 29 - 30, 1982, Santa Clara, Calif. International Society for Optical Engineering: Proceedings of SPIE. Photolithography Congresses Photoresists Congresses Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| subject_GND | (DE-588)4174516-4 (DE-588)1071861417 |
| title | Submicron lithography March 29 - 30, 1982, Santa Clara, Calif. |
| title_auth | Submicron lithography March 29 - 30, 1982, Santa Clara, Calif. |
| title_exact_search | Submicron lithography March 29 - 30, 1982, Santa Clara, Calif. |
| title_full | Submicron lithography March 29 - 30, 1982, Santa Clara, Calif. Hrsg. von Phillip D. Blais* |
| title_fullStr | Submicron lithography March 29 - 30, 1982, Santa Clara, Calif. Hrsg. von Phillip D. Blais* |
| title_full_unstemmed | Submicron lithography March 29 - 30, 1982, Santa Clara, Calif. Hrsg. von Phillip D. Blais* |
| title_short | Submicron lithography |
| title_sort | submicron lithography march 29 30 1982 santa clara calif |
| title_sub | March 29 - 30, 1982, Santa Clara, Calif. |
| topic | Photolithography Congresses Photoresists Congresses Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| topic_facet | Photolithography Congresses Photoresists Congresses Fotolithografie Halbleitertechnologie Konferenzschrift 1982 Santa Clara Calif. |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT blaisphillipd submicronlithographymarch29301982santaclaracalif |