APA (7th ed.) Citation

(1982). Submicron lithography: March 29 - 30, 1982, Santa Clara, Calif. Internat. Soc. for Optical Engineering.

Chicago Style (17th ed.) Citation

Submicron Lithography: March 29 - 30, 1982, Santa Clara, Calif. Bellingham, Washington: Internat. Soc. for Optical Engineering, 1982.

MLA (9th ed.) Citation

Submicron Lithography: March 29 - 30, 1982, Santa Clara, Calif. Internat. Soc. for Optical Engineering, 1982.