Symposium on the Deposition of Thin Films by Sputtering: June 6 - 7, 1967
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Rochester, NY
1967
|
| Schlagworte: | |
| Beschreibung: | Literaturangaben |
| Beschreibung: | IV, 146 S. graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV002158509 | ||
| 003 | DE-604 | ||
| 005 | 19990310 | ||
| 007 | t | ||
| 008 | 890928s1967 d||| |||| 10||| und d | ||
| 035 | |a (OCoLC)630917256 | ||
| 035 | |a (DE-599)BVBBV002158509 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | |a und | ||
| 049 | |a DE-91 | ||
| 084 | |a ELT 279f |2 stub | ||
| 111 | 2 | |a Symposium on the Deposition of Thin Films by Sputtering |n 2 |d 1967 |c Rochester, NY |j Verfasser |0 (DE-588)5271602-8 |4 aut | |
| 245 | 1 | 0 | |a Symposium on the Deposition of Thin Films by Sputtering |b June 6 - 7, 1967 |c Symposium on the Deposition of Thin Films by Sputtering <2, 1967, Rochester, NY> ; University <Rochester, NY>* |
| 264 | 1 | |a Rochester, NY |c 1967 | |
| 300 | |a IV, 146 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 500 | |a Literaturangaben | ||
| 650 | 0 | 7 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Sputtern |0 (DE-588)4182614-0 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1967 |z Rochester NY |2 gnd-content | |
| 689 | 0 | 0 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |D s |
| 689 | 0 | 1 | |a Sputtern |0 (DE-588)4182614-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 710 | 2 | |a University of Rochester |e Sonstige |0 (DE-588)1010795-2 |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-001417143 | ||
Datensatz im Suchindex
| _version_ | 1804116614443958272 |
|---|---|
| any_adam_object | |
| author_corporate | Symposium on the Deposition of Thin Films by Sputtering Rochester, NY |
| author_corporate_role | aut |
| author_facet | Symposium on the Deposition of Thin Films by Sputtering Rochester, NY |
| author_sort | Symposium on the Deposition of Thin Films by Sputtering Rochester, NY |
| building | Verbundindex |
| bvnumber | BV002158509 |
| classification_tum | ELT 279f |
| ctrlnum | (OCoLC)630917256 (DE-599)BVBBV002158509 |
| discipline | Elektrotechnik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01351nam a2200349 c 4500</leader><controlfield tag="001">BV002158509</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19990310 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">890928s1967 d||| |||| 10||| und d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)630917256</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV002158509</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">und</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 279f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">Symposium on the Deposition of Thin Films by Sputtering</subfield><subfield code="n">2</subfield><subfield code="d">1967</subfield><subfield code="c">Rochester, NY</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)5271602-8</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Symposium on the Deposition of Thin Films by Sputtering</subfield><subfield code="b">June 6 - 7, 1967</subfield><subfield code="c">Symposium on the Deposition of Thin Films by Sputtering <2, 1967, Rochester, NY> ; University <Rochester, NY>*</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Rochester, NY</subfield><subfield code="c">1967</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">IV, 146 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünnschichttechnik</subfield><subfield code="0">(DE-588)4136339-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Sputtern</subfield><subfield code="0">(DE-588)4182614-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1967</subfield><subfield code="z">Rochester NY</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Dünnschichttechnik</subfield><subfield code="0">(DE-588)4136339-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Sputtern</subfield><subfield code="0">(DE-588)4182614-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">University of Rochester</subfield><subfield code="e">Sonstige</subfield><subfield code="0">(DE-588)1010795-2</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-001417143</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1967 Rochester NY gnd-content |
| genre_facet | Konferenzschrift 1967 Rochester NY |
| id | DE-604.BV002158509 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:41:18Z |
| institution | BVB |
| institution_GND | (DE-588)5271602-8 (DE-588)1010795-2 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001417143 |
| oclc_num | 630917256 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | IV, 146 S. graph. Darst. |
| publishDate | 1967 |
| publishDateSearch | 1967 |
| publishDateSort | 1967 |
| record_format | marc |
| spelling | Symposium on the Deposition of Thin Films by Sputtering 2 1967 Rochester, NY Verfasser (DE-588)5271602-8 aut Symposium on the Deposition of Thin Films by Sputtering June 6 - 7, 1967 Symposium on the Deposition of Thin Films by Sputtering <2, 1967, Rochester, NY> ; University <Rochester, NY>* Rochester, NY 1967 IV, 146 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Literaturangaben Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1967 Rochester NY gnd-content Dünnschichttechnik (DE-588)4136339-5 s Sputtern (DE-588)4182614-0 s DE-604 University of Rochester Sonstige (DE-588)1010795-2 oth |
| spellingShingle | Symposium on the Deposition of Thin Films by Sputtering June 6 - 7, 1967 Dünnschichttechnik (DE-588)4136339-5 gnd Sputtern (DE-588)4182614-0 gnd |
| subject_GND | (DE-588)4136339-5 (DE-588)4182614-0 (DE-588)1071861417 |
| title | Symposium on the Deposition of Thin Films by Sputtering June 6 - 7, 1967 |
| title_auth | Symposium on the Deposition of Thin Films by Sputtering June 6 - 7, 1967 |
| title_exact_search | Symposium on the Deposition of Thin Films by Sputtering June 6 - 7, 1967 |
| title_full | Symposium on the Deposition of Thin Films by Sputtering June 6 - 7, 1967 Symposium on the Deposition of Thin Films by Sputtering <2, 1967, Rochester, NY> ; University <Rochester, NY>* |
| title_fullStr | Symposium on the Deposition of Thin Films by Sputtering June 6 - 7, 1967 Symposium on the Deposition of Thin Films by Sputtering <2, 1967, Rochester, NY> ; University <Rochester, NY>* |
| title_full_unstemmed | Symposium on the Deposition of Thin Films by Sputtering June 6 - 7, 1967 Symposium on the Deposition of Thin Films by Sputtering <2, 1967, Rochester, NY> ; University <Rochester, NY>* |
| title_short | Symposium on the Deposition of Thin Films by Sputtering |
| title_sort | symposium on the deposition of thin films by sputtering june 6 7 1967 |
| title_sub | June 6 - 7, 1967 |
| topic | Dünnschichttechnik (DE-588)4136339-5 gnd Sputtern (DE-588)4182614-0 gnd |
| topic_facet | Dünnschichttechnik Sputtern Konferenzschrift 1967 Rochester NY |
| work_keys_str_mv | AT symposiumonthedepositionofthinfilmsbysputteringrochesterny symposiumonthedepositionofthinfilmsbysputteringjune671967 AT universityofrochester symposiumonthedepositionofthinfilmsbysputteringjune671967 |