Electron-beam technology in microelectronic fabrication:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
New York (u.a.)
Acad. Pr.
1980
|
| Schlagworte: | |
| Beschreibung: | XI, 362 S. Ill., graph. Darst. |
| ISBN: | 012133550X |
Internformat
MARC
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Datensatz im Suchindex
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV002158380 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:41:18Z |
| institution | BVB |
| isbn | 012133550X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001417048 |
| oclc_num | 6223500 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-29T DE-83 DE-11 |
| owner_facet | DE-91 DE-BY-TUM DE-29T DE-83 DE-11 |
| physical | XI, 362 S. Ill., graph. Darst. |
| psigel | TUB-nseb |
| publishDate | 1980 |
| publishDateSearch | 1980 |
| publishDateSort | 1980 |
| publisher | Acad. Pr. |
| record_format | marc |
| spelling | Electron-beam technology in microelectronic fabrication Hrsg. von George R. Brewer* New York (u.a.) Acad. Pr. 1980 XI, 362 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Lithographie par faisceau d'électrons Microélectronique Lithography, Electron beam Microelectronics Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Elektronenstrahllithografie (DE-588)4151897-4 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 s Elektronenstrahllithografie (DE-588)4151897-4 s DE-604 Brewer, George R. Sonstige oth |
| spellingShingle | Electron-beam technology in microelectronic fabrication Lithographie par faisceau d'électrons Microélectronique Lithography, Electron beam Microelectronics Mikroelektronik (DE-588)4039207-7 gnd Elektronenstrahllithografie (DE-588)4151897-4 gnd |
| subject_GND | (DE-588)4039207-7 (DE-588)4151897-4 |
| title | Electron-beam technology in microelectronic fabrication |
| title_auth | Electron-beam technology in microelectronic fabrication |
| title_exact_search | Electron-beam technology in microelectronic fabrication |
| title_full | Electron-beam technology in microelectronic fabrication Hrsg. von George R. Brewer* |
| title_fullStr | Electron-beam technology in microelectronic fabrication Hrsg. von George R. Brewer* |
| title_full_unstemmed | Electron-beam technology in microelectronic fabrication Hrsg. von George R. Brewer* |
| title_short | Electron-beam technology in microelectronic fabrication |
| title_sort | electron beam technology in microelectronic fabrication |
| topic | Lithographie par faisceau d'électrons Microélectronique Lithography, Electron beam Microelectronics Mikroelektronik (DE-588)4039207-7 gnd Elektronenstrahllithografie (DE-588)4151897-4 gnd |
| topic_facet | Lithographie par faisceau d'électrons Microélectronique Lithography, Electron beam Microelectronics Mikroelektronik Elektronenstrahllithografie |
| work_keys_str_mv | AT brewergeorger electronbeamtechnologyinmicroelectronicfabrication |