Untersuchungen zum Einbau implantierter Fremdatome in kristallines Silizium:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Heidelberg
1982
|
| Schlagworte: | |
| Beschreibung: | Heidelberg, Univ., Diss., 1982 |
| Beschreibung: | 54 Bl. graph. Darst. |
Internformat
MARC
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Datensatz im Suchindex
| _version_ | 1804116607285329920 |
|---|---|
| any_adam_object | |
| author | Frerichs, Heinz-Peter |
| author_facet | Frerichs, Heinz-Peter |
| author_role | aut |
| author_sort | Frerichs, Heinz-Peter |
| author_variant | h p f hpf |
| building | Verbundindex |
| bvnumber | BV002152351 |
| ctrlnum | (OCoLC)46125762 (DE-599)BVBBV002152351 |
| format | Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV002152351 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:41:12Z |
| institution | BVB |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001412170 |
| oclc_num | 46125762 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | 54 Bl. graph. Darst. |
| publishDate | 1982 |
| publishDateSearch | 1982 |
| publishDateSort | 1982 |
| record_format | marc |
| spelling | Frerichs, Heinz-Peter Verfasser aut Untersuchungen zum Einbau implantierter Fremdatome in kristallines Silizium Heidelberg 1982 54 Bl. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Heidelberg, Univ., Diss., 1982 Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Kristall (DE-588)4033209-3 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Fremdatom (DE-588)4155363-9 gnd rswk-swf Polykristall (DE-588)4188261-1 gnd rswk-swf Implantation (DE-588)4026660-6 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Silicium (DE-588)4077445-4 s Ionenimplantation (DE-588)4027606-5 s DE-604 Polykristall (DE-588)4188261-1 s Fremdatom (DE-588)4155363-9 s Implantation (DE-588)4026660-6 s 1\p DE-604 Kristall (DE-588)4033209-3 s 2\p DE-604 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Frerichs, Heinz-Peter Untersuchungen zum Einbau implantierter Fremdatome in kristallines Silizium Ionenimplantation (DE-588)4027606-5 gnd Kristall (DE-588)4033209-3 gnd Silicium (DE-588)4077445-4 gnd Fremdatom (DE-588)4155363-9 gnd Polykristall (DE-588)4188261-1 gnd Implantation (DE-588)4026660-6 gnd |
| subject_GND | (DE-588)4027606-5 (DE-588)4033209-3 (DE-588)4077445-4 (DE-588)4155363-9 (DE-588)4188261-1 (DE-588)4026660-6 (DE-588)4113937-9 |
| title | Untersuchungen zum Einbau implantierter Fremdatome in kristallines Silizium |
| title_auth | Untersuchungen zum Einbau implantierter Fremdatome in kristallines Silizium |
| title_exact_search | Untersuchungen zum Einbau implantierter Fremdatome in kristallines Silizium |
| title_full | Untersuchungen zum Einbau implantierter Fremdatome in kristallines Silizium |
| title_fullStr | Untersuchungen zum Einbau implantierter Fremdatome in kristallines Silizium |
| title_full_unstemmed | Untersuchungen zum Einbau implantierter Fremdatome in kristallines Silizium |
| title_short | Untersuchungen zum Einbau implantierter Fremdatome in kristallines Silizium |
| title_sort | untersuchungen zum einbau implantierter fremdatome in kristallines silizium |
| topic | Ionenimplantation (DE-588)4027606-5 gnd Kristall (DE-588)4033209-3 gnd Silicium (DE-588)4077445-4 gnd Fremdatom (DE-588)4155363-9 gnd Polykristall (DE-588)4188261-1 gnd Implantation (DE-588)4026660-6 gnd |
| topic_facet | Ionenimplantation Kristall Silicium Fremdatom Polykristall Implantation Hochschulschrift |
| work_keys_str_mv | AT frerichsheinzpeter untersuchungenzumeinbauimplantierterfremdatomeinkristallinessilizium |