Ion implantation in microelectronics: a comprehensive bibliogr.
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
New York (u.a.)
JFJ Plenum
1981
|
| Schriftenreihe: | Computer science information guides.
1. |
| Schlagworte: | |
| Beschreibung: | X, 255 S. |
| ISBN: | 030665198X |
Internformat
MARC
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| 035 | |a (DE-599)BVBBV002148427 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
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| 100 | 1 | |a Agajanian, A. H. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Ion implantation in microelectronics |b a comprehensive bibliogr. |
| 264 | 1 | |a New York (u.a.) |b JFJ Plenum |c 1981 | |
| 300 | |a X, 255 S. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Computer science information guides. |v 1. | |
| 650 | 7 | |a Ions - Implantation - Bibliographie |2 ram | |
| 650 | 7 | |a Semiconducteurs - Dopage - Bibliographie |2 ram | |
| 650 | 4 | |a Ion implantation |v Bibliography | |
| 650 | 4 | |a Semiconductor doping |v Bibliography | |
| 650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikroelektronik |0 (DE-588)4039207-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dotierung |0 (DE-588)4130672-7 |2 gnd |9 rswk-swf |
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| 655 | 7 | |0 (DE-588)4006432-3 |a Bibliografie |2 gnd-content | |
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| 689 | 0 | 1 | |a Dotierung |0 (DE-588)4130672-7 |D s |
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| 689 | 1 | 0 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
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Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author | Agajanian, A. H. |
| author_facet | Agajanian, A. H. |
| author_role | aut |
| author_sort | Agajanian, A. H. |
| author_variant | a h a ah aha |
| building | Verbundindex |
| bvnumber | BV002148427 |
| callnumber-first | T - Technology |
| callnumber-label | TK7871 |
| callnumber-raw | TK7871.85 Z5838.S4 |
| callnumber-search | TK7871.85 Z5838.S4 |
| callnumber-sort | TK 47871.85 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| ctrlnum | (OCoLC)7615188 (DE-599)BVBBV002148427 |
| dewey-full | 016.621381/71 |
| dewey-hundreds | 000 - Computer science, information, general works |
| dewey-ones | 016 - Of works on specific subjects |
| dewey-raw | 016.621381/71 |
| dewey-search | 016.621381/71 |
| dewey-sort | 216.621381 271 |
| dewey-tens | 010 - Bibliography |
| discipline | Allgemeines |
| format | Book |
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| genre | (DE-588)4006432-3 Bibliografie gnd-content |
| genre_facet | Bibliografie |
| id | DE-604.BV002148427 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T15:41:08Z |
| institution | BVB |
| isbn | 030665198X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001409325 |
| oclc_num | 7615188 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-29T DE-706 |
| owner_facet | DE-91 DE-BY-TUM DE-29T DE-706 |
| physical | X, 255 S. |
| publishDate | 1981 |
| publishDateSearch | 1981 |
| publishDateSort | 1981 |
| publisher | JFJ Plenum |
| record_format | marc |
| series | Computer science information guides. |
| series2 | Computer science information guides. |
| spelling | Agajanian, A. H. Verfasser aut Ion implantation in microelectronics a comprehensive bibliogr. New York (u.a.) JFJ Plenum 1981 X, 255 S. txt rdacontent n rdamedia nc rdacarrier Computer science information guides. 1. Ions - Implantation - Bibliographie ram Semiconducteurs - Dopage - Bibliographie ram Ion implantation Bibliography Semiconductor doping Bibliography Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Dotierung (DE-588)4130672-7 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf (DE-588)4006432-3 Bibliografie gnd-content Halbleiter (DE-588)4022993-2 s Dotierung (DE-588)4130672-7 s DE-604 Ionenimplantation (DE-588)4027606-5 s Mikroelektronik (DE-588)4039207-7 s Computer science information guides. 1. (DE-604)BV001898344 1. |
| spellingShingle | Agajanian, A. H. Ion implantation in microelectronics a comprehensive bibliogr. Computer science information guides. Ions - Implantation - Bibliographie ram Semiconducteurs - Dopage - Bibliographie ram Ion implantation Bibliography Semiconductor doping Bibliography Ionenimplantation (DE-588)4027606-5 gnd Mikroelektronik (DE-588)4039207-7 gnd Dotierung (DE-588)4130672-7 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4027606-5 (DE-588)4039207-7 (DE-588)4130672-7 (DE-588)4022993-2 (DE-588)4006432-3 |
| title | Ion implantation in microelectronics a comprehensive bibliogr. |
| title_auth | Ion implantation in microelectronics a comprehensive bibliogr. |
| title_exact_search | Ion implantation in microelectronics a comprehensive bibliogr. |
| title_full | Ion implantation in microelectronics a comprehensive bibliogr. |
| title_fullStr | Ion implantation in microelectronics a comprehensive bibliogr. |
| title_full_unstemmed | Ion implantation in microelectronics a comprehensive bibliogr. |
| title_short | Ion implantation in microelectronics |
| title_sort | ion implantation in microelectronics a comprehensive bibliogr |
| title_sub | a comprehensive bibliogr. |
| topic | Ions - Implantation - Bibliographie ram Semiconducteurs - Dopage - Bibliographie ram Ion implantation Bibliography Semiconductor doping Bibliography Ionenimplantation (DE-588)4027606-5 gnd Mikroelektronik (DE-588)4039207-7 gnd Dotierung (DE-588)4130672-7 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Ions - Implantation - Bibliographie Semiconducteurs - Dopage - Bibliographie Ion implantation Bibliography Semiconductor doping Bibliography Ionenimplantation Mikroelektronik Dotierung Halbleiter Bibliografie |
| volume_link | (DE-604)BV001898344 |
| work_keys_str_mv | AT agajanianah ionimplantationinmicroelectronicsacomprehensivebibliogr |