APA (7th ed.) Citation

(1988). Advanced lithography: Proceedings of a one-day meeting of the Electronics Group of the Institute of Physics 10 Feb. 1988 Rutherford Appleton Laboratory. IOP Publ.

Chicago Style (17th ed.) Citation

Advanced Lithography: Proceedings of a One-day Meeting of the Electronics Group of the Institute of Physics 10 Feb. 1988 Rutherford Appleton Laboratory. Bristol: IOP Publ, 1988.

MLA (9th ed.) Citation

Advanced Lithography: Proceedings of a One-day Meeting of the Electronics Group of the Institute of Physics 10 Feb. 1988 Rutherford Appleton Laboratory. IOP Publ, 1988.

Warning: These citations may not always be 100% accurate.