Advanced lithography: proceedings of a one-day meeting of the Electronics Group of the Institute of Physics 10 Feb. 1988 Rutherford Appleton Laboratory
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bristol
IOP Publ.
1988
|
| Schriftenreihe: | Institute of Physics <London>: IOP short meetings series.
10. |
| Schlagworte: | |
| Beschreibung: | 92 S. Ill., graph. Darst. |
| ISBN: | 0854985093 |
Internformat
MARC
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| 490 | 1 | |a Institute of Physics <London>: IOP short meetings series. |v 10. | |
| 650 | 4 | |a Lithography, Electron beam |v Congresses | |
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Datensatz im Suchindex
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| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1988 London gnd-content |
| genre_facet | Konferenzschrift 1988 London |
| id | DE-604.BV002137263 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:40:57Z |
| institution | BVB |
| institution_GND | (DE-588)807409-4 |
| isbn | 0854985093 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001401602 |
| oclc_num | 17674513 |
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| owner | DE-91 DE-BY-TUM DE-83 |
| owner_facet | DE-91 DE-BY-TUM DE-83 |
| physical | 92 S. Ill., graph. Darst. |
| publishDate | 1988 |
| publishDateSearch | 1988 |
| publishDateSort | 1988 |
| publisher | IOP Publ. |
| record_format | marc |
| series | Institute of Physics <London>: IOP short meetings series. |
| series2 | Institute of Physics <London>: IOP short meetings series. |
| spelling | Advanced lithography proceedings of a one-day meeting of the Electronics Group of the Institute of Physics 10 Feb. 1988 Rutherford Appleton Laboratory Bristol IOP Publ. 1988 92 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Institute of Physics <London>: IOP short meetings series. 10. Lithography, Electron beam Congresses Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1988 London gnd-content Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Institute of Physics (London) Electronics Group Sonstige (DE-588)807409-4 oth Institute of Physics <London>: IOP short meetings series. 10. (DE-604)BV001897970 10. |
| spellingShingle | Advanced lithography proceedings of a one-day meeting of the Electronics Group of the Institute of Physics 10 Feb. 1988 Rutherford Appleton Laboratory Institute of Physics <London>: IOP short meetings series. Lithography, Electron beam Congresses Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4191584-7 (DE-588)1071861417 |
| title | Advanced lithography proceedings of a one-day meeting of the Electronics Group of the Institute of Physics 10 Feb. 1988 Rutherford Appleton Laboratory |
| title_auth | Advanced lithography proceedings of a one-day meeting of the Electronics Group of the Institute of Physics 10 Feb. 1988 Rutherford Appleton Laboratory |
| title_exact_search | Advanced lithography proceedings of a one-day meeting of the Electronics Group of the Institute of Physics 10 Feb. 1988 Rutherford Appleton Laboratory |
| title_full | Advanced lithography proceedings of a one-day meeting of the Electronics Group of the Institute of Physics 10 Feb. 1988 Rutherford Appleton Laboratory |
| title_fullStr | Advanced lithography proceedings of a one-day meeting of the Electronics Group of the Institute of Physics 10 Feb. 1988 Rutherford Appleton Laboratory |
| title_full_unstemmed | Advanced lithography proceedings of a one-day meeting of the Electronics Group of the Institute of Physics 10 Feb. 1988 Rutherford Appleton Laboratory |
| title_short | Advanced lithography |
| title_sort | advanced lithography proceedings of a one day meeting of the electronics group of the institute of physics 10 feb 1988 rutherford appleton laboratory |
| title_sub | proceedings of a one-day meeting of the Electronics Group of the Institute of Physics 10 Feb. 1988 Rutherford Appleton Laboratory |
| topic | Lithography, Electron beam Congresses Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Lithography, Electron beam Congresses Lithografie Halbleitertechnologie Konferenzschrift 1988 London |
| volume_link | (DE-604)BV001897970 |
| work_keys_str_mv | AT instituteofphysicslondonelectronicsgroup advancedlithographyproceedingsofaonedaymeetingoftheelectronicsgroupoftheinstituteofphysics10feb1988rutherfordappletonlaboratory |