Optical microlithographic technology for integrated circuit fabrication and inspection: 2 - 3 April 1987, The Hague, The Netherlands
Saved in:
| Format: | Book |
|---|---|
| Language: | English |
| Published: |
Bellingham, Wash.
Internat. Soc. for Optical Engineering
1987
|
| Series: | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE
811 |
| Subjects: | |
| Item Description: | Literaturangaben |
| Physical Description: | X, 211 S. Ill., graph. Darst. |
| ISBN: | 089252846X |
Staff View
MARC
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| 245 | 1 | 0 | |a Optical microlithographic technology for integrated circuit fabrication and inspection |b 2 - 3 April 1987, The Hague, The Netherlands |c Org. by ANRT, Assoc. Nat. de la Recherche Techn. ... Harry L. Stover ... chairs/eds. |
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| 300 | |a X, 211 S. |b Ill., graph. Darst. | ||
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Record in the Search Index
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| dewey-ones | 621 - Applied physics |
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| dewey-search | 621.381/73 |
| dewey-sort | 3621.381 273 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1987 Den Haag gnd-content |
| genre_facet | Konferenzschrift 1987 Den Haag |
| id | DE-604.BV002135368 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:40:55Z |
| institution | BVB |
| institution_GND | (DE-588)1000491-9 |
| isbn | 089252846X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001400305 |
| oclc_num | 16880771 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-83 DE-11 |
| owner_facet | DE-91 DE-BY-TUM DE-83 DE-11 |
| physical | X, 211 S. Ill., graph. Darst. |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| publisher | Internat. Soc. for Optical Engineering |
| record_format | marc |
| series | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| series2 | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| spelling | Optical microlithographic technology for integrated circuit fabrication and inspection 2 - 3 April 1987, The Hague, The Netherlands Org. by ANRT, Assoc. Nat. de la Recherche Techn. ... Harry L. Stover ... chairs/eds. Bellingham, Wash. Internat. Soc. for Optical Engineering 1987 X, 211 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 811 Literaturangaben Integrated circuits Design and construction Congresses Microlithography Congresses Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1987 Den Haag gnd-content Integrierte Schaltung (DE-588)4027242-4 s Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s DE-604 Stover, Harry L. Sonstige oth Association nationale de la recherche technique Sonstige (DE-588)1000491-9 oth Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 811 (DE-604)BV000010887 811 |
| spellingShingle | Optical microlithographic technology for integrated circuit fabrication and inspection 2 - 3 April 1987, The Hague, The Netherlands Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE Integrated circuits Design and construction Congresses Microlithography Congresses Integrierte Schaltung (DE-588)4027242-4 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| subject_GND | (DE-588)4027242-4 (DE-588)4174516-4 (DE-588)1071861417 |
| title | Optical microlithographic technology for integrated circuit fabrication and inspection 2 - 3 April 1987, The Hague, The Netherlands |
| title_auth | Optical microlithographic technology for integrated circuit fabrication and inspection 2 - 3 April 1987, The Hague, The Netherlands |
| title_exact_search | Optical microlithographic technology for integrated circuit fabrication and inspection 2 - 3 April 1987, The Hague, The Netherlands |
| title_full | Optical microlithographic technology for integrated circuit fabrication and inspection 2 - 3 April 1987, The Hague, The Netherlands Org. by ANRT, Assoc. Nat. de la Recherche Techn. ... Harry L. Stover ... chairs/eds. |
| title_fullStr | Optical microlithographic technology for integrated circuit fabrication and inspection 2 - 3 April 1987, The Hague, The Netherlands Org. by ANRT, Assoc. Nat. de la Recherche Techn. ... Harry L. Stover ... chairs/eds. |
| title_full_unstemmed | Optical microlithographic technology for integrated circuit fabrication and inspection 2 - 3 April 1987, The Hague, The Netherlands Org. by ANRT, Assoc. Nat. de la Recherche Techn. ... Harry L. Stover ... chairs/eds. |
| title_short | Optical microlithographic technology for integrated circuit fabrication and inspection |
| title_sort | optical microlithographic technology for integrated circuit fabrication and inspection 2 3 april 1987 the hague the netherlands |
| title_sub | 2 - 3 April 1987, The Hague, The Netherlands |
| topic | Integrated circuits Design and construction Congresses Microlithography Congresses Integrierte Schaltung (DE-588)4027242-4 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| topic_facet | Integrated circuits Design and construction Congresses Microlithography Congresses Integrierte Schaltung Fotolithografie Halbleitertechnologie Konferenzschrift 1987 Den Haag |
| volume_link | (DE-604)BV000010887 |
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