Optical microlithographic technology for integrated circuit fabrication and inspection: 2 - 3 April 1987, The Hague, The Netherlands
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
Internat. Soc. for Optical Engineering
1987
|
| Schriftenreihe: | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE
811 |
| Schlagworte: | |
| Beschreibung: | Literaturangaben |
| Beschreibung: | X, 211 S. Ill., graph. Darst. |
| ISBN: | 089252846X |
Internformat
MARC
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| 245 | 1 | 0 | |a Optical microlithographic technology for integrated circuit fabrication and inspection |b 2 - 3 April 1987, The Hague, The Netherlands |c Org. by ANRT, Assoc. Nat. de la Recherche Techn. ... Harry L. Stover ... chairs/eds. |
| 264 | 1 | |a Bellingham, Wash. |b Internat. Soc. for Optical Engineering |c 1987 | |
| 300 | |a X, 211 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |v 811 | |
| 500 | |a Literaturangaben | ||
| 650 | 4 | |a Integrated circuits |x Design and construction |v Congresses | |
| 650 | 4 | |a Microlithography |v Congresses | |
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| 650 | 0 | 7 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1987 |z Den Haag |2 gnd-content | |
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| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Stover, Harry L. |e Sonstige |4 oth | |
| 710 | 2 | |a Association nationale de la recherche technique |e Sonstige |0 (DE-588)1000491-9 |4 oth | |
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Datensatz im Suchindex
| _version_ | 1804116589412352000 |
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| bvnumber | BV002135368 |
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| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_tum | ELT 285f |
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| dewey-full | 621.381/73 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
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| dewey-search | 621.381/73 |
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| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1987 Den Haag gnd-content |
| genre_facet | Konferenzschrift 1987 Den Haag |
| id | DE-604.BV002135368 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:40:55Z |
| institution | BVB |
| institution_GND | (DE-588)1000491-9 |
| isbn | 089252846X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001400305 |
| oclc_num | 16880771 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-83 DE-11 |
| owner_facet | DE-91 DE-BY-TUM DE-83 DE-11 |
| physical | X, 211 S. Ill., graph. Darst. |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| publisher | Internat. Soc. for Optical Engineering |
| record_format | marc |
| series | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| series2 | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| spelling | Optical microlithographic technology for integrated circuit fabrication and inspection 2 - 3 April 1987, The Hague, The Netherlands Org. by ANRT, Assoc. Nat. de la Recherche Techn. ... Harry L. Stover ... chairs/eds. Bellingham, Wash. Internat. Soc. for Optical Engineering 1987 X, 211 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 811 Literaturangaben Integrated circuits Design and construction Congresses Microlithography Congresses Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1987 Den Haag gnd-content Integrierte Schaltung (DE-588)4027242-4 s Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s DE-604 Stover, Harry L. Sonstige oth Association nationale de la recherche technique Sonstige (DE-588)1000491-9 oth Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 811 (DE-604)BV000010887 811 |
| spellingShingle | Optical microlithographic technology for integrated circuit fabrication and inspection 2 - 3 April 1987, The Hague, The Netherlands Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE Integrated circuits Design and construction Congresses Microlithography Congresses Integrierte Schaltung (DE-588)4027242-4 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| subject_GND | (DE-588)4027242-4 (DE-588)4174516-4 (DE-588)1071861417 |
| title | Optical microlithographic technology for integrated circuit fabrication and inspection 2 - 3 April 1987, The Hague, The Netherlands |
| title_auth | Optical microlithographic technology for integrated circuit fabrication and inspection 2 - 3 April 1987, The Hague, The Netherlands |
| title_exact_search | Optical microlithographic technology for integrated circuit fabrication and inspection 2 - 3 April 1987, The Hague, The Netherlands |
| title_full | Optical microlithographic technology for integrated circuit fabrication and inspection 2 - 3 April 1987, The Hague, The Netherlands Org. by ANRT, Assoc. Nat. de la Recherche Techn. ... Harry L. Stover ... chairs/eds. |
| title_fullStr | Optical microlithographic technology for integrated circuit fabrication and inspection 2 - 3 April 1987, The Hague, The Netherlands Org. by ANRT, Assoc. Nat. de la Recherche Techn. ... Harry L. Stover ... chairs/eds. |
| title_full_unstemmed | Optical microlithographic technology for integrated circuit fabrication and inspection 2 - 3 April 1987, The Hague, The Netherlands Org. by ANRT, Assoc. Nat. de la Recherche Techn. ... Harry L. Stover ... chairs/eds. |
| title_short | Optical microlithographic technology for integrated circuit fabrication and inspection |
| title_sort | optical microlithographic technology for integrated circuit fabrication and inspection 2 3 april 1987 the hague the netherlands |
| title_sub | 2 - 3 April 1987, The Hague, The Netherlands |
| topic | Integrated circuits Design and construction Congresses Microlithography Congresses Integrierte Schaltung (DE-588)4027242-4 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| topic_facet | Integrated circuits Design and construction Congresses Microlithography Congresses Integrierte Schaltung Fotolithografie Halbleitertechnologie Konferenzschrift 1987 Den Haag |
| volume_link | (DE-604)BV000010887 |
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