APA-Zitierstil (7. Ausg.)

(1987). Optical microlithographic technology for integrated circuit fabrication and inspection: 2 - 3 April 1987, The Hague, The Netherlands. Internat. Soc. for Optical Engineering.

Chicago-Zitierstil (17. Ausg.)

Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection: 2 - 3 April 1987, The Hague, The Netherlands. Bellingham, Wash: Internat. Soc. for Optical Engineering, 1987.

MLA-Zitierstil (9. Ausg.)

Optical Microlithographic Technology for Integrated Circuit Fabrication and Inspection: 2 - 3 April 1987, The Hague, The Netherlands. Internat. Soc. for Optical Engineering, 1987.