Micron and submicron integrated circuit metrology: Aug. 22 - 23, 1985, San Diego, Calif.
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
Internat. Soc. for Optical Engineering
1985
|
| Schriftenreihe: | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE
565 |
| Schlagworte: | |
| Beschreibung: | Literaturangaben |
| Beschreibung: | VI, 223 S. Ill., graph. Darst. |
| ISBN: | 0892526009 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV002125299 | ||
| 003 | DE-604 | ||
| 005 | 19991004 | ||
| 007 | t | ||
| 008 | 890928s1985 ad|| |||| 10||| eng d | ||
| 020 | |a 0892526009 |9 0-89252-600-9 | ||
| 035 | |a (OCoLC)13243583 | ||
| 035 | |a (DE-599)BVBBV002125299 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-91 |a DE-83 |a DE-11 | ||
| 050 | 0 | |a TK7874 | |
| 082 | 0 | |a 621.381/73 |2 19 | |
| 084 | |a ELT 364f |2 stub | ||
| 245 | 1 | 0 | |a Micron and submicron integrated circuit metrology |b Aug. 22 - 23, 1985, San Diego, Calif. |c Kevin M. Monahan, ed. |
| 264 | 1 | |a Bellingham, Wash. |b Internat. Soc. for Optical Engineering |c 1985 | |
| 300 | |a VI, 223 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |v 565 | |
| 500 | |a Literaturangaben | ||
| 650 | 4 | |a Integrated circuits |x Measurement |v Congresses | |
| 650 | 4 | |a Integrated circuits |x Testing |v Congresses | |
| 650 | 0 | 7 | |a Messtechnik |0 (DE-588)4114575-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Integrierte Schaltung |0 (DE-588)4027242-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1985 |z San Diego Calif. |2 gnd-content | |
| 689 | 0 | 0 | |a Integrierte Schaltung |0 (DE-588)4027242-4 |D s |
| 689 | 0 | 1 | |a Messtechnik |0 (DE-588)4114575-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Monahan, Kevin M. |e Sonstige |4 oth | |
| 830 | 0 | |a Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |v 565 |w (DE-604)BV000010887 |9 565 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-001393582 | ||
Datensatz im Suchindex
| _version_ | 1804116578798665728 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV002125299 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874 |
| callnumber-search | TK7874 |
| callnumber-sort | TK 47874 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_tum | ELT 364f |
| ctrlnum | (OCoLC)13243583 (DE-599)BVBBV002125299 |
| dewey-full | 621.381/73 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381/73 |
| dewey-search | 621.381/73 |
| dewey-sort | 3621.381 273 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01624nam a2200421 cb4500</leader><controlfield tag="001">BV002125299</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">19991004 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">890928s1985 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0892526009</subfield><subfield code="9">0-89252-600-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)13243583</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV002125299</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-83</subfield><subfield code="a">DE-11</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7874</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381/73</subfield><subfield code="2">19</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 364f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Micron and submicron integrated circuit metrology</subfield><subfield code="b">Aug. 22 - 23, 1985, San Diego, Calif.</subfield><subfield code="c">Kevin M. Monahan, ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Bellingham, Wash.</subfield><subfield code="b">Internat. Soc. for Optical Engineering</subfield><subfield code="c">1985</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">VI, 223 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE</subfield><subfield code="v">565</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Integrated circuits</subfield><subfield code="x">Measurement</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Integrated circuits</subfield><subfield code="x">Testing</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Messtechnik</subfield><subfield code="0">(DE-588)4114575-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Integrierte Schaltung</subfield><subfield code="0">(DE-588)4027242-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1985</subfield><subfield code="z">San Diego Calif.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Integrierte Schaltung</subfield><subfield code="0">(DE-588)4027242-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Messtechnik</subfield><subfield code="0">(DE-588)4114575-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Monahan, Kevin M.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE</subfield><subfield code="v">565</subfield><subfield code="w">(DE-604)BV000010887</subfield><subfield code="9">565</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-001393582</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1985 San Diego Calif. gnd-content |
| genre_facet | Konferenzschrift 1985 San Diego Calif. |
| id | DE-604.BV002125299 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:40:44Z |
| institution | BVB |
| isbn | 0892526009 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001393582 |
| oclc_num | 13243583 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-83 DE-11 |
| owner_facet | DE-91 DE-BY-TUM DE-83 DE-11 |
| physical | VI, 223 S. Ill., graph. Darst. |
| publishDate | 1985 |
| publishDateSearch | 1985 |
| publishDateSort | 1985 |
| publisher | Internat. Soc. for Optical Engineering |
| record_format | marc |
| series | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| series2 | Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE |
| spelling | Micron and submicron integrated circuit metrology Aug. 22 - 23, 1985, San Diego, Calif. Kevin M. Monahan, ed. Bellingham, Wash. Internat. Soc. for Optical Engineering 1985 VI, 223 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 565 Literaturangaben Integrated circuits Measurement Congresses Integrated circuits Testing Congresses Messtechnik (DE-588)4114575-6 gnd rswk-swf Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1985 San Diego Calif. gnd-content Integrierte Schaltung (DE-588)4027242-4 s Messtechnik (DE-588)4114575-6 s DE-604 Monahan, Kevin M. Sonstige oth Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE 565 (DE-604)BV000010887 565 |
| spellingShingle | Micron and submicron integrated circuit metrology Aug. 22 - 23, 1985, San Diego, Calif. Society of Photo-Optical Instrumentation Engineers: Proceedings of SPIE Integrated circuits Measurement Congresses Integrated circuits Testing Congresses Messtechnik (DE-588)4114575-6 gnd Integrierte Schaltung (DE-588)4027242-4 gnd |
| subject_GND | (DE-588)4114575-6 (DE-588)4027242-4 (DE-588)1071861417 |
| title | Micron and submicron integrated circuit metrology Aug. 22 - 23, 1985, San Diego, Calif. |
| title_auth | Micron and submicron integrated circuit metrology Aug. 22 - 23, 1985, San Diego, Calif. |
| title_exact_search | Micron and submicron integrated circuit metrology Aug. 22 - 23, 1985, San Diego, Calif. |
| title_full | Micron and submicron integrated circuit metrology Aug. 22 - 23, 1985, San Diego, Calif. Kevin M. Monahan, ed. |
| title_fullStr | Micron and submicron integrated circuit metrology Aug. 22 - 23, 1985, San Diego, Calif. Kevin M. Monahan, ed. |
| title_full_unstemmed | Micron and submicron integrated circuit metrology Aug. 22 - 23, 1985, San Diego, Calif. Kevin M. Monahan, ed. |
| title_short | Micron and submicron integrated circuit metrology |
| title_sort | micron and submicron integrated circuit metrology aug 22 23 1985 san diego calif |
| title_sub | Aug. 22 - 23, 1985, San Diego, Calif. |
| topic | Integrated circuits Measurement Congresses Integrated circuits Testing Congresses Messtechnik (DE-588)4114575-6 gnd Integrierte Schaltung (DE-588)4027242-4 gnd |
| topic_facet | Integrated circuits Measurement Congresses Integrated circuits Testing Congresses Messtechnik Integrierte Schaltung Konferenzschrift 1985 San Diego Calif. |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT monahankevinm micronandsubmicronintegratedcircuitmetrologyaug22231985sandiegocalif |