Ion beam processes in advanced electronic materials and device technology: symposium held April 15 - 18, 1985, San Francisco, Calif., USA
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Pittsburgh, Penn.
Materials Research Soc.
1985
|
| Schriftenreihe: | Materials Research Society: Materials Research Society symposia proceedings.
45. |
| Schlagworte: | |
| Beschreibung: | Literaturangaben |
| Beschreibung: | XV, 393 S. Ill., graph. Darst. |
| ISBN: | 0931837103 |
Internformat
MARC
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| 245 | 1 | 0 | |a Ion beam processes in advanced electronic materials and device technology |b symposium held April 15 - 18, 1985, San Francisco, Calif., USA |c eds: B. R. Appleton ... |
| 264 | 1 | |a Pittsburgh, Penn. |b Materials Research Soc. |c 1985 | |
| 300 | |a XV, 393 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Materials Research Society: Materials Research Society symposia proceedings. |v 45. | |
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Datensatz im Suchindex
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| building | Verbundindex |
| bvnumber | BV002115759 |
| classification_rvk | UP 3000 |
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| ctrlnum | (OCoLC)312045449 (DE-599)BVBBV002115759 |
| discipline | Physik Elektrotechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV002115759 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:40:36Z |
| institution | BVB |
| isbn | 0931837103 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001387675 |
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| physical | XV, 393 S. Ill., graph. Darst. |
| publishDate | 1985 |
| publishDateSearch | 1985 |
| publishDateSort | 1985 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings. |
| series2 | Materials Research Society: Materials Research Society symposia proceedings. |
| spelling | Ion beam processes in advanced electronic materials and device technology symposium held April 15 - 18, 1985, San Francisco, Calif., USA eds: B. R. Appleton ... Pittsburgh, Penn. Materials Research Soc. 1985 XV, 393 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings. 45. Literaturangaben Halbleiter (DE-588)4022993-2 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Ionenstrahl (DE-588)4162347-2 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Halbleitertechnologie (DE-588)4158814-9 s Ionenstrahl (DE-588)4162347-2 s DE-604 Ionenimplantation (DE-588)4027606-5 s Halbleiter (DE-588)4022993-2 s 1\p DE-604 Appleton, B. R. Sonstige oth Materials Research Society: Materials Research Society symposia proceedings. 45. (DE-604)BV001899105 45. 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Ion beam processes in advanced electronic materials and device technology symposium held April 15 - 18, 1985, San Francisco, Calif., USA Materials Research Society: Materials Research Society symposia proceedings. Halbleiter (DE-588)4022993-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Ionenstrahl (DE-588)4162347-2 gnd Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4158814-9 (DE-588)4162347-2 (DE-588)4027606-5 (DE-588)1071861417 |
| title | Ion beam processes in advanced electronic materials and device technology symposium held April 15 - 18, 1985, San Francisco, Calif., USA |
| title_auth | Ion beam processes in advanced electronic materials and device technology symposium held April 15 - 18, 1985, San Francisco, Calif., USA |
| title_exact_search | Ion beam processes in advanced electronic materials and device technology symposium held April 15 - 18, 1985, San Francisco, Calif., USA |
| title_full | Ion beam processes in advanced electronic materials and device technology symposium held April 15 - 18, 1985, San Francisco, Calif., USA eds: B. R. Appleton ... |
| title_fullStr | Ion beam processes in advanced electronic materials and device technology symposium held April 15 - 18, 1985, San Francisco, Calif., USA eds: B. R. Appleton ... |
| title_full_unstemmed | Ion beam processes in advanced electronic materials and device technology symposium held April 15 - 18, 1985, San Francisco, Calif., USA eds: B. R. Appleton ... |
| title_short | Ion beam processes in advanced electronic materials and device technology |
| title_sort | ion beam processes in advanced electronic materials and device technology symposium held april 15 18 1985 san francisco calif usa |
| title_sub | symposium held April 15 - 18, 1985, San Francisco, Calif., USA |
| topic | Halbleiter (DE-588)4022993-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Ionenstrahl (DE-588)4162347-2 gnd Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Halbleiter Halbleitertechnologie Ionenstrahl Ionenimplantation Konferenzschrift |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT appletonbr ionbeamprocessesinadvancedelectronicmaterialsanddevicetechnologysymposiumheldapril15181985sanfranciscocalifusa |