Applications of plasma processes to VLSI technology:
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English Japanese |
| Veröffentlicht: |
New York u.a.
Wiley
1985
|
| Schriftenreihe: | A Wiley-Interscience Publication
|
| Schlagworte: | |
| Beschreibung: | EST: Handotai purazuma purosesu gijutsu <engl.> |
| Beschreibung: | XIV, 394 S. Ill., graph. Darst. |
| ISBN: | 0471869600 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV002115395 | ||
| 003 | DE-604 | ||
| 005 | 19901222 | ||
| 007 | t | ||
| 008 | 890928s1985 ad|| |||| 00||| eng d | ||
| 020 | |a 0471869600 |9 0-471-86960-0 | ||
| 035 | |a (OCoLC)11754602 | ||
| 035 | |a (DE-599)BVBBV002115395 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 1 | |a eng |h jpn | |
| 049 | |a DE-91 |a DE-29T |a DE-898 |a DE-83 | ||
| 050 | 0 | |a TK7874 | |
| 082 | 0 | |a 621.381/73 |2 19 | |
| 084 | |a ZN 4950 |0 (DE-625)157424: |2 rvk | ||
| 084 | |a ELT 355f |2 stub | ||
| 130 | 0 | |a Handotai purazuma purosesu gijutsu | |
| 245 | 1 | 0 | |a Applications of plasma processes to VLSI technology |c ed. by Takuo Sugano |
| 264 | 1 | |a New York u.a. |b Wiley |c 1985 | |
| 300 | |a XIV, 394 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a A Wiley-Interscience Publication | |
| 500 | |a EST: Handotai purazuma purosesu gijutsu <engl.> | ||
| 650 | 7 | |a Circuits intégrés à très grande échelle |2 ram | |
| 650 | 7 | |a Métallurgie |2 ram | |
| 650 | 4 | |a Integrated circuits |x Very large scale integration |x Design and construction | |
| 650 | 4 | |a Plasma etching | |
| 650 | 4 | |a Semiconductors |x Etching | |
| 650 | 4 | |a Vapor-plating | |
| 650 | 0 | 7 | |a Plasmaätzen |0 (DE-588)4174821-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a VLSI |0 (DE-588)4117388-0 |2 gnd |9 rswk-swf |
| 655 | 7 | |a Plasmatechnologie |2 gnd |9 rswk-swf | |
| 689 | 0 | 0 | |a VLSI |0 (DE-588)4117388-0 |D s |
| 689 | 0 | 1 | |a Plasmatechnologie |A f |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a VLSI |0 (DE-588)4117388-0 |D s |
| 689 | 1 | 1 | |a Plasmaätzen |0 (DE-588)4174821-9 |D s |
| 689 | 1 | |5 DE-604 | |
| 700 | 1 | |a Sugano, Takuo |e Sonstige |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-001387437 | ||
Datensatz im Suchindex
| _version_ | 1804116569363578880 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV002115395 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874 |
| callnumber-search | TK7874 |
| callnumber-sort | TK 47874 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | ZN 4950 |
| classification_tum | ELT 355f |
| ctrlnum | (OCoLC)11754602 (DE-599)BVBBV002115395 |
| dewey-full | 621.381/73 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381/73 |
| dewey-search | 621.381/73 |
| dewey-sort | 3621.381 273 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | Plasmatechnologie gnd |
| genre_facet | Plasmatechnologie |
| id | DE-604.BV002115395 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:40:35Z |
| institution | BVB |
| isbn | 0471869600 |
| language | English Japanese |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001387437 |
| oclc_num | 11754602 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-29T DE-898 DE-BY-UBR DE-83 |
| owner_facet | DE-91 DE-BY-TUM DE-29T DE-898 DE-BY-UBR DE-83 |
| physical | XIV, 394 S. Ill., graph. Darst. |
| publishDate | 1985 |
| publishDateSearch | 1985 |
| publishDateSort | 1985 |
| publisher | Wiley |
| record_format | marc |
| series2 | A Wiley-Interscience Publication |
| spelling | Handotai purazuma purosesu gijutsu Applications of plasma processes to VLSI technology ed. by Takuo Sugano New York u.a. Wiley 1985 XIV, 394 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier A Wiley-Interscience Publication EST: Handotai purazuma purosesu gijutsu <engl.> Circuits intégrés à très grande échelle ram Métallurgie ram Integrated circuits Very large scale integration Design and construction Plasma etching Semiconductors Etching Vapor-plating Plasmaätzen (DE-588)4174821-9 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf Plasmatechnologie gnd rswk-swf VLSI (DE-588)4117388-0 s Plasmatechnologie f DE-604 Plasmaätzen (DE-588)4174821-9 s Sugano, Takuo Sonstige oth |
| spellingShingle | Applications of plasma processes to VLSI technology Circuits intégrés à très grande échelle ram Métallurgie ram Integrated circuits Very large scale integration Design and construction Plasma etching Semiconductors Etching Vapor-plating Plasmaätzen (DE-588)4174821-9 gnd VLSI (DE-588)4117388-0 gnd |
| subject_GND | (DE-588)4174821-9 (DE-588)4117388-0 |
| title | Applications of plasma processes to VLSI technology |
| title_alt | Handotai purazuma purosesu gijutsu |
| title_auth | Applications of plasma processes to VLSI technology |
| title_exact_search | Applications of plasma processes to VLSI technology |
| title_full | Applications of plasma processes to VLSI technology ed. by Takuo Sugano |
| title_fullStr | Applications of plasma processes to VLSI technology ed. by Takuo Sugano |
| title_full_unstemmed | Applications of plasma processes to VLSI technology ed. by Takuo Sugano |
| title_short | Applications of plasma processes to VLSI technology |
| title_sort | applications of plasma processes to vlsi technology |
| topic | Circuits intégrés à très grande échelle ram Métallurgie ram Integrated circuits Very large scale integration Design and construction Plasma etching Semiconductors Etching Vapor-plating Plasmaätzen (DE-588)4174821-9 gnd VLSI (DE-588)4117388-0 gnd |
| topic_facet | Circuits intégrés à très grande échelle Métallurgie Integrated circuits Very large scale integration Design and construction Plasma etching Semiconductors Etching Vapor-plating Plasmaätzen VLSI Plasmatechnologie |
| work_keys_str_mv | UT handotaipurazumapurosesugijutsu AT suganotakuo applicationsofplasmaprocessestovlsitechnology |