Proceedings of the Symposium on Laser and Electron Beam Processing of Electronic Materials:
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Princeton, N.J.
Electrochem. Soc., Inc.
1980
|
| Schriftenreihe: | Electrochemical Society: Proceedings.
80,1. |
| Schlagworte: | |
| Beschreibung: | Literaturangaben |
| Beschreibung: | X, 550 S. Ill., graph. Darst. |
Internformat
MARC
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| 245 | 1 | 0 | |a Proceedings of the Symposium on Laser and Electron Beam Processing of Electronic Materials |c Hrsg. von C. L. Anderson* |
| 264 | 1 | |a Princeton, N.J. |b Electrochem. Soc., Inc. |c 1980 | |
| 300 | |a X, 550 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Electrochemical Society: Proceedings. |v 80,1. | |
| 500 | |a Literaturangaben | ||
| 650 | 4 | |a Electron beams |x Industrial applications |v Congresses | |
| 650 | 4 | |a Lasers |x Industrial applications |v Congresses | |
| 650 | 4 | |a Semiconductor industry |v Congresses | |
| 650 | 4 | |a Semiconductors |v Congresses | |
| 650 | 0 | 7 | |a Laserbearbeitung |0 (DE-588)4139080-5 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1979 |z Los Angeles, Calif. |2 gnd-content | |
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| 700 | 1 | |a Anderson, C. LeRoy |e Sonstige |4 oth | |
| 830 | 0 | |a Electrochemical Society: Proceedings. |v 80,1. |w (DE-604)BV001900941 |9 80,1. | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-001387362 | ||
Datensatz im Suchindex
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| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre_facet | Konferenzschrift 1979 Los Angeles, Calif. |
| id | DE-604.BV002115280 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:40:35Z |
| institution | BVB |
| institution_GND | (DE-588)5211261-5 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001387362 |
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| owner_facet | DE-91 DE-BY-TUM |
| physical | X, 550 S. Ill., graph. Darst. |
| publishDate | 1980 |
| publishDateSearch | 1980 |
| publishDateSort | 1980 |
| publisher | Electrochem. Soc., Inc. |
| record_format | marc |
| series | Electrochemical Society: Proceedings. |
| series2 | Electrochemical Society: Proceedings. |
| spelling | Symposium on Laser and Electron Beam Processing of Electronic Materials 1979 Los Angeles, Calif. Verfasser (DE-588)5211261-5 aut Proceedings of the Symposium on Laser and Electron Beam Processing of Electronic Materials Hrsg. von C. L. Anderson* Princeton, N.J. Electrochem. Soc., Inc. 1980 X, 550 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Electrochemical Society: Proceedings. 80,1. Literaturangaben Electron beams Industrial applications Congresses Lasers Industrial applications Congresses Semiconductor industry Congresses Semiconductors Congresses Laserbearbeitung (DE-588)4139080-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1979 Los Angeles, Calif. gnd-content Laserbearbeitung (DE-588)4139080-5 s DE-604 Anderson, C. LeRoy Sonstige oth Electrochemical Society: Proceedings. 80,1. (DE-604)BV001900941 80,1. |
| spellingShingle | Proceedings of the Symposium on Laser and Electron Beam Processing of Electronic Materials Electrochemical Society: Proceedings. Electron beams Industrial applications Congresses Lasers Industrial applications Congresses Semiconductor industry Congresses Semiconductors Congresses Laserbearbeitung (DE-588)4139080-5 gnd |
| subject_GND | (DE-588)4139080-5 (DE-588)1071861417 |
| title | Proceedings of the Symposium on Laser and Electron Beam Processing of Electronic Materials |
| title_auth | Proceedings of the Symposium on Laser and Electron Beam Processing of Electronic Materials |
| title_exact_search | Proceedings of the Symposium on Laser and Electron Beam Processing of Electronic Materials |
| title_full | Proceedings of the Symposium on Laser and Electron Beam Processing of Electronic Materials Hrsg. von C. L. Anderson* |
| title_fullStr | Proceedings of the Symposium on Laser and Electron Beam Processing of Electronic Materials Hrsg. von C. L. Anderson* |
| title_full_unstemmed | Proceedings of the Symposium on Laser and Electron Beam Processing of Electronic Materials Hrsg. von C. L. Anderson* |
| title_short | Proceedings of the Symposium on Laser and Electron Beam Processing of Electronic Materials |
| title_sort | proceedings of the symposium on laser and electron beam processing of electronic materials |
| topic | Electron beams Industrial applications Congresses Lasers Industrial applications Congresses Semiconductor industry Congresses Semiconductors Congresses Laserbearbeitung (DE-588)4139080-5 gnd |
| topic_facet | Electron beams Industrial applications Congresses Lasers Industrial applications Congresses Semiconductor industry Congresses Semiconductors Congresses Laserbearbeitung Konferenzschrift 1979 Los Angeles, Calif. |
| volume_link | (DE-604)BV001900941 |
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