Integrated circuit metrology, inspection, and process control: 4 - 6 March 1987, Santa Clara, Calif.
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
1987
|
| Schriftenreihe: | International Society for Optical Engineering: Proceedings of SPIE.
775. |
| Schlagworte: | |
| Beschreibung: | Literaturangaben |
| Beschreibung: | VI, 329 S. zahlr. Ill. u. graph. Darst. |
| ISBN: | 0892528109 |
Internformat
MARC
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| 245 | 1 | 0 | |a Integrated circuit metrology, inspection, and process control |b 4 - 6 March 1987, Santa Clara, Calif. |c Kevin M. Monahan chair/ed. |
| 264 | 1 | |a Bellingham, Wash. |b SPIE |c 1987 | |
| 300 | |a VI, 329 S. |b zahlr. Ill. u. graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a International Society for Optical Engineering: Proceedings of SPIE. |v 775. | |
| 500 | |a Literaturangaben | ||
| 650 | 4 | |a Engineering inspection |v Congresses | |
| 650 | 4 | |a Integrated circuits |x Weights and measures |v Congresses | |
| 650 | 4 | |a Measurement |v Congresses | |
| 650 | 4 | |a Process control |v Congresses | |
| 650 | 4 | |a Quality control |x Optical methods |v Congresses | |
| 650 | 0 | 7 | |a Prozesssteuerung |0 (DE-588)4047594-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Optische Messtechnik |0 (DE-588)4172667-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Integrierte Schaltung |0 (DE-588)4027242-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1987 |z Santa Clara Calif. |2 gnd-content | |
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Datensatz im Suchindex
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| building | Verbundindex |
| bvnumber | BV002069567 |
| callnumber-first | T - Technology |
| callnumber-label | TK7874 |
| callnumber-raw | TK7874 |
| callnumber-search | TK7874 |
| callnumber-sort | TK 47874 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_tum | MSR 415f MSR 730f |
| ctrlnum | (OCoLC)506122097 (DE-599)BVBBV002069567 |
| discipline | Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1987 Santa Clara Calif. gnd-content |
| genre_facet | Konferenzschrift 1987 Santa Clara Calif. |
| id | DE-604.BV002069567 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:39:48Z |
| institution | BVB |
| isbn | 0892528109 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001353552 |
| oclc_num | 506122097 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM |
| owner_facet | DE-91 DE-BY-TUM |
| physical | VI, 329 S. zahlr. Ill. u. graph. Darst. |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| publisher | SPIE |
| record_format | marc |
| series | International Society for Optical Engineering: Proceedings of SPIE. |
| series2 | International Society for Optical Engineering: Proceedings of SPIE. |
| spelling | Integrated circuit metrology, inspection, and process control 4 - 6 March 1987, Santa Clara, Calif. Kevin M. Monahan chair/ed. Bellingham, Wash. SPIE 1987 VI, 329 S. zahlr. Ill. u. graph. Darst. txt rdacontent n rdamedia nc rdacarrier International Society for Optical Engineering: Proceedings of SPIE. 775. Literaturangaben Engineering inspection Congresses Integrated circuits Weights and measures Congresses Measurement Congresses Process control Congresses Quality control Optical methods Congresses Prozesssteuerung (DE-588)4047594-3 gnd rswk-swf Optische Messtechnik (DE-588)4172667-4 gnd rswk-swf Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1987 Santa Clara Calif. gnd-content Optische Messtechnik (DE-588)4172667-4 s DE-604 Prozesssteuerung (DE-588)4047594-3 s Integrierte Schaltung (DE-588)4027242-4 s 1\p DE-604 Monahan, Kevin M. Sonstige oth International Society for Optical Engineering: Proceedings of SPIE. 775. (DE-604)BV000010887 775. 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Integrated circuit metrology, inspection, and process control 4 - 6 March 1987, Santa Clara, Calif. International Society for Optical Engineering: Proceedings of SPIE. Engineering inspection Congresses Integrated circuits Weights and measures Congresses Measurement Congresses Process control Congresses Quality control Optical methods Congresses Prozesssteuerung (DE-588)4047594-3 gnd Optische Messtechnik (DE-588)4172667-4 gnd Integrierte Schaltung (DE-588)4027242-4 gnd |
| subject_GND | (DE-588)4047594-3 (DE-588)4172667-4 (DE-588)4027242-4 (DE-588)1071861417 |
| title | Integrated circuit metrology, inspection, and process control 4 - 6 March 1987, Santa Clara, Calif. |
| title_auth | Integrated circuit metrology, inspection, and process control 4 - 6 March 1987, Santa Clara, Calif. |
| title_exact_search | Integrated circuit metrology, inspection, and process control 4 - 6 March 1987, Santa Clara, Calif. |
| title_full | Integrated circuit metrology, inspection, and process control 4 - 6 March 1987, Santa Clara, Calif. Kevin M. Monahan chair/ed. |
| title_fullStr | Integrated circuit metrology, inspection, and process control 4 - 6 March 1987, Santa Clara, Calif. Kevin M. Monahan chair/ed. |
| title_full_unstemmed | Integrated circuit metrology, inspection, and process control 4 - 6 March 1987, Santa Clara, Calif. Kevin M. Monahan chair/ed. |
| title_short | Integrated circuit metrology, inspection, and process control |
| title_sort | integrated circuit metrology inspection and process control 4 6 march 1987 santa clara calif |
| title_sub | 4 - 6 March 1987, Santa Clara, Calif. |
| topic | Engineering inspection Congresses Integrated circuits Weights and measures Congresses Measurement Congresses Process control Congresses Quality control Optical methods Congresses Prozesssteuerung (DE-588)4047594-3 gnd Optische Messtechnik (DE-588)4172667-4 gnd Integrierte Schaltung (DE-588)4027242-4 gnd |
| topic_facet | Engineering inspection Congresses Integrated circuits Weights and measures Congresses Measurement Congresses Process control Congresses Quality control Optical methods Congresses Prozesssteuerung Optische Messtechnik Integrierte Schaltung Konferenzschrift 1987 Santa Clara Calif. |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT monahankevinm integratedcircuitmetrologyinspectionandprocesscontrol46march1987santaclaracalif |