Ion implantation in semiconductors:
Gespeichert in:
Format: | Buch |
---|---|
Sprache: | English |
Veröffentlicht: |
Vaduz
Sci-Tech Publ.
1988
|
Schriftenreihe: | Diffusion and defect data
B, Solid state phenomena ; 1/2 |
Schlagworte: | |
Beschreibung: | Literaturangaben |
Beschreibung: | V, 473 S. Ill., graph. Darst. |
Internformat
MARC
LEADER | 00000nam a2200000 cb4500 | ||
---|---|---|---|
001 | BV002069297 | ||
003 | DE-604 | ||
005 | 20110722 | ||
007 | t | ||
008 | 890928s1988 ad|| |||| 00||| eng d | ||
035 | |a (OCoLC)20369813 | ||
035 | |a (DE-599)BVBBV002069297 | ||
040 | |a DE-604 |b ger |e rakddb | ||
041 | 0 | |a eng | |
049 | |a DE-91 |a DE-29T |a DE-83 |a DE-188 |a DE-706 | ||
050 | 0 | |a QC702.7 | |
050 | 0 | |a TK7871.86 | |
082 | 0 | |a 541.3 |b D469b, v.1/2 | |
084 | |a UP 3000 |0 (DE-625)146369: |2 rvk | ||
084 | |a ELT 293f |2 stub | ||
084 | |a PHY 685f |2 stub | ||
245 | 1 | 0 | |a Ion implantation in semiconductors |c D. Stievenard ... |
264 | 1 | |a Vaduz |b Sci-Tech Publ. |c 1988 | |
300 | |a V, 473 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
490 | 1 | |a Diffusion and defect data : B, Solid state phenomena |v 1/2 | |
500 | |a Literaturangaben | ||
650 | 4 | |a Ion implantation | |
650 | 4 | |a Semiconductor doping | |
650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Halbleiterphysik |0 (DE-588)4113829-6 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
655 | 7 | |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
689 | 0 | 1 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
689 | 0 | |5 DE-604 | |
689 | 1 | 0 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
689 | 1 | 1 | |a Halbleiterphysik |0 (DE-588)4113829-6 |D s |
689 | 1 | |5 DE-604 | |
700 | 1 | |a Stievenard, D. |e Sonstige |4 oth | |
830 | 0 | |a Diffusion and defect data |v B, Solid state phenomena ; 1/2 |w (DE-604)BV021637351 |9 1/2 | |
999 | |a oai:aleph.bib-bvb.de:BVB01-001353409 |
Datensatz im Suchindex
_version_ | 1804116519678902272 |
---|---|
any_adam_object | |
building | Verbundindex |
bvnumber | BV002069297 |
callnumber-first | Q - Science |
callnumber-label | QC702 |
callnumber-raw | QC702.7 TK7871.86 |
callnumber-search | QC702.7 TK7871.86 |
callnumber-sort | QC 3702.7 |
callnumber-subject | QC - Physics |
classification_rvk | UP 3000 |
classification_tum | ELT 293f PHY 685f |
ctrlnum | (OCoLC)20369813 (DE-599)BVBBV002069297 |
dewey-full | 541.3 |
dewey-hundreds | 500 - Natural sciences and mathematics |
dewey-ones | 541 - Physical chemistry |
dewey-raw | 541.3 |
dewey-search | 541.3 |
dewey-sort | 3541.3 |
dewey-tens | 540 - Chemistry and allied sciences |
discipline | Chemie / Pharmazie Physik Elektrotechnik |
format | Book |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01689nam a2200493 cb4500</leader><controlfield tag="001">BV002069297</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20110722 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">890928s1988 ad|| |||| 00||| eng d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)20369813</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV002069297</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-83</subfield><subfield code="a">DE-188</subfield><subfield code="a">DE-706</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">QC702.7</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.86</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">541.3</subfield><subfield code="b">D469b, v.1/2</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 3000</subfield><subfield code="0">(DE-625)146369:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 293f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">PHY 685f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Ion implantation in semiconductors</subfield><subfield code="c">D. Stievenard ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Vaduz</subfield><subfield code="b">Sci-Tech Publ.</subfield><subfield code="c">1988</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">V, 473 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Diffusion and defect data : B, Solid state phenomena</subfield><subfield code="v">1/2</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Ion implantation</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductor doping</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiterphysik</subfield><subfield code="0">(DE-588)4113829-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4143413-4</subfield><subfield code="a">Aufsatzsammlung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Halbleiterphysik</subfield><subfield code="0">(DE-588)4113829-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Stievenard, D.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Diffusion and defect data</subfield><subfield code="v">B, Solid state phenomena ; 1/2</subfield><subfield code="w">(DE-604)BV021637351</subfield><subfield code="9">1/2</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-001353409</subfield></datafield></record></collection> |
genre | (DE-588)4143413-4 Aufsatzsammlung gnd-content |
genre_facet | Aufsatzsammlung |
id | DE-604.BV002069297 |
illustrated | Illustrated |
indexdate | 2024-07-09T15:39:48Z |
institution | BVB |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001353409 |
oclc_num | 20369813 |
open_access_boolean | |
owner | DE-91 DE-BY-TUM DE-29T DE-83 DE-188 DE-706 |
owner_facet | DE-91 DE-BY-TUM DE-29T DE-83 DE-188 DE-706 |
physical | V, 473 S. Ill., graph. Darst. |
publishDate | 1988 |
publishDateSearch | 1988 |
publishDateSort | 1988 |
publisher | Sci-Tech Publ. |
record_format | marc |
series | Diffusion and defect data |
series2 | Diffusion and defect data : B, Solid state phenomena |
spelling | Ion implantation in semiconductors D. Stievenard ... Vaduz Sci-Tech Publ. 1988 V, 473 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Diffusion and defect data : B, Solid state phenomena 1/2 Literaturangaben Ion implantation Semiconductor doping Halbleiter (DE-588)4022993-2 gnd rswk-swf Halbleiterphysik (DE-588)4113829-6 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Halbleiter (DE-588)4022993-2 s Ionenimplantation (DE-588)4027606-5 s DE-604 Halbleiterphysik (DE-588)4113829-6 s Stievenard, D. Sonstige oth Diffusion and defect data B, Solid state phenomena ; 1/2 (DE-604)BV021637351 1/2 |
spellingShingle | Ion implantation in semiconductors Diffusion and defect data Ion implantation Semiconductor doping Halbleiter (DE-588)4022993-2 gnd Halbleiterphysik (DE-588)4113829-6 gnd Ionenimplantation (DE-588)4027606-5 gnd |
subject_GND | (DE-588)4022993-2 (DE-588)4113829-6 (DE-588)4027606-5 (DE-588)4143413-4 |
title | Ion implantation in semiconductors |
title_auth | Ion implantation in semiconductors |
title_exact_search | Ion implantation in semiconductors |
title_full | Ion implantation in semiconductors D. Stievenard ... |
title_fullStr | Ion implantation in semiconductors D. Stievenard ... |
title_full_unstemmed | Ion implantation in semiconductors D. Stievenard ... |
title_short | Ion implantation in semiconductors |
title_sort | ion implantation in semiconductors |
topic | Ion implantation Semiconductor doping Halbleiter (DE-588)4022993-2 gnd Halbleiterphysik (DE-588)4113829-6 gnd Ionenimplantation (DE-588)4027606-5 gnd |
topic_facet | Ion implantation Semiconductor doping Halbleiter Halbleiterphysik Ionenimplantation Aufsatzsammlung |
volume_link | (DE-604)BV021637351 |
work_keys_str_mv | AT stievenardd ionimplantationinsemiconductors |