Advanced semiconductor processing and characterization of electronic and optical materials: Jan. 24 - 25, 1984, LosAngeles, Calif.
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
Bellingham, Washington, USA
Internat. Soc. for Opt. Engineering
1984
|
| Schriftenreihe: | International Society for Optical Engineering: Proceedings of ... .
463. |
| Schlagworte: | |
| Beschreibung: | Literaturangaben |
| Beschreibung: | VI, 147 S. Ill., graph. Darst. |
| ISBN: | 0892524987 |
Internformat
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| genre | (DE-588)1071861417 Konferenzschrift 1984 Los Angeles, Calif. gnd-content |
| genre_facet | Konferenzschrift 1984 Los Angeles, Calif. |
| id | DE-604.BV002051315 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:39:31Z |
| institution | BVB |
| isbn | 0892524987 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001341387 |
| oclc_num | 631665317 |
| open_access_boolean | |
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| owner_facet | DE-91 DE-BY-TUM DE-83 |
| physical | VI, 147 S. Ill., graph. Darst. |
| psigel | TUB-nseb |
| publishDate | 1984 |
| publishDateSearch | 1984 |
| publishDateSort | 1984 |
| publisher | Internat. Soc. for Opt. Engineering |
| record_format | marc |
| series | International Society for Optical Engineering: Proceedings of ... . |
| series2 | International Society for Optical Engineering: Proceedings of ... . |
| spelling | Advanced semiconductor processing and characterization of electronic and optical materials Jan. 24 - 25, 1984, LosAngeles, Calif. Hrsg. von Devendra K. Sadana* Bellingham, Washington, USA Internat. Soc. for Opt. Engineering 1984 VI, 147 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier International Society for Optical Engineering: Proceedings of ... . 463. Literaturangaben Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1984 Los Angeles, Calif. gnd-content Halbleitertechnologie (DE-588)4158814-9 s DE-604 Sadana, Devendra K. Sonstige oth International Society for Optical Engineering: Proceedings of ... . 463. (DE-604)BV000010887 463. |
| spellingShingle | Advanced semiconductor processing and characterization of electronic and optical materials Jan. 24 - 25, 1984, LosAngeles, Calif. International Society for Optical Engineering: Proceedings of ... . Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4158814-9 (DE-588)1071861417 |
| title | Advanced semiconductor processing and characterization of electronic and optical materials Jan. 24 - 25, 1984, LosAngeles, Calif. |
| title_auth | Advanced semiconductor processing and characterization of electronic and optical materials Jan. 24 - 25, 1984, LosAngeles, Calif. |
| title_exact_search | Advanced semiconductor processing and characterization of electronic and optical materials Jan. 24 - 25, 1984, LosAngeles, Calif. |
| title_full | Advanced semiconductor processing and characterization of electronic and optical materials Jan. 24 - 25, 1984, LosAngeles, Calif. Hrsg. von Devendra K. Sadana* |
| title_fullStr | Advanced semiconductor processing and characterization of electronic and optical materials Jan. 24 - 25, 1984, LosAngeles, Calif. Hrsg. von Devendra K. Sadana* |
| title_full_unstemmed | Advanced semiconductor processing and characterization of electronic and optical materials Jan. 24 - 25, 1984, LosAngeles, Calif. Hrsg. von Devendra K. Sadana* |
| title_short | Advanced semiconductor processing and characterization of electronic and optical materials |
| title_sort | advanced semiconductor processing and characterization of electronic and optical materials jan 24 25 1984 losangeles calif |
| title_sub | Jan. 24 - 25, 1984, LosAngeles, Calif. |
| topic | Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Halbleitertechnologie Konferenzschrift 1984 Los Angeles, Calif. |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT sadanadevendrak advancedsemiconductorprocessingandcharacterizationofelectronicandopticalmaterialsjan24251984losangelescalif |