Holdings: Silicon on insulator

Silicon on insulator: its technology and applications

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Bibliographic Details
Format:	Book
Language:	English
Published:	Tokyo u.a. KTK Scientif. Publ. 1985
Series:	Advances in solid state technology 1.
Subjects:	Epitaxy > Congresses Integrated circuits > Design and construction > Congresses Silicon > Congresses Silicon-on-insulator technology Solid state electronics > Congresses Silicium Isolierschicht Konferenzschrift > 1983 > Oiso
Online Access:	Inhaltsverzeichnis
Item Description:	Literaturangaben
Physical Description:	VIII, 295 S. Ill., graph. Darst.
ISBN:	9027719403

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MARC


LEADER	00000nam a2200000 cb4500
001	BV002051030
003	DE-604
005	20060317
007	t
008	890928s1985 ad\|\| \|\|\|\| 10\|\|\| eng d
020			\|a 9027719403 \|9 90-277-1940-3
035			\|a (OCoLC)11548649
035			\|a (DE-599)BVBBV002051030
040			\|a DE-604 \|b ger \|e rakddb
041	0		\|a eng
049			\|a DE-91 \|a DE-355 \|a DE-20
050		0	\|a TK7871.85
082	0		\|a 621.381 \|2 19
084			\|a UP 3100 \|0 (DE-625)146372: \|2 rvk
084			\|a ELT 072f \|2 stub
084			\|a ELT 279f \|2 stub
245	1	0	\|a Silicon on insulator \|b its technology and applications \|c ed. by S. Furukawa
246	1	3	\|a Silicon-on-insulator
264		1	\|a Tokyo u.a. \|b KTK Scientif. Publ. \|c 1985
300			\|a VIII, 295 S. \|b Ill., graph. Darst.
336			\|b txt \|2 rdacontent
337			\|b n \|2 rdamedia
338			\|b nc \|2 rdacarrier
490	1		\|a Advances in solid state technology \|v 1.
500			\|a Literaturangaben
650		4	\|a Epitaxy \|v Congresses
650		4	\|a Integrated circuits \|x Design and construction \|v Congresses
650		4	\|a Silicon \|v Congresses
650		4	\|a Silicon-on-insulator technology
650		4	\|a Solid state electronics \|v Congresses
650	0	7	\|a Silicium \|0 (DE-588)4077445-4 \|2 gnd \|9 rswk-swf
650	0	7	\|a Isolierschicht \|0 (DE-588)4147018-7 \|2 gnd \|9 rswk-swf
655		7	\|0 (DE-588)1071861417 \|a Konferenzschrift \|y 1983 \|z Oiso \|2 gnd-content
689	0	0	\|a Silicium \|0 (DE-588)4077445-4 \|D s
689	0	1	\|a Isolierschicht \|0 (DE-588)4147018-7 \|D s
689	0		\|5 DE-604
700	1		\|a Furukawa, Seijiro \|e Sonstige \|4 oth
830		0	\|a Advances in solid state technology \|v 1. \|w (DE-604)BV001900334 \|9 1
856	4	2	\|m GBV Datenaustausch \|q application/pdf \|u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=001341193&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA \|3 Inhaltsverzeichnis
999			\|a oai:aleph.bib-bvb.de:BVB01-001341193

Record in the Search Index

_version_	1804116501004812288
adam_text	SILICON-ON-LNSULATOR ITS TECHNOLOGY AND APPLICATIONS EDITED BY S. FURUKAWA UNIVERSITATSBIBLIOTHEK HANNOVER TECHNISCHE INFORMATIONSBIBLIOTHEK ^ KTK SCIENTIFIC PUBLISHERS/TOKYO D. REIDEL PUBLISHING COMPANY/DORDRECHT, BOSTON, LONDON * A MEMBER OF THE * KLUWER ACADEMIC PUBLISHERS GROUP CONTENTS PREFACE , S. FURUKAWA V CHAPTER 1: LASER AND ELECTRON-BEAM RECRYSTAL- LIZATION GROWTH MECHANISMS AND DEFECTS IN SI LAYERS GROWN ON SIO2 BY BRIDG- ING (LATERAL SEEDED) EPITAXY T. TOKUYAMA, M. TAMURA, N. NATSUAKI, M. OHKURA, M. ICHIKAWA, AND M. MIYAO 3 LASER CRYSTALLIZATION OF POLYCRYSTALLINE SILICON BY CONTROLLING LATERAL THERMAL PROFILE T. NISHIMURA, Y. AKASAKA, H. NAKATA, K. SUGAHARA, AND T. ISU 21 ELECTRON BEAM RECRYSTALLIZED SOI STRUCTURES K. SHIBATA, T. INOUE, K. KATO, AND M. KASHIWAGI 29 RECRYSTALLIZATION OF SOI STRUCTURES BY SPLIT LASER BEAM ... N. AIZAKI 41 NUCLEATION AND CRYSTAL GROWTH CHARACTERISTICS IN ENERGY BEAM CRYSTALLIZATION OF SILICON ISLANDS K. KUGIMIYA, S. AKIYAMA, AND N. YOSHII 47 RECRYSTALLIZATION OF SILICON ON INSULATOR WITH A HEAT-SINK STRUCTURE .. S. KAWAMURA, N. SASAKI, T. IWAI, M. NAKANO, AND M. TAKAGI 67 RECRYSTALLIZATION OF POLYCRYSTALLINE SI OVER SIO2 THROUGH STRIP ELECTRON- BEAM IRRADIATION Y. HAYAFUJI, T. YANADA, S. USUI, S. KAWADO, A. SHIBATA, N. WATANABE, M. KIKUCHI, H. HAYASHI, AND K. E. WILLIAMS 85 CHAPTER 2: ZONE MELTING RECRYSTALLIZATION ZONE-MELTING RECRYSTALLIZATION OF SI FILMS ON SIO 2 B-Y. TSAUR 101 OPTICALLY-HEATED ZONE CRYSTAL GROWTH OF SILICON THIN FILMS ON AMOR- PHOUS SUBSTRATES D. K. BIEGELSEN, W. G. HAWKINS, L. E. FENNELL, N. M. JOHNSON, AND M. D. MOYER 129 RECRYSTALLIZATION OF POLYCRYSTALLINE SILICON ON FUSED SILICA USING AN RF- HEATED CARBON SUSCEPTOR Y. KOBAYASHI, A. FUKAMI, AND T. SUZUKI 137 STRIP HEATER RECRYSTALLIZED SOI STRUCTURES K. HIGUCHI, S. SAITOH, AND H. OKABAYASHI 151 SINGLE CRYSTAL GERMANIUM ISLAND FORMATION ON INSULATOR BY ZONE MELTING M. TAKAI, T. TANIGAWA, K. GAMO, AND S. NAMBA 159 VIII CONTENTS CHAPTER 3: SOLID PHASE EPITAXY MODELING OF INTERFACE ATOMIC ARRANGEMENT FOR ANALYSIS OF SOLID PHASE EPITAXY AND SI-ON-INSULATOR STRUCTURE T. SAITO AND I. OHDOMARI 171 LATERAL SOLID PHASE EPITAXY OF EVAPORATED AMORPHOUS SI FILMS ONTO SIO 2 PATTERNS H. YAMAMOTO, H. ISHIWARA, S. FURUKAWA, M. TAMURA, AND T. TOKUYAMA 187 FORMATION OF A SILICON-ON-INSULATOR STRUCTURE BY SOLID-PHASE EPITAXY Y. KUNII, M. TABE, AND K. KAJIYAMA 209 CHARACTERIZATION OF SOLID PHASE EPITAXIALLY GROWN SI FILMS ON SIO2 . M. TAMURA, M. MIYAO, T. TOKUYAMA, H. YAMAMOTO, H. ISHIWARA, AND S. FURUKAWA 231 CHAPTER 4: CHARACTERIZATION AND DEVICE APPLICATIONS MICROSTRUCTURAL CHARACTERIZATION OF SILICON-ON-INSULATOR STRUCTURES .. R. F. PINIZZOTTO 251 HIGH SPEED SOI-CMOS DEVICES BY LASER RECRYSTALLIZATION TECH- NIQUE T. NISHIMURA, Y. AKASAKA, AND H. NAKATA 263 CHARACTERIZATION OF SOI DOUBLE SI ACTIVE LAYERS THROUGH FABRICATION OF ELEMENTARY DEVICES M. MIYAO, M. OHKURA, AND T. TOKUYAMA 269 DEVICE APPLICATION OF SIMOX (SEPARATION BY IMPLANTED OXYGEN) STRUCTURE K. KAJIYAMA, K. IZUMI, AND S. NAKASHIMA 283 AUTHOR INDEX 295
any_adam_object	1
building	Verbundindex
bvnumber	BV002051030
callnumber-first	T - Technology
callnumber-label	TK7871
callnumber-raw	TK7871.85
callnumber-search	TK7871.85
callnumber-sort	TK 47871.85
callnumber-subject	TK - Electrical and Nuclear Engineering
classification_rvk	UP 3100
classification_tum	ELT 072f ELT 279f
ctrlnum	(OCoLC)11548649 (DE-599)BVBBV002051030
dewey-full	621.381
dewey-hundreds	600 - Technology (Applied sciences)
dewey-ones	621 - Applied physics
dewey-raw	621.381
dewey-search	621.381
dewey-sort	3621.381
dewey-tens	620 - Engineering and allied operations
discipline	Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik
format	Book
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01939nam a2200505 cb4500</leader><controlfield tag="001">BV002051030</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20060317 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">890928s1985 ad\|\| \|\|\|\| 10\|\|\| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9027719403</subfield><subfield code="9">90-277-1940-3</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)11548649</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV002051030</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-91</subfield><subfield code="a">DE-355</subfield><subfield code="a">DE-20</subfield></datafield><datafield tag="050" ind1=" " ind2="0"><subfield code="a">TK7871.85</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381</subfield><subfield code="2">19</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 3100</subfield><subfield code="0">(DE-625)146372:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 072f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 279f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Silicon on insulator</subfield><subfield code="b">its technology and applications</subfield><subfield code="c">ed. by S. Furukawa</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Silicon-on-insulator</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Tokyo u.a.</subfield><subfield code="b">KTK Scientif. Publ.</subfield><subfield code="c">1985</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">VIII, 295 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Advances in solid state technology</subfield><subfield code="v">1.</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Literaturangaben</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Epitaxy</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Integrated circuits</subfield><subfield code="x">Design and construction</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Silicon</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Silicon-on-insulator technology</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Solid state electronics</subfield><subfield code="v">Congresses</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Isolierschicht</subfield><subfield code="0">(DE-588)4147018-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1983</subfield><subfield code="z">Oiso</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Isolierschicht</subfield><subfield code="0">(DE-588)4147018-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Furukawa, Seijiro</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Advances in solid state technology</subfield><subfield code="v">1.</subfield><subfield code="w">(DE-604)BV001900334</subfield><subfield code="9">1</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">GBV Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=001341193&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-001341193</subfield></datafield></record></collection>
genre	(DE-588)1071861417 Konferenzschrift 1983 Oiso gnd-content
genre_facet	Konferenzschrift 1983 Oiso
id	DE-604.BV002051030
illustrated	Illustrated
indexdate	2024-07-09T15:39:30Z
institution	BVB
isbn	9027719403
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-001341193
oclc_num	11548649
open_access_boolean
owner	DE-91 DE-BY-TUM DE-355 DE-BY-UBR DE-20
owner_facet	DE-91 DE-BY-TUM DE-355 DE-BY-UBR DE-20
physical	VIII, 295 S. Ill., graph. Darst.
publishDate	1985
publishDateSearch	1985
publishDateSort	1985
publisher	KTK Scientif. Publ.
record_format	marc
series	Advances in solid state technology
series2	Advances in solid state technology
spelling	Silicon on insulator its technology and applications ed. by S. Furukawa Silicon-on-insulator Tokyo u.a. KTK Scientif. Publ. 1985 VIII, 295 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Advances in solid state technology 1. Literaturangaben Epitaxy Congresses Integrated circuits Design and construction Congresses Silicon Congresses Silicon-on-insulator technology Solid state electronics Congresses Silicium (DE-588)4077445-4 gnd rswk-swf Isolierschicht (DE-588)4147018-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1983 Oiso gnd-content Silicium (DE-588)4077445-4 s Isolierschicht (DE-588)4147018-7 s DE-604 Furukawa, Seijiro Sonstige oth Advances in solid state technology 1. (DE-604)BV001900334 1 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=001341193&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	Silicon on insulator its technology and applications Advances in solid state technology Epitaxy Congresses Integrated circuits Design and construction Congresses Silicon Congresses Silicon-on-insulator technology Solid state electronics Congresses Silicium (DE-588)4077445-4 gnd Isolierschicht (DE-588)4147018-7 gnd
subject_GND	(DE-588)4077445-4 (DE-588)4147018-7 (DE-588)1071861417
title	Silicon on insulator its technology and applications
title_alt	Silicon-on-insulator
title_auth	Silicon on insulator its technology and applications
title_exact_search	Silicon on insulator its technology and applications
title_full	Silicon on insulator its technology and applications ed. by S. Furukawa
title_fullStr	Silicon on insulator its technology and applications ed. by S. Furukawa
title_full_unstemmed	Silicon on insulator its technology and applications ed. by S. Furukawa
title_short	Silicon on insulator
title_sort	silicon on insulator its technology and applications
title_sub	its technology and applications
topic	Epitaxy Congresses Integrated circuits Design and construction Congresses Silicon Congresses Silicon-on-insulator technology Solid state electronics Congresses Silicium (DE-588)4077445-4 gnd Isolierschicht (DE-588)4147018-7 gnd
topic_facet	Epitaxy Congresses Integrated circuits Design and construction Congresses Silicon Congresses Silicon-on-insulator technology Solid state electronics Congresses Silicium Isolierschicht Konferenzschrift 1983 Oiso
url	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=001341193&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
volume_link	(DE-604)BV001900334
work_keys_str_mv	AT furukawaseijiro silicononinsulatoritstechnologyandapplications AT furukawaseijiro silicononinsulator

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