Silicon on insulator: its technology and applications
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Tokyo u.a.
KTK Scientif. Publ.
1985
|
| Schriftenreihe: | Advances in solid state technology
1. |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Literaturangaben |
| Beschreibung: | VIII, 295 S. Ill., graph. Darst. |
| ISBN: | 9027719403 |
Internformat
MARC
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| 245 | 1 | 0 | |a Silicon on insulator |b its technology and applications |c ed. by S. Furukawa |
| 246 | 1 | 3 | |a Silicon-on-insulator |
| 264 | 1 | |a Tokyo u.a. |b KTK Scientif. Publ. |c 1985 | |
| 300 | |a VIII, 295 S. |b Ill., graph. Darst. | ||
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| 500 | |a Literaturangaben | ||
| 650 | 4 | |a Epitaxy |v Congresses | |
| 650 | 4 | |a Integrated circuits |x Design and construction |v Congresses | |
| 650 | 4 | |a Silicon |v Congresses | |
| 650 | 4 | |a Silicon-on-insulator technology | |
| 650 | 4 | |a Solid state electronics |v Congresses | |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
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Datensatz im Suchindex
| _version_ | 1804116501004812288 |
|---|---|
| adam_text | SILICON-ON-LNSULATOR ITS TECHNOLOGY AND APPLICATIONS EDITED BY S.
FURUKAWA UNIVERSITATSBIBLIOTHEK HANNOVER TECHNISCHE
INFORMATIONSBIBLIOTHEK ^ KTK SCIENTIFIC PUBLISHERS/TOKYO D. REIDEL
PUBLISHING COMPANY/DORDRECHT, BOSTON, LONDON * A MEMBER OF THE *
KLUWER ACADEMIC PUBLISHERS GROUP CONTENTS PREFACE , S. FURUKAWA V
CHAPTER 1: LASER AND ELECTRON-BEAM RECRYSTAL- LIZATION GROWTH MECHANISMS
AND DEFECTS IN SI LAYERS GROWN ON SIO2 BY BRIDG- ING (LATERAL SEEDED)
EPITAXY T. TOKUYAMA, M. TAMURA, N. NATSUAKI, M. OHKURA, M. ICHIKAWA, AND
M. MIYAO 3 LASER CRYSTALLIZATION OF POLYCRYSTALLINE SILICON BY
CONTROLLING LATERAL THERMAL PROFILE T. NISHIMURA, Y. AKASAKA, H. NAKATA,
K. SUGAHARA, AND T. ISU 21 ELECTRON BEAM RECRYSTALLIZED SOI STRUCTURES
K. SHIBATA, T. INOUE, K. KATO, AND M. KASHIWAGI 29 RECRYSTALLIZATION OF
SOI STRUCTURES BY SPLIT LASER BEAM ... N. AIZAKI 41 NUCLEATION AND
CRYSTAL GROWTH CHARACTERISTICS IN ENERGY BEAM CRYSTALLIZATION OF SILICON
ISLANDS K. KUGIMIYA, S. AKIYAMA, AND N. YOSHII 47 RECRYSTALLIZATION OF
SILICON ON INSULATOR WITH A HEAT-SINK STRUCTURE .. S. KAWAMURA, N.
SASAKI, T. IWAI, M. NAKANO, AND M. TAKAGI 67 RECRYSTALLIZATION OF
POLYCRYSTALLINE SI OVER SIO2 THROUGH STRIP ELECTRON- BEAM IRRADIATION Y.
HAYAFUJI, T. YANADA, S. USUI, S. KAWADO, A. SHIBATA, N. WATANABE, M.
KIKUCHI, H. HAYASHI, AND K. E. WILLIAMS 85 CHAPTER 2: ZONE MELTING
RECRYSTALLIZATION ZONE-MELTING RECRYSTALLIZATION OF SI FILMS ON SIO 2
B-Y. TSAUR 101 OPTICALLY-HEATED ZONE CRYSTAL GROWTH OF SILICON THIN
FILMS ON AMOR- PHOUS SUBSTRATES D. K. BIEGELSEN, W. G. HAWKINS, L. E.
FENNELL, N. M. JOHNSON, AND M. D. MOYER 129 RECRYSTALLIZATION OF
POLYCRYSTALLINE SILICON ON FUSED SILICA USING AN RF- HEATED CARBON
SUSCEPTOR Y. KOBAYASHI, A. FUKAMI, AND T. SUZUKI 137 STRIP HEATER
RECRYSTALLIZED SOI STRUCTURES K. HIGUCHI, S. SAITOH, AND H. OKABAYASHI
151 SINGLE CRYSTAL GERMANIUM ISLAND FORMATION ON INSULATOR BY ZONE
MELTING M. TAKAI, T. TANIGAWA, K. GAMO, AND S. NAMBA 159 VIII CONTENTS
CHAPTER 3: SOLID PHASE EPITAXY MODELING OF INTERFACE ATOMIC ARRANGEMENT
FOR ANALYSIS OF SOLID PHASE EPITAXY AND SI-ON-INSULATOR STRUCTURE T.
SAITO AND I. OHDOMARI 171 LATERAL SOLID PHASE EPITAXY OF EVAPORATED
AMORPHOUS SI FILMS ONTO SIO 2 PATTERNS H. YAMAMOTO, H. ISHIWARA, S.
FURUKAWA, M. TAMURA, AND T. TOKUYAMA 187 FORMATION OF A
SILICON-ON-INSULATOR STRUCTURE BY SOLID-PHASE EPITAXY Y. KUNII, M. TABE,
AND K. KAJIYAMA 209 CHARACTERIZATION OF SOLID PHASE EPITAXIALLY GROWN SI
FILMS ON SIO2 . M. TAMURA, M. MIYAO, T. TOKUYAMA, H. YAMAMOTO, H.
ISHIWARA, AND S. FURUKAWA 231 CHAPTER 4: CHARACTERIZATION AND DEVICE
APPLICATIONS MICROSTRUCTURAL CHARACTERIZATION OF SILICON-ON-INSULATOR
STRUCTURES .. R. F. PINIZZOTTO 251 HIGH SPEED SOI-CMOS DEVICES BY LASER
RECRYSTALLIZATION TECH- NIQUE T. NISHIMURA, Y. AKASAKA, AND H. NAKATA
263 CHARACTERIZATION OF SOI DOUBLE SI ACTIVE LAYERS THROUGH FABRICATION
OF ELEMENTARY DEVICES M. MIYAO, M. OHKURA, AND T. TOKUYAMA 269 DEVICE
APPLICATION OF SIMOX (SEPARATION BY IMPLANTED OXYGEN) STRUCTURE K.
KAJIYAMA, K. IZUMI, AND S. NAKASHIMA 283 AUTHOR INDEX 295
|
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| discipline | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
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| genre | (DE-588)1071861417 Konferenzschrift 1983 Oiso gnd-content |
| genre_facet | Konferenzschrift 1983 Oiso |
| id | DE-604.BV002051030 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:39:30Z |
| institution | BVB |
| isbn | 9027719403 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001341193 |
| oclc_num | 11548649 |
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| owner_facet | DE-91 DE-BY-TUM DE-355 DE-BY-UBR DE-20 |
| physical | VIII, 295 S. Ill., graph. Darst. |
| publishDate | 1985 |
| publishDateSearch | 1985 |
| publishDateSort | 1985 |
| publisher | KTK Scientif. Publ. |
| record_format | marc |
| series | Advances in solid state technology |
| series2 | Advances in solid state technology |
| spelling | Silicon on insulator its technology and applications ed. by S. Furukawa Silicon-on-insulator Tokyo u.a. KTK Scientif. Publ. 1985 VIII, 295 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Advances in solid state technology 1. Literaturangaben Epitaxy Congresses Integrated circuits Design and construction Congresses Silicon Congresses Silicon-on-insulator technology Solid state electronics Congresses Silicium (DE-588)4077445-4 gnd rswk-swf Isolierschicht (DE-588)4147018-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1983 Oiso gnd-content Silicium (DE-588)4077445-4 s Isolierschicht (DE-588)4147018-7 s DE-604 Furukawa, Seijiro Sonstige oth Advances in solid state technology 1. (DE-604)BV001900334 1 GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=001341193&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Silicon on insulator its technology and applications Advances in solid state technology Epitaxy Congresses Integrated circuits Design and construction Congresses Silicon Congresses Silicon-on-insulator technology Solid state electronics Congresses Silicium (DE-588)4077445-4 gnd Isolierschicht (DE-588)4147018-7 gnd |
| subject_GND | (DE-588)4077445-4 (DE-588)4147018-7 (DE-588)1071861417 |
| title | Silicon on insulator its technology and applications |
| title_alt | Silicon-on-insulator |
| title_auth | Silicon on insulator its technology and applications |
| title_exact_search | Silicon on insulator its technology and applications |
| title_full | Silicon on insulator its technology and applications ed. by S. Furukawa |
| title_fullStr | Silicon on insulator its technology and applications ed. by S. Furukawa |
| title_full_unstemmed | Silicon on insulator its technology and applications ed. by S. Furukawa |
| title_short | Silicon on insulator |
| title_sort | silicon on insulator its technology and applications |
| title_sub | its technology and applications |
| topic | Epitaxy Congresses Integrated circuits Design and construction Congresses Silicon Congresses Silicon-on-insulator technology Solid state electronics Congresses Silicium (DE-588)4077445-4 gnd Isolierschicht (DE-588)4147018-7 gnd |
| topic_facet | Epitaxy Congresses Integrated circuits Design and construction Congresses Silicon Congresses Silicon-on-insulator technology Solid state electronics Congresses Silicium Isolierschicht Konferenzschrift 1983 Oiso |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=001341193&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV001900334 |
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