Impurity diffusion and gettering in silicon: symposium held November 27 - 30, 1984, Boston, Massachusetts
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Pittsburgh, Pa.
Materials Research Soc.
1985
|
| Schriftenreihe: | Materials Research Society: Materials Research Society symposia proceedings.
36. |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Literaturangaben |
| Beschreibung: | XIII, 284 S. Ill., graph. Darst. |
| ISBN: | 0931837014 |
Internformat
MARC
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| 245 | 1 | 0 | |a Impurity diffusion and gettering in silicon |b symposium held November 27 - 30, 1984, Boston, Massachusetts |c eds. : Richard B. Fair ... |
| 264 | 1 | |a Pittsburgh, Pa. |b Materials Research Soc. |c 1985 | |
| 300 | |a XIII, 284 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Materials Research Society: Materials Research Society symposia proceedings. |v 36. | |
| 500 | |a Literaturangaben | ||
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| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Gitterbaufehler |0 (DE-588)4125030-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Diffusion |0 (DE-588)4012277-3 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1984 |z Boston Mass. |2 gnd-content | |
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| 689 | 2 | |8 1\p |5 DE-604 | |
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| 711 | 2 | |a Symposium on Impurity Diffusion and Gettering in Semiconductors |d 1984 |c Boston, Mass. |j Sonstige |0 (DE-588)5026036-4 |4 oth | |
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| 856 | 4 | 2 | |u https://www.gbv.de/dms/tib-ub-hannover/017853486.pdf |3 Inhaltsverzeichnis |
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Datensatz im Suchindex
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| author2 | Fair, Richard B. |
| author2_role | edt |
| author2_variant | r b f rb rbf |
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| bvnumber | BV002045333 |
| classification_tum | ELT 291f |
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| discipline | Elektrotechnik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1984 Boston Mass. gnd-content |
| genre_facet | Konferenzschrift 1984 Boston Mass. |
| id | DE-604.BV002045333 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:39:25Z |
| institution | BVB |
| institution_GND | (DE-588)5026036-4 |
| isbn | 0931837014 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001337663 |
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| physical | XIII, 284 S. Ill., graph. Darst. |
| publishDate | 1985 |
| publishDateSearch | 1985 |
| publishDateSort | 1985 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society: Materials Research Society symposia proceedings. |
| series2 | Materials Research Society: Materials Research Society symposia proceedings. |
| spelling | Impurity diffusion and gettering in silicon symposium held November 27 - 30, 1984, Boston, Massachusetts eds. : Richard B. Fair ... Pittsburgh, Pa. Materials Research Soc. 1985 XIII, 284 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society: Materials Research Society symposia proceedings. 36. Literaturangaben Getterung (DE-588)4157223-3 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Störstelle (DE-588)4193400-3 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf Diffusion (DE-588)4012277-3 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1984 Boston Mass. gnd-content Störstelle (DE-588)4193400-3 s Diffusion (DE-588)4012277-3 s Silicium (DE-588)4077445-4 s DE-604 Getterung (DE-588)4157223-3 s Gitterbaufehler (DE-588)4125030-8 s Halbleiter (DE-588)4022993-2 s 1\p DE-604 Fair, Richard B. edt Symposium on Impurity Diffusion and Gettering in Semiconductors 1984 Boston, Mass. Sonstige (DE-588)5026036-4 oth Materials Research Society: Materials Research Society symposia proceedings. 36. (DE-604)BV001899105 36. https://www.gbv.de/dms/tib-ub-hannover/017853486.pdf Inhaltsverzeichnis 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Impurity diffusion and gettering in silicon symposium held November 27 - 30, 1984, Boston, Massachusetts Materials Research Society: Materials Research Society symposia proceedings. Getterung (DE-588)4157223-3 gnd Silicium (DE-588)4077445-4 gnd Störstelle (DE-588)4193400-3 gnd Halbleiter (DE-588)4022993-2 gnd Gitterbaufehler (DE-588)4125030-8 gnd Diffusion (DE-588)4012277-3 gnd |
| subject_GND | (DE-588)4157223-3 (DE-588)4077445-4 (DE-588)4193400-3 (DE-588)4022993-2 (DE-588)4125030-8 (DE-588)4012277-3 (DE-588)1071861417 |
| title | Impurity diffusion and gettering in silicon symposium held November 27 - 30, 1984, Boston, Massachusetts |
| title_auth | Impurity diffusion and gettering in silicon symposium held November 27 - 30, 1984, Boston, Massachusetts |
| title_exact_search | Impurity diffusion and gettering in silicon symposium held November 27 - 30, 1984, Boston, Massachusetts |
| title_full | Impurity diffusion and gettering in silicon symposium held November 27 - 30, 1984, Boston, Massachusetts eds. : Richard B. Fair ... |
| title_fullStr | Impurity diffusion and gettering in silicon symposium held November 27 - 30, 1984, Boston, Massachusetts eds. : Richard B. Fair ... |
| title_full_unstemmed | Impurity diffusion and gettering in silicon symposium held November 27 - 30, 1984, Boston, Massachusetts eds. : Richard B. Fair ... |
| title_short | Impurity diffusion and gettering in silicon |
| title_sort | impurity diffusion and gettering in silicon symposium held november 27 30 1984 boston massachusetts |
| title_sub | symposium held November 27 - 30, 1984, Boston, Massachusetts |
| topic | Getterung (DE-588)4157223-3 gnd Silicium (DE-588)4077445-4 gnd Störstelle (DE-588)4193400-3 gnd Halbleiter (DE-588)4022993-2 gnd Gitterbaufehler (DE-588)4125030-8 gnd Diffusion (DE-588)4012277-3 gnd |
| topic_facet | Getterung Silicium Störstelle Halbleiter Gitterbaufehler Diffusion Konferenzschrift 1984 Boston Mass. |
| url | https://www.gbv.de/dms/tib-ub-hannover/017853486.pdf |
| volume_link | (DE-604)BV001899105 |
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