Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen:
Gespeichert in:
| 1. Verfasser: | |
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| Format: | Abschlussarbeit Buch |
| Sprache: | German |
| Veröffentlicht: |
1984
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| Schlagworte: | |
| Beschreibung: | 95 S. Ill., graph. Darst. |
Internformat
MARC
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| 100 | 1 | |a Germer, Wilfried |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen |
| 264 | 1 | |c 1984 | |
| 300 | |a 95 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 502 | |a Hamburg, Techn. Univ., Diss., 1985 | ||
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| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
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| 689 | 3 | 0 | |a Siliciumdünnschichttechnik |A f |
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| 689 | 3 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-001336682 | ||
Datensatz im Suchindex
| _version_ | 1804116494237302784 |
|---|---|
| any_adam_object | |
| author | Germer, Wilfried |
| author_facet | Germer, Wilfried |
| author_role | aut |
| author_sort | Germer, Wilfried |
| author_variant | w g wg |
| building | Verbundindex |
| bvnumber | BV002043835 |
| classification_tum | MSR 055d PHY 690d |
| ctrlnum | (OCoLC)220696045 (DE-599)BVBBV002043835 |
| discipline | Physik Mess-/Steuerungs-/Regelungs-/Automatisierungstechnik |
| format | Thesis Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content Piezoresistive Eigenschaft gnd Silicium-Dünnfilm gnd Siliciumdünnschichttechnik gnd |
| genre_facet | Hochschulschrift Piezoresistive Eigenschaft Silicium-Dünnfilm Siliciumdünnschichttechnik |
| id | DE-604.BV002043835 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:39:24Z |
| institution | BVB |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001336682 |
| oclc_num | 220696045 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-703 DE-355 DE-BY-UBR DE-824 DE-Aug4 DE-12 DE-706 DE-188 |
| owner_facet | DE-91 DE-BY-TUM DE-703 DE-355 DE-BY-UBR DE-824 DE-Aug4 DE-12 DE-706 DE-188 |
| physical | 95 S. Ill., graph. Darst. |
| publishDate | 1984 |
| publishDateSearch | 1984 |
| publishDateSort | 1984 |
| record_format | marc |
| spelling | Germer, Wilfried Verfasser aut Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen 1984 95 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Hamburg, Techn. Univ., Diss., 1985 Sensor (DE-588)4038824-4 gnd rswk-swf Photoresist (DE-588)4174545-0 gnd rswk-swf Piezowiderstandseffekt (DE-588)4211489-5 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Piezoresistive Eigenschaft gnd rswk-swf Silicium-Dünnfilm gnd rswk-swf Siliciumdünnschichttechnik gnd rswk-swf Silicium (DE-588)4077445-4 s Dünne Schicht (DE-588)4136925-7 s Sensor (DE-588)4038824-4 s Piezowiderstandseffekt (DE-588)4211489-5 s DE-604 Silicium-Dünnfilm f Piezoresistive Eigenschaft f Siliciumdünnschichttechnik f Photoresist (DE-588)4174545-0 s |
| spellingShingle | Germer, Wilfried Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen Sensor (DE-588)4038824-4 gnd Photoresist (DE-588)4174545-0 gnd Piezowiderstandseffekt (DE-588)4211489-5 gnd Silicium (DE-588)4077445-4 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4038824-4 (DE-588)4174545-0 (DE-588)4211489-5 (DE-588)4077445-4 (DE-588)4136925-7 (DE-588)4113937-9 |
| title | Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen |
| title_auth | Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen |
| title_exact_search | Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen |
| title_full | Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen |
| title_fullStr | Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen |
| title_full_unstemmed | Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen |
| title_short | Piezoresistive Eigenschaften von Silizium-Dünnfilmen für Sensor-Anwendungen |
| title_sort | piezoresistive eigenschaften von silizium dunnfilmen fur sensor anwendungen |
| topic | Sensor (DE-588)4038824-4 gnd Photoresist (DE-588)4174545-0 gnd Piezowiderstandseffekt (DE-588)4211489-5 gnd Silicium (DE-588)4077445-4 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Sensor Photoresist Piezowiderstandseffekt Silicium Dünne Schicht Hochschulschrift Piezoresistive Eigenschaft Silicium-Dünnfilm Siliciumdünnschichttechnik |
| work_keys_str_mv | AT germerwilfried piezoresistiveeigenschaftenvonsiliziumdunnfilmenfursensoranwendungen |