On electron beam lithography for LSI-circuit fabrication:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
1979
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| Schlagworte: | |
| Beschreibung: | Stockholm, Tekniska Högskolan, Diss. |
| Beschreibung: | 14 Bl. |
Internformat
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| 100 | 1 | |a Astrand, Börje |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a On electron beam lithography for LSI-circuit fabrication |
| 264 | 1 | |c 1979 | |
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| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-001330947 | ||
Datensatz im Suchindex
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| author | Astrand, Börje |
| author_facet | Astrand, Börje |
| author_role | aut |
| author_sort | Astrand, Börje |
| author_variant | b a ba |
| building | Verbundindex |
| bvnumber | BV002035597 |
| ctrlnum | (OCoLC)256546572 (DE-599)BVBBV002035597 |
| format | Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV002035597 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T15:39:16Z |
| institution | BVB |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001330947 |
| oclc_num | 256546572 |
| open_access_boolean | |
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| owner_facet | DE-91 DE-BY-TUM |
| physical | 14 Bl. |
| publishDate | 1979 |
| publishDateSearch | 1979 |
| publishDateSort | 1979 |
| record_format | marc |
| spelling | Astrand, Börje Verfasser aut On electron beam lithography for LSI-circuit fabrication 1979 14 Bl. txt rdacontent n rdamedia nc rdacarrier Stockholm, Tekniska Högskolan, Diss. (DE-588)4113937-9 Hochschulschrift gnd-content |
| spellingShingle | Astrand, Börje On electron beam lithography for LSI-circuit fabrication |
| subject_GND | (DE-588)4113937-9 |
| title | On electron beam lithography for LSI-circuit fabrication |
| title_auth | On electron beam lithography for LSI-circuit fabrication |
| title_exact_search | On electron beam lithography for LSI-circuit fabrication |
| title_full | On electron beam lithography for LSI-circuit fabrication |
| title_fullStr | On electron beam lithography for LSI-circuit fabrication |
| title_full_unstemmed | On electron beam lithography for LSI-circuit fabrication |
| title_short | On electron beam lithography for LSI-circuit fabrication |
| title_sort | on electron beam lithography for lsi circuit fabrication |
| topic_facet | Hochschulschrift |
| work_keys_str_mv | AT astrandborje onelectronbeamlithographyforlsicircuitfabrication |