Vacuum technology, thin films, and sputtering: an introd.
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
New York (u.a.)
Acad. Pr.
1983
|
| Schlagworte: | |
| Beschreibung: | VIII, 151 S. graph. Darst. |
| ISBN: | 0126747806 |
Internformat
MARC
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| 245 | 1 | 0 | |a Vacuum technology, thin films, and sputtering |b an introd. |
| 264 | 1 | |a New York (u.a.) |b Acad. Pr. |c 1983 | |
| 300 | |a VIII, 151 S. |b graph. Darst. | ||
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| 650 | 7 | |a Tecnologia De Valvulas Eletronicas |2 larpcal | |
| 650 | 7 | |a Vacuümtechniek |2 gtt | |
| 650 | 7 | |a Verstuiven |2 gtt | |
| 650 | 4 | |a Vide (Technologie) | |
| 650 | 4 | |a Cathode sputtering (Plating process) | |
| 650 | 4 | |a Thin films | |
| 650 | 4 | |a Vacuum technology | |
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Datensatz im Suchindex
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| any_adam_object | |
| author | Stuart, R. V. |
| author_facet | Stuart, R. V. |
| author_role | aut |
| author_sort | Stuart, R. V. |
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| building | Verbundindex |
| bvnumber | BV002022163 |
| callnumber-first | T - Technology |
| callnumber-label | TP156 |
| callnumber-raw | TP156.V3 |
| callnumber-search | TP156.V3 |
| callnumber-sort | TP 3156 V3 |
| callnumber-subject | TP - Chemical Technology |
| classification_rvk | UP 7500 |
| classification_tum | FER 882f |
| ctrlnum | (OCoLC)8667288 (DE-599)BVBBV002022163 |
| dewey-full | 621.5/5 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.5/5 |
| dewey-search | 621.5/5 |
| dewey-sort | 3621.5 15 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Maschinenbau / Maschinenwesen Physik Fertigungstechnik |
| format | Book |
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| id | DE-604.BV002022163 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:39:02Z |
| institution | BVB |
| isbn | 0126747806 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001321040 |
| oclc_num | 8667288 |
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| owner_facet | DE-91 DE-BY-TUM DE-384 DE-355 DE-BY-UBR DE-83 |
| physical | VIII, 151 S. graph. Darst. |
| psigel | TUB-nveb |
| publishDate | 1983 |
| publishDateSearch | 1983 |
| publishDateSort | 1983 |
| publisher | Acad. Pr. |
| record_format | marc |
| spelling | Stuart, R. V. Verfasser aut Vacuum technology, thin films, and sputtering an introd. New York (u.a.) Acad. Pr. 1983 VIII, 151 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Couches minces Dunne films gtt Pulvérisation cathodique - Applications industrielles Refrigeracao E Ar Comprimido larpcal Tecnologia De Valvulas Eletronicas larpcal Vacuümtechniek gtt Verstuiven gtt Vide (Technologie) Cathode sputtering (Plating process) Thin films Vacuum technology Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf Zerstäubung (DE-588)4067687-0 gnd rswk-swf Vakuumtechnik (DE-588)4062270-8 gnd rswk-swf Sputtern (DE-588)4182614-0 s DE-604 Dünnschichttechnik (DE-588)4136339-5 s Vakuumtechnik (DE-588)4062270-8 s Zerstäubung (DE-588)4067687-0 s |
| spellingShingle | Stuart, R. V. Vacuum technology, thin films, and sputtering an introd. Couches minces Dunne films gtt Pulvérisation cathodique - Applications industrielles Refrigeracao E Ar Comprimido larpcal Tecnologia De Valvulas Eletronicas larpcal Vacuümtechniek gtt Verstuiven gtt Vide (Technologie) Cathode sputtering (Plating process) Thin films Vacuum technology Dünnschichttechnik (DE-588)4136339-5 gnd Sputtern (DE-588)4182614-0 gnd Zerstäubung (DE-588)4067687-0 gnd Vakuumtechnik (DE-588)4062270-8 gnd |
| subject_GND | (DE-588)4136339-5 (DE-588)4182614-0 (DE-588)4067687-0 (DE-588)4062270-8 |
| title | Vacuum technology, thin films, and sputtering an introd. |
| title_auth | Vacuum technology, thin films, and sputtering an introd. |
| title_exact_search | Vacuum technology, thin films, and sputtering an introd. |
| title_full | Vacuum technology, thin films, and sputtering an introd. |
| title_fullStr | Vacuum technology, thin films, and sputtering an introd. |
| title_full_unstemmed | Vacuum technology, thin films, and sputtering an introd. |
| title_short | Vacuum technology, thin films, and sputtering |
| title_sort | vacuum technology thin films and sputtering an introd |
| title_sub | an introd. |
| topic | Couches minces Dunne films gtt Pulvérisation cathodique - Applications industrielles Refrigeracao E Ar Comprimido larpcal Tecnologia De Valvulas Eletronicas larpcal Vacuümtechniek gtt Verstuiven gtt Vide (Technologie) Cathode sputtering (Plating process) Thin films Vacuum technology Dünnschichttechnik (DE-588)4136339-5 gnd Sputtern (DE-588)4182614-0 gnd Zerstäubung (DE-588)4067687-0 gnd Vakuumtechnik (DE-588)4062270-8 gnd |
| topic_facet | Couches minces Dunne films Pulvérisation cathodique - Applications industrielles Refrigeracao E Ar Comprimido Tecnologia De Valvulas Eletronicas Vacuümtechniek Verstuiven Vide (Technologie) Cathode sputtering (Plating process) Thin films Vacuum technology Dünnschichttechnik Sputtern Zerstäubung Vakuumtechnik |
| work_keys_str_mv | AT stuartrv vacuumtechnologythinfilmsandsputteringanintrod |