Ion implantation in semiconductors: proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics, and Technology, Fundamental and Applied Aspects, May 24 - 28, 1971, Garmisch-Partenkirchen, Bavaria, Germany
Gespeichert in:
| Weitere Verfasser: | , |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin [u.a.]
Springer
1971
|
| Schlagworte: | |
| Beschreibung: | 506 S. |
| ISBN: | 0387056661 3540056661 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV001941114 | ||
| 003 | DE-604 | ||
| 005 | 20141114 | ||
| 007 | t | ||
| 008 | 890928s1971 |||| 10||| eng d | ||
| 020 | |a 0387056661 |9 0-387-05666-1 | ||
| 020 | |a 3540056661 |9 3-540-05666-1 | ||
| 035 | |a (OCoLC)630468774 | ||
| 035 | |a (DE-599)BVBBV001941114 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-355 |a DE-29T |a DE-91 |a DE-11 |a DE-188 | ||
| 084 | |a UP 3000 |0 (DE-625)146369: |2 rvk | ||
| 084 | |a ELT 293f |2 stub | ||
| 245 | 1 | 0 | |a Ion implantation in semiconductors |b proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics, and Technology, Fundamental and Applied Aspects, May 24 - 28, 1971, Garmisch-Partenkirchen, Bavaria, Germany |c ed. by I. Ruge and J. Graul |
| 264 | 1 | |a Berlin [u.a.] |b Springer |c 1971 | |
| 300 | |a 506 S. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1971 |z Garmisch-Partenkirchen |2 gnd-content | |
| 689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | 1 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Ruge, Ingolf |d 1934- |0 (DE-588)106083392 |4 edt | |
| 700 | 1 | |a Graul, Jürgen |4 edt | |
| 711 | 2 | |a International Conference on Ion Implantation in Semiconductors, Physics, and Technology, Fundamental and Applied Aspects |n 2 |d 1971 |c Garmisch-Partenkirchen |j Sonstige |0 (DE-588)2014636-X |4 oth | |
| 940 | 1 | |q HUB-ZB011200912 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-001265177 | ||
Datensatz im Suchindex
| _version_ | 1804116381458759680 |
|---|---|
| any_adam_object | |
| author2 | Ruge, Ingolf 1934- Graul, Jürgen |
| author2_role | edt edt |
| author2_variant | i r ir j g jg |
| author_GND | (DE-588)106083392 |
| author_facet | Ruge, Ingolf 1934- Graul, Jürgen |
| building | Verbundindex |
| bvnumber | BV001941114 |
| classification_rvk | UP 3000 |
| classification_tum | ELT 293f |
| ctrlnum | (OCoLC)630468774 (DE-599)BVBBV001941114 |
| discipline | Physik Elektrotechnik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01691nam a2200397 c 4500</leader><controlfield tag="001">BV001941114</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20141114 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">890928s1971 |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0387056661</subfield><subfield code="9">0-387-05666-1</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3540056661</subfield><subfield code="9">3-540-05666-1</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)630468774</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV001941114</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-355</subfield><subfield code="a">DE-29T</subfield><subfield code="a">DE-91</subfield><subfield code="a">DE-11</subfield><subfield code="a">DE-188</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 3000</subfield><subfield code="0">(DE-625)146369:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ELT 293f</subfield><subfield code="2">stub</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Ion implantation in semiconductors</subfield><subfield code="b">proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics, and Technology, Fundamental and Applied Aspects, May 24 - 28, 1971, Garmisch-Partenkirchen, Bavaria, Germany</subfield><subfield code="c">ed. by I. Ruge and J. Graul</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin [u.a.]</subfield><subfield code="b">Springer</subfield><subfield code="c">1971</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">506 S.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1971</subfield><subfield code="z">Garmisch-Partenkirchen</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Ruge, Ingolf</subfield><subfield code="d">1934-</subfield><subfield code="0">(DE-588)106083392</subfield><subfield code="4">edt</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Graul, Jürgen</subfield><subfield code="4">edt</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">International Conference on Ion Implantation in Semiconductors, Physics, and Technology, Fundamental and Applied Aspects</subfield><subfield code="n">2</subfield><subfield code="d">1971</subfield><subfield code="c">Garmisch-Partenkirchen</subfield><subfield code="j">Sonstige</subfield><subfield code="0">(DE-588)2014636-X</subfield><subfield code="4">oth</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">HUB-ZB011200912</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-001265177</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1971 Garmisch-Partenkirchen gnd-content |
| genre_facet | Konferenzschrift 1971 Garmisch-Partenkirchen |
| id | DE-604.BV001941114 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T15:37:36Z |
| institution | BVB |
| institution_GND | (DE-588)2014636-X |
| isbn | 0387056661 3540056661 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001265177 |
| oclc_num | 630468774 |
| open_access_boolean | |
| owner | DE-355 DE-BY-UBR DE-29T DE-91 DE-BY-TUM DE-11 DE-188 |
| owner_facet | DE-355 DE-BY-UBR DE-29T DE-91 DE-BY-TUM DE-11 DE-188 |
| physical | 506 S. |
| psigel | HUB-ZB011200912 |
| publishDate | 1971 |
| publishDateSearch | 1971 |
| publishDateSort | 1971 |
| publisher | Springer |
| record_format | marc |
| spelling | Ion implantation in semiconductors proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics, and Technology, Fundamental and Applied Aspects, May 24 - 28, 1971, Garmisch-Partenkirchen, Bavaria, Germany ed. by I. Ruge and J. Graul Berlin [u.a.] Springer 1971 506 S. txt rdacontent n rdamedia nc rdacarrier Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1971 Garmisch-Partenkirchen gnd-content Halbleiter (DE-588)4022993-2 s Ionenimplantation (DE-588)4027606-5 s DE-604 Ruge, Ingolf 1934- (DE-588)106083392 edt Graul, Jürgen edt International Conference on Ion Implantation in Semiconductors, Physics, and Technology, Fundamental and Applied Aspects 2 1971 Garmisch-Partenkirchen Sonstige (DE-588)2014636-X oth |
| spellingShingle | Ion implantation in semiconductors proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics, and Technology, Fundamental and Applied Aspects, May 24 - 28, 1971, Garmisch-Partenkirchen, Bavaria, Germany Ionenimplantation (DE-588)4027606-5 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4027606-5 (DE-588)4022993-2 (DE-588)1071861417 |
| title | Ion implantation in semiconductors proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics, and Technology, Fundamental and Applied Aspects, May 24 - 28, 1971, Garmisch-Partenkirchen, Bavaria, Germany |
| title_auth | Ion implantation in semiconductors proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics, and Technology, Fundamental and Applied Aspects, May 24 - 28, 1971, Garmisch-Partenkirchen, Bavaria, Germany |
| title_exact_search | Ion implantation in semiconductors proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics, and Technology, Fundamental and Applied Aspects, May 24 - 28, 1971, Garmisch-Partenkirchen, Bavaria, Germany |
| title_full | Ion implantation in semiconductors proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics, and Technology, Fundamental and Applied Aspects, May 24 - 28, 1971, Garmisch-Partenkirchen, Bavaria, Germany ed. by I. Ruge and J. Graul |
| title_fullStr | Ion implantation in semiconductors proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics, and Technology, Fundamental and Applied Aspects, May 24 - 28, 1971, Garmisch-Partenkirchen, Bavaria, Germany ed. by I. Ruge and J. Graul |
| title_full_unstemmed | Ion implantation in semiconductors proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics, and Technology, Fundamental and Applied Aspects, May 24 - 28, 1971, Garmisch-Partenkirchen, Bavaria, Germany ed. by I. Ruge and J. Graul |
| title_short | Ion implantation in semiconductors |
| title_sort | ion implantation in semiconductors proceedings of the ii international conference on ion implantation in semiconductors physics and technology fundamental and applied aspects may 24 28 1971 garmisch partenkirchen bavaria germany |
| title_sub | proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics, and Technology, Fundamental and Applied Aspects, May 24 - 28, 1971, Garmisch-Partenkirchen, Bavaria, Germany |
| topic | Ionenimplantation (DE-588)4027606-5 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Ionenimplantation Halbleiter Konferenzschrift 1971 Garmisch-Partenkirchen |
| work_keys_str_mv | AT rugeingolf ionimplantationinsemiconductorsproceedingsoftheiiinternationalconferenceonionimplantationinsemiconductorsphysicsandtechnologyfundamentalandappliedaspectsmay24281971garmischpartenkirchenbavariagermany AT grauljurgen ionimplantationinsemiconductorsproceedingsoftheiiinternationalconferenceonionimplantationinsemiconductorsphysicsandtechnologyfundamentalandappliedaspectsmay24281971garmischpartenkirchenbavariagermany AT internationalconferenceonionimplantationinsemiconductorsphysicsandtechnologyfundamentalandappliedaspectsgarmischpartenkirchen ionimplantationinsemiconductorsproceedingsoftheiiinternationalconferenceonionimplantationinsemiconductorsphysicsandtechnologyfundamentalandappliedaspectsmay24281971garmischpartenkirchenbavariagermany |