Fundamentals of vacuum science and technology:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
New York [u.a.]
McGraw-Hill
1965
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| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | XIII, 248 S. graph. Darst. |
Internformat
MARC
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| 245 | 1 | 0 | |a Fundamentals of vacuum science and technology |c Gerhard Lewin |
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Datensatz im Suchindex
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|---|---|
| adam_text | Fundamentals
of Vacuum Science
and Technology
Gerhard Lewin, Ph D
Plasma Physics Laboratory
Princeton University
McGraw-Hill Book Company
New York St Louis San Francisco Toronto London Sydney
Contents
Preface vii
List of Symbols xii
Introduction 1
CHAPTER1PERTINENTEQUATIONSOFTHEKINETIC
THEORYOFGASES
1 -1 Equation of State 8
I 1-2 Energy and Velocity of the Molecules 4
1 -3 Molecules Incident on a Surface 5
1 -4 Mean Free Path 5
1-5 J/iscosity 6
1 -6 Heat Transfer 6
1-7 Thermal Transpiration 8
CHAPTER2FLOWOFGASTHROUGHORIFICES
ANDTUBES11
2-1 Mass Flow and Conductance 11
2-2 Conductance of an Orifice for M olecular Flow
2-3 Conductance of Pipes for Molecular Flow 13
2-4 Conductance of an Orifice in the Viscous Flow
Range 16
2-5 Conductance of Pipes in the Viscous Flow Range
2-6 Conductance of Pipes in the Transition Range
2-7 Temperature Dependence of Conductance 20
2-8 Turbulent Flow Through Pipes 20
ix
xCONTENTS
CHAPTER3
3-1
3-2
3-3
3-4
3-5
3-6
3-7
3-8
3-9
3-10
CHAPTER4
4-1
4-2
CHAPTER5
5-1
5-2
5-3
5-4
5-5
5-6
5-7
t
5-8
5-9
5-10
5-11
5-12
5-13
5-14
5-15
5-16
5-17
CHAPTER6
6-1
6-2
6-3
6-4
SURFACEEFFECTS
Gas Permeation 24
Gas Diffusing from a Semi-infinite Slab 31
Diffusion of Gas from a Finite Slab 32
Adsorption and Thermal Desorption 35
Evaporation and Dissociation 51
Ion-Surface Interactions 55
Desorption by Electrons 66
Photon Desorption 67
Production of Gaseous Compounds by Surface
Reactions 68
Gassing and Degassing of Surfaces 69
THEPUMPINGPROCESS
Evacuation of a Lumped Volume 81
Evacuation of a Distributed Volume 84
VACUUMMEASUREMENTS
Total-pressure Gages 88
McLeod Gage 88
Diaphragm Gage 90
Thermal-conductivity Gnges 91
Alphatron Gage 92
Hot-cathode Ionization (lage 92
Gages with Crossed Electric and Magnetic
Fields 98
Measurement of Partial Pressures 101
Desorption Spectrometer 103
The Ion Source 1 0 1
Ion-current Amplification 106
Mass Separation 109
Mass Spectrometers as Total-pressure Gages
Leak Detection 115
The Measurement of Pumping Speed 117
The Measurement of Conductances 119
The Calibration of Gages 120
PUMPS
Forepumps 126
Diffusion Pumps and Traps
Molecular Drag Pump 139
Sorption Pumping 141
CONTENTS xi
6-5 Ion-Sorption Pumps 151
6-6 Sputter-ion Pumps 155
6-7 Cryogenic Condensation Pumps and
Cryo trapping 160
CHAPTER7EQUIPMENTCOMPONENTS167
7-1 Selection of Components; Reliability 167
7-2 Stopcocks and Ground Joints 168
7-3 Detachable Joints and Leadthroughs 168
1-4 Valves 177
7-5 Flexible Tubing and Bellows 185
1-t Motion in Vacuum 186
7-7 Gas Purifiers 189
CHAPTER8MATERIALSFORVACUUMSYSTEMS195
8-1 Metals 195
8-2 Glasses 196
8-3 Ceramics 196
8-4 Boron Nitride and Glass-bonded Mica 199
CHAPTER9JOININGANDPREPARATORYTREATMENT
OFCOMPONENTS203
9-1 General Remarks; Reliability 203
9-2 Vacuum Greases, Waxes, and Cements 204
9-3 Soldering and Brazing 20•
9-4 Welding 209
9-5 Dissimilar Glass-to-glass Seals 212
9-6 Glass Seals to Metals and Ceramics 213
9-7 Ceramic-to-metal Seals 217
9-8 Cleaning and Heat Treatment 219
CHAPTER10VACUUMSYSTEMS227
10-1 System Requirements and Design 227
10-2 Examples of Vacuum Systems 229
Index 243
|
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| indexdate | 2024-07-09T15:37:24Z |
| institution | BVB |
| language | English |
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| spelling | Lewin, Gerhard Verfasser aut Fundamentals of vacuum science and technology Gerhard Lewin New York [u.a.] McGraw-Hill 1965 XIII, 248 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Vacuümtechniek gtt Vide (Technologie) Vacuum technology Vakuumtechnik (DE-588)4062270-8 gnd rswk-swf Vakuumtechnik (DE-588)4062270-8 s DE-604 HEBIS Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=001257289&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Lewin, Gerhard Fundamentals of vacuum science and technology Vacuümtechniek gtt Vide (Technologie) Vacuum technology Vakuumtechnik (DE-588)4062270-8 gnd |
| subject_GND | (DE-588)4062270-8 |
| title | Fundamentals of vacuum science and technology |
| title_auth | Fundamentals of vacuum science and technology |
| title_exact_search | Fundamentals of vacuum science and technology |
| title_full | Fundamentals of vacuum science and technology Gerhard Lewin |
| title_fullStr | Fundamentals of vacuum science and technology Gerhard Lewin |
| title_full_unstemmed | Fundamentals of vacuum science and technology Gerhard Lewin |
| title_short | Fundamentals of vacuum science and technology |
| title_sort | fundamentals of vacuum science and technology |
| topic | Vacuümtechniek gtt Vide (Technologie) Vacuum technology Vakuumtechnik (DE-588)4062270-8 gnd |
| topic_facet | Vacuümtechniek Vide (Technologie) Vacuum technology Vakuumtechnik |
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