Plasma etching: an introd.
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Boston u.a.
Acad. Pr.
1989
|
| Schriftenreihe: | Plasma-materials interactions
|
| Schlagworte: | |
| Beschreibung: | Literaturangaben |
| Beschreibung: | XII, 476 S. Ill., graph. Darst. |
| ISBN: | 0124693709 |
Internformat
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| 245 | 1 | 0 | |a Plasma etching |b an introd. |c ed. by Dennis M. Manos ... |
| 264 | 1 | |a Boston u.a. |b Acad. Pr. |c 1989 | |
| 300 | |a XII, 476 S. |b Ill., graph. Darst. | ||
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| 700 | 1 | |a Manos, Dennis M. |e Sonstige |4 oth | |
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Datensatz im Suchindex
| _version_ | 1804116358527451136 |
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| dewey-full | 621.044 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.044 |
| dewey-search | 621.044 |
| dewey-sort | 3621.044 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Fertigungstechnik Werkstoffwissenschaften / Fertigungstechnik |
| format | Book |
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| id | DE-604.BV001920138 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:37:14Z |
| institution | BVB |
| isbn | 0124693709 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001251453 |
| oclc_num | 311214292 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-20 DE-11 |
| owner_facet | DE-91 DE-BY-TUM DE-20 DE-11 |
| physical | XII, 476 S. Ill., graph. Darst. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Acad. Pr. |
| record_format | marc |
| series2 | Plasma-materials interactions |
| spelling | Plasma etching an introd. ed. by Dennis M. Manos ... Boston u.a. Acad. Pr. 1989 XII, 476 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Plasma-materials interactions Literaturangaben Plasmaätzen (DE-588)4174821-9 gnd rswk-swf Plasmaätzen (DE-588)4174821-9 s DE-604 Manos, Dennis M. Sonstige oth |
| spellingShingle | Plasma etching an introd. Plasmaätzen (DE-588)4174821-9 gnd |
| subject_GND | (DE-588)4174821-9 |
| title | Plasma etching an introd. |
| title_auth | Plasma etching an introd. |
| title_exact_search | Plasma etching an introd. |
| title_full | Plasma etching an introd. ed. by Dennis M. Manos ... |
| title_fullStr | Plasma etching an introd. ed. by Dennis M. Manos ... |
| title_full_unstemmed | Plasma etching an introd. ed. by Dennis M. Manos ... |
| title_short | Plasma etching |
| title_sort | plasma etching an introd |
| title_sub | an introd. |
| topic | Plasmaätzen (DE-588)4174821-9 gnd |
| topic_facet | Plasmaätzen |
| work_keys_str_mv | AT manosdennism plasmaetchinganintrod |