Handbook of thin film deposition processes and techniques: principles, methods, equipment and applications
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Park Ridge, NJ
Noyes
1988
|
| Schriftenreihe: | Materials science and process technology series
|
| Schlagworte: | |
| Beschreibung: | XVII, 413 S. Ill., zahlr. graph. Darst. |
| ISBN: | 0815511531 |
Internformat
MARC
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| 245 | 1 | 0 | |a Handbook of thin film deposition processes and techniques |b principles, methods, equipment and applications |c ed. by Klaus K. Schuegraf |
| 246 | 1 | 3 | |a Handbook of thin-film deposition processes and techniques |
| 264 | 1 | |a Park Ridge, NJ |b Noyes |c 1988 | |
| 300 | |a XVII, 413 S. |b Ill., zahlr. graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 0 | |a Materials science and process technology series | |
| 650 | 7 | |a Couches minces - Technologie |2 ram | |
| 650 | 4 | |a Dispositifs à couches minces - Conception et construction - Guides, manuels, etc | |
| 650 | 4 | |a Thin film devices |x Design and construction |v Handbooks, manuals, etc | |
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Datensatz im Suchindex
| _version_ | 1804116267794169856 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV001775199 |
| callnumber-first | T - Technology |
| callnumber-label | TK7872 |
| callnumber-raw | TK7872.T55 |
| callnumber-search | TK7872.T55 |
| callnumber-sort | TK 47872 T55 |
| callnumber-subject | TK - Electrical and Nuclear Engineering |
| classification_rvk | UP 7550 ZM 7680 ZN 4140 ZN 4150 |
| classification_tum | ELT 279b |
| ctrlnum | (OCoLC)17234252 (DE-599)BVBBV001775199 |
| dewey-full | 621.381/72 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381/72 |
| dewey-search | 621.381/72 |
| dewey-sort | 3621.381 272 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik Elektrotechnik / Elektronik / Nachrichtentechnik Werkstoffwissenschaften / Fertigungstechnik |
| format | Book |
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| id | DE-604.BV001775199 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:35:48Z |
| institution | BVB |
| isbn | 0815511531 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-001196375 |
| oclc_num | 17234252 |
| open_access_boolean | |
| owner | DE-91 DE-BY-TUM DE-898 DE-BY-UBR DE-355 DE-BY-UBR DE-29T DE-384 DE-92 DE-83 DE-11 DE-188 |
| owner_facet | DE-91 DE-BY-TUM DE-898 DE-BY-UBR DE-355 DE-BY-UBR DE-29T DE-384 DE-92 DE-83 DE-11 DE-188 |
| physical | XVII, 413 S. Ill., zahlr. graph. Darst. |
| publishDate | 1988 |
| publishDateSearch | 1988 |
| publishDateSort | 1988 |
| publisher | Noyes |
| record_format | marc |
| series2 | Materials science and process technology series |
| spelling | Handbook of thin film deposition processes and techniques principles, methods, equipment and applications ed. by Klaus K. Schuegraf Handbook of thin-film deposition processes and techniques Park Ridge, NJ Noyes 1988 XVII, 413 S. Ill., zahlr. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials science and process technology series Couches minces - Technologie ram Dispositifs à couches minces - Conception et construction - Guides, manuels, etc Thin film devices Design and construction Handbooks, manuals, etc CVD-Verfahren (DE-588)4009846-1 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 s DE-604 CVD-Verfahren (DE-588)4009846-1 s Dünne Schicht (DE-588)4136925-7 s 1\p DE-604 Schuegraf, Klaus K. Sonstige oth 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of thin film deposition processes and techniques principles, methods, equipment and applications Couches minces - Technologie ram Dispositifs à couches minces - Conception et construction - Guides, manuels, etc Thin film devices Design and construction Handbooks, manuals, etc CVD-Verfahren (DE-588)4009846-1 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4009846-1 (DE-588)4136339-5 (DE-588)4136925-7 |
| title | Handbook of thin film deposition processes and techniques principles, methods, equipment and applications |
| title_alt | Handbook of thin-film deposition processes and techniques |
| title_auth | Handbook of thin film deposition processes and techniques principles, methods, equipment and applications |
| title_exact_search | Handbook of thin film deposition processes and techniques principles, methods, equipment and applications |
| title_full | Handbook of thin film deposition processes and techniques principles, methods, equipment and applications ed. by Klaus K. Schuegraf |
| title_fullStr | Handbook of thin film deposition processes and techniques principles, methods, equipment and applications ed. by Klaus K. Schuegraf |
| title_full_unstemmed | Handbook of thin film deposition processes and techniques principles, methods, equipment and applications ed. by Klaus K. Schuegraf |
| title_short | Handbook of thin film deposition processes and techniques |
| title_sort | handbook of thin film deposition processes and techniques principles methods equipment and applications |
| title_sub | principles, methods, equipment and applications |
| topic | Couches minces - Technologie ram Dispositifs à couches minces - Conception et construction - Guides, manuels, etc Thin film devices Design and construction Handbooks, manuals, etc CVD-Verfahren (DE-588)4009846-1 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Couches minces - Technologie Dispositifs à couches minces - Conception et construction - Guides, manuels, etc Thin film devices Design and construction Handbooks, manuals, etc CVD-Verfahren Dünnschichttechnik Dünne Schicht |
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