Electron optical systems for microscopy, microanalysis and microlithography: proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
O'Hare, IL
Scanning Electron Microscopy
1984
|
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | 272, VIII S. Ill., graph. Darst. |
| ISBN: | 0931288347 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV001322200 | ||
| 003 | DE-604 | ||
| 005 | 20200131 | ||
| 007 | t | ||
| 008 | 890608s1984 ad|| |||| 10||| eng d | ||
| 020 | |a 0931288347 |9 0-931288-34-7 | ||
| 035 | |a (OCoLC)230967124 | ||
| 035 | |a (DE-599)BVBBV001322200 | ||
| 040 | |a DE-604 |b ger |e rakddb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-12 |a DE-83 | ||
| 245 | 1 | 0 | |a Electron optical systems for microscopy, microanalysis and microlithography |b proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD |c ed. by John J. Hren ... |
| 264 | 1 | |a O'Hare, IL |b Scanning Electron Microscopy |c 1984 | |
| 300 | |a 272, VIII S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 0 | 7 | |a Elektronenoptik |0 (DE-588)4151879-2 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1984 |z Ocean City Md. |2 gnd-content | |
| 689 | 0 | 0 | |a Elektronenoptik |0 (DE-588)4151879-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Hren, John J. |4 edt | |
| 711 | 2 | |a Pfefferkorn Conference |n 3 |d 1984 |c Ocean City, Md. |j Sonstige |0 (DE-588)816210-4 |4 oth | |
| 856 | 4 | 2 | |m GBV Datenaustausch |q application/pdf |u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=000798940&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |3 Inhaltsverzeichnis |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-000798940 | ||
Datensatz im Suchindex
| _version_ | 1804115729423794176 |
|---|---|
| adam_text | ELECTRON OPTICAL SYSTEMS FOR MICROSCOPY, MICROANALYSIS &
MICROLITHOGRAPHY PROCEEDINGS OF THE 3RD PFEFFERKORN CONFERENCE, HELD
APRIL 9 TO 14, 1984, AT THE CAROUSEL HOTEL, OCEAN CITY, MD EDITED BY
JOHN J. HREN FRIEDRICH A. LENZ ERIC MUNRO PETER B. SEWELL MANAGING
EDITOR SUDHA A. BHATT PUBLISHED BY SCANNING ELECTRON MICROSCOPY, INC.
P.O. BOX 66507 AMF O HARE, IL 60666 U.S.A. UNIVERSITATSBIBLIOTHEIO
HANNOVER I EICHMISCHE YINFORMATIONSBIBL.GTHFEK , PROCEEDINGS OF THE 3RD
PFEFFERKORN CONFERENCE ON: 1984, SEM INC., AMF O HARE, IL 60666
ELECTRON OPTICAL SYSTEMS FOR MICROSCOPY, MICROANALYSIS, AND
MICROLITHOGRAPHY TABLE OF CONTENTS FOREWORD I I I ABOUT SCANNING
ELECTRON MICROSCOPY, INC., ITS AIMS, PROGRAMS AND PUBLICATIONS VI
MAGNETIC ELECTRON LENSES W.D. RIECKE 1 MAGNETIC ELECTRON LENSES II T.
MULVEY 15 VARIOUS ATTEMPTS TO REDUCE THE DIMENSIONS OF MAGNETIC ELECTRON
LENSES USED FOR HIGH VOLTAGE MICROSCOPES J.L. BALLADORE, R. MURILLO, J.
TRINQUIER ELECTROSTATIC AND MAGNETIC IMAGING WITHOUT IMAGE ROTATION
L.-W. ZHOU, G.-Q. NI, E.-L. FANG OPTICS OF WIDE ELECTRON BEAM FOCUSING
L.-W. ZHOU RECENT DEVELOPMENTS IN NUMERICAL ELECTRON OPTICS E.K. KASPER
SYNTHESIS OF ELECTRON LENSES M. SZILAGYI THE APPLICATION OF THE
ALTERNATING PROCEDURE OF H.A. SCHWARZ FOR COMPUTING THREE-DIMENSIONAL
ELECTROSTATIC FIELDS IN ELECTRON-OPTICAL SYSTEMS C.H. SCHAEFER
CONSTRAINED OPTIMIZATION DESIGN OF AN ELECTRON OPTICAL SYSTEM C.-X. GU,
L.-Y. SHAN PROGRESS IN THE THEORY OF ELECTRON-BEAM DEFLECTION E.F. RITZ,
JR. ELECTRON BEAM DEFLECTION WITHOUT OFF-AXIS ABERRATIONS H.C. PFEIFFER,
M.A. STURANS COMPUTER PROGRAMS FOR ANALYZING CERTAIN CLASSES OF 3-D
ELECTROSTATIC FIELDS WITH TWO PLANES OF SYMMETRY N. FRANZEN OPTIMIZATION
OF STROBOSCOPIC ELECTRON DEFLECTION SYSTEMS H. ROSE, J. ZACH FIELD
EMISSION SOURCE OPTICS L.W. SWANSON A COMPARISON OF LANTHANUM
HEXABORIDE, COLD FIELD EMISSION AND THERMAL FIELD EMISSION ELECTRON GUNS
FOR LOW VOLTAGE SCANNING ELECTRON MICROSCOPY J. ORLOFF THERMIONIC
EMISSION STUDIES OF MICRO-FLAT SINGLE CRYSTAL LANTHANUM HEXABORIDE
CATHODES P.B. SEWELL, A. DELSGE STUDY OF SPACE CHARGE LIMITATION OF
THERMIONIC CATHODES IN TRIODE GUNS A. DELCTGE, P.B. SEWELL DETERMINATION
OF OPTICAL PROPERTIES OF A FIELD EMISSION GUN COUPLED WITH A LINEAR
ACCELERATOR FOR HIGH VOLTAGE MICROSCOPY M. DENIZART, S. ROQUES, F.
SONIER, B. JOUFFREY ELECTRON DETECTORS USED FOR IMAGING IN THE SCANNING
ELECTRON MICROSCOPE V.N.E. ROBINSON 187 MICROCHANNEL PLATES AS
SPECIALIZED SCANNING ELECTRON MICROSCOPE DETECTORS P.E. RUSSELL 197 THE
INFLUENCE OF SAMPLE AND DETECTOR ANGLES UPON AUGER ELECTRON SIGNAL R.L.
GERLACH 201 ELECTRON IMAGE SIMULATION: A COMPLEMENTARY PROCESSING
TECHNIQUE M.A. O KEEFE 209 INTERACTIVE IMAGE PROCESSING FOR ELECTRON
MICROSCOPY: MATCHING HARDWARE WITH SOFTWARE W.O. SAXTON 221 DISPLAYS:
MARKET AND TECHNOLOGIES S. BLAZO 231 A COMPUTER CONTROLLED SCANNING
TRANSMISSION ELECTRON MICROSCOPE EQUIPPED WITH AN ENERGY ANALYZER FOR
SPECIAL INVESTIGATIONS ON ELECTRON DIFFRACTION- AND CHANNELING PATTERNS
W. HYLLA, H.-J. KOHL, H. NIEDRIG, D. WENDTLAND 237 ENERGY SELECTING
ELECTRON MICROSCOPY F.P. OTTENSMEYER 245 LOW VOLTAGE SCANNING ELECTRON
MICROSCOPY J.B. PAWLEY 253 SUBJECT INDEX VII AUTHOR INDEX VI II LISTING
OF SELECTED PAPERS ON ELECTRON OPTICAL SYSTEMS AND RELATED TOPICS IN THE
INTERNATIONAL JOURNAL SCANNING ELECTRON MICROSCOPY 1983 AND 1984. VIII
|
| any_adam_object | 1 |
| author2 | Hren, John J. |
| author2_role | edt |
| author2_variant | j j h jj jjh |
| author_facet | Hren, John J. |
| building | Verbundindex |
| bvnumber | BV001322200 |
| ctrlnum | (OCoLC)230967124 (DE-599)BVBBV001322200 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01459nam a2200325 c 4500</leader><controlfield tag="001">BV001322200</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20200131 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">890608s1984 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0931288347</subfield><subfield code="9">0-931288-34-7</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)230967124</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV001322200</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakddb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-12</subfield><subfield code="a">DE-83</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Electron optical systems for microscopy, microanalysis and microlithography</subfield><subfield code="b">proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD</subfield><subfield code="c">ed. by John J. Hren ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">O'Hare, IL</subfield><subfield code="b">Scanning Electron Microscopy</subfield><subfield code="c">1984</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">272, VIII S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Elektronenoptik</subfield><subfield code="0">(DE-588)4151879-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1984</subfield><subfield code="z">Ocean City Md.</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Elektronenoptik</subfield><subfield code="0">(DE-588)4151879-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hren, John J.</subfield><subfield code="4">edt</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">Pfefferkorn Conference</subfield><subfield code="n">3</subfield><subfield code="d">1984</subfield><subfield code="c">Ocean City, Md.</subfield><subfield code="j">Sonstige</subfield><subfield code="0">(DE-588)816210-4</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">GBV Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=000798940&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-000798940</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift 1984 Ocean City Md. gnd-content |
| genre_facet | Konferenzschrift 1984 Ocean City Md. |
| id | DE-604.BV001322200 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:27:14Z |
| institution | BVB |
| institution_GND | (DE-588)816210-4 |
| isbn | 0931288347 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-000798940 |
| oclc_num | 230967124 |
| open_access_boolean | |
| owner | DE-12 DE-83 |
| owner_facet | DE-12 DE-83 |
| physical | 272, VIII S. Ill., graph. Darst. |
| publishDate | 1984 |
| publishDateSearch | 1984 |
| publishDateSort | 1984 |
| publisher | Scanning Electron Microscopy |
| record_format | marc |
| spelling | Electron optical systems for microscopy, microanalysis and microlithography proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD ed. by John J. Hren ... O'Hare, IL Scanning Electron Microscopy 1984 272, VIII S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Elektronenoptik (DE-588)4151879-2 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1984 Ocean City Md. gnd-content Elektronenoptik (DE-588)4151879-2 s DE-604 Hren, John J. edt Pfefferkorn Conference 3 1984 Ocean City, Md. Sonstige (DE-588)816210-4 oth GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=000798940&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Electron optical systems for microscopy, microanalysis and microlithography proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD Elektronenoptik (DE-588)4151879-2 gnd |
| subject_GND | (DE-588)4151879-2 (DE-588)1071861417 |
| title | Electron optical systems for microscopy, microanalysis and microlithography proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD |
| title_auth | Electron optical systems for microscopy, microanalysis and microlithography proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD |
| title_exact_search | Electron optical systems for microscopy, microanalysis and microlithography proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD |
| title_full | Electron optical systems for microscopy, microanalysis and microlithography proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD ed. by John J. Hren ... |
| title_fullStr | Electron optical systems for microscopy, microanalysis and microlithography proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD ed. by John J. Hren ... |
| title_full_unstemmed | Electron optical systems for microscopy, microanalysis and microlithography proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD ed. by John J. Hren ... |
| title_short | Electron optical systems for microscopy, microanalysis and microlithography |
| title_sort | electron optical systems for microscopy microanalysis and microlithography proceedings of the 3rd pfefferkorn conference held april 9 to 14 1984 at the carousel hotel ocean city md |
| title_sub | proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD |
| topic | Elektronenoptik (DE-588)4151879-2 gnd |
| topic_facet | Elektronenoptik Konferenzschrift 1984 Ocean City Md. |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=000798940&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| work_keys_str_mv | AT hrenjohnj electronopticalsystemsformicroscopymicroanalysisandmicrolithographyproceedingsofthe3rdpfefferkornconferenceheldapril9to141984atthecarouselhoteloceancitymd AT pfefferkornconferenceoceancitymd electronopticalsystemsformicroscopymicroanalysisandmicrolithographyproceedingsofthe3rdpfefferkornconferenceheldapril9to141984atthecarouselhoteloceancitymd |