Electron beam interactions with solids for microscopy, microanalysis & microlithography: proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
O'Hare, IL
Scanning Electron Microscopy
1984
|
| Schlagworte: | |
| Beschreibung: | 372, XII S. Ill., graph. Darst. |
| ISBN: | 0931288304 |
Internformat
MARC
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| 245 | 1 | 0 | |a Electron beam interactions with solids for microscopy, microanalysis & microlithography |b proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA |c ed. by David F. Kyser ... |
| 264 | 1 | |a O'Hare, IL |b Scanning Electron Microscopy |c 1984 | |
| 300 | |a 372, XII S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 4 | |a Backscattering |v Congresses | |
| 650 | 4 | |a Electron beams |v Congresses | |
| 650 | 4 | |a Electron energy loss spectroscopy |v Congresses | |
| 650 | 4 | |a Electrons |x Backscattering |v Congresses | |
| 650 | 4 | |a Microlithography |v Congresses | |
| 650 | 4 | |a Solids |x Effect of radiation on |v Congresses | |
| 650 | 0 | 7 | |a Elektronenoptik |0 (DE-588)4151879-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Elektronenstrahllithografie |0 (DE-588)4151897-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1982 |z Monterey Calif. |2 gnd-content | |
| 689 | 0 | 0 | |a Elektronenstrahllithografie |0 (DE-588)4151897-4 |D s |
| 689 | 0 | 1 | |a Elektronenoptik |0 (DE-588)4151879-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Kyser, David F. |e Sonstige |4 oth | |
| 711 | 2 | |a Pfefferkorn Conference |n 1 |d 1982 |c Monterey, Calif. |j Sonstige |0 (DE-588)816211-6 |4 oth | |
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Datensatz im Suchindex
| _version_ | 1804115675490287616 |
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| dewey-full | 530.4/1 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 530 - Physics |
| dewey-raw | 530.4/1 |
| dewey-search | 530.4/1 |
| dewey-sort | 3530.4 11 |
| dewey-tens | 530 - Physics |
| discipline | Physik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1982 Monterey Calif. gnd-content |
| genre_facet | Konferenzschrift 1982 Monterey Calif. |
| id | DE-604.BV001283642 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:26:23Z |
| institution | BVB |
| institution_GND | (DE-588)816211-6 |
| isbn | 0931288304 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-000773996 |
| oclc_num | 10528914 |
| open_access_boolean | |
| owner | DE-12 DE-355 DE-BY-UBR DE-83 |
| owner_facet | DE-12 DE-355 DE-BY-UBR DE-83 |
| physical | 372, XII S. Ill., graph. Darst. |
| publishDate | 1984 |
| publishDateSearch | 1984 |
| publishDateSort | 1984 |
| publisher | Scanning Electron Microscopy |
| record_format | marc |
| spelling | Electron beam interactions with solids for microscopy, microanalysis & microlithography proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA ed. by David F. Kyser ... O'Hare, IL Scanning Electron Microscopy 1984 372, XII S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Backscattering Congresses Electron beams Congresses Electron energy loss spectroscopy Congresses Electrons Backscattering Congresses Microlithography Congresses Solids Effect of radiation on Congresses Elektronenoptik (DE-588)4151879-2 gnd rswk-swf Elektronenstrahllithografie (DE-588)4151897-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1982 Monterey Calif. gnd-content Elektronenstrahllithografie (DE-588)4151897-4 s Elektronenoptik (DE-588)4151879-2 s DE-604 Kyser, David F. Sonstige oth Pfefferkorn Conference 1 1982 Monterey, Calif. Sonstige (DE-588)816211-6 oth |
| spellingShingle | Electron beam interactions with solids for microscopy, microanalysis & microlithography proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA Backscattering Congresses Electron beams Congresses Electron energy loss spectroscopy Congresses Electrons Backscattering Congresses Microlithography Congresses Solids Effect of radiation on Congresses Elektronenoptik (DE-588)4151879-2 gnd Elektronenstrahllithografie (DE-588)4151897-4 gnd |
| subject_GND | (DE-588)4151879-2 (DE-588)4151897-4 (DE-588)1071861417 |
| title | Electron beam interactions with solids for microscopy, microanalysis & microlithography proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA |
| title_auth | Electron beam interactions with solids for microscopy, microanalysis & microlithography proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA |
| title_exact_search | Electron beam interactions with solids for microscopy, microanalysis & microlithography proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA |
| title_full | Electron beam interactions with solids for microscopy, microanalysis & microlithography proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA ed. by David F. Kyser ... |
| title_fullStr | Electron beam interactions with solids for microscopy, microanalysis & microlithography proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA ed. by David F. Kyser ... |
| title_full_unstemmed | Electron beam interactions with solids for microscopy, microanalysis & microlithography proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA ed. by David F. Kyser ... |
| title_short | Electron beam interactions with solids for microscopy, microanalysis & microlithography |
| title_sort | electron beam interactions with solids for microscopy microanalysis microlithography proceedings of the 1st pfefferkorn conference held april 18 to 23 1982 at the asilomar conference center monterey ca |
| title_sub | proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA |
| topic | Backscattering Congresses Electron beams Congresses Electron energy loss spectroscopy Congresses Electrons Backscattering Congresses Microlithography Congresses Solids Effect of radiation on Congresses Elektronenoptik (DE-588)4151879-2 gnd Elektronenstrahllithografie (DE-588)4151897-4 gnd |
| topic_facet | Backscattering Congresses Electron beams Congresses Electron energy loss spectroscopy Congresses Electrons Backscattering Congresses Microlithography Congresses Solids Effect of radiation on Congresses Elektronenoptik Elektronenstrahllithografie Konferenzschrift 1982 Monterey Calif. |
| work_keys_str_mv | AT kyserdavidf electronbeaminteractionswithsolidsformicroscopymicroanalysismicrolithographyproceedingsofthe1stpfefferkornconferenceheldapril18to231982attheasilomarconferencecentermontereyca AT pfefferkornconferencemontereycalif electronbeaminteractionswithsolidsformicroscopymicroanalysismicrolithographyproceedingsofthe1stpfefferkornconferenceheldapril18to231982attheasilomarconferencecentermontereyca |