Improvements in the properties of NbN layers through the presence of small amounts of aluminium during sputtering:
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Bibliographic Details
Main Author: Haase, E. L. (Author)
Format: Book
Language:English
German
Published: Karlsruhe 1988
Series:Kernforschungszentrum <Karlsruhe>: Kernforschungszentrum Karlsruhe 4409
Physical Description:9 S.

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection!