Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators
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Bibliographic Details
Main Author: Boyd, Ian W. (Author)
Format: Book
Language:English
Published: Berlin [u.a.] Springer 1987
Series:Springer series in materials science 3
Subjects:
Physical Description:VIII, 320 S. Ill., graph. Darst.
ISBN:3540179518
0387179518

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