Laser processing of thin films and microstructures: oxidation, deposition and etching of insulators
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin [u.a.]
Springer
1987
|
| Schriftenreihe: | Springer series in materials science
3 |
| Schlagworte: | |
| Beschreibung: | VIII, 320 S. Ill., graph. Darst. |
| ISBN: | 3540179518 0387179518 |
Internformat
MARC
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| 100 | 1 | |a Boyd, Ian W. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Laser processing of thin films and microstructures |b oxidation, deposition and etching of insulators |c Ian W. Boyd |
| 264 | 1 | |a Berlin [u.a.] |b Springer |c 1987 | |
| 300 | |a VIII, 320 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Springer series in materials science |v 3 | |
| 650 | 4 | |a Lasers |x Industrial applications | |
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| 650 | 0 | 7 | |a Dünnschichttechnik |0 (DE-588)4136339-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikrostruktur |0 (DE-588)4131028-7 |2 gnd |9 rswk-swf |
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Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author | Boyd, Ian W. |
| author_facet | Boyd, Ian W. |
| author_role | aut |
| author_sort | Boyd, Ian W. |
| author_variant | i w b iw iwb |
| building | Verbundindex |
| bvnumber | BV000698097 |
| callnumber-first | T - Technology |
| callnumber-label | TA1677 |
| callnumber-raw | TA1677 |
| callnumber-search | TA1677 |
| callnumber-sort | TA 41677 |
| callnumber-subject | TA - General and Civil Engineering |
| classification_rvk | UH 5750 UQ 8100 |
| classification_tum | ELT 279f PHY 762f FER 786f |
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| dewey-full | 621.36/6 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.36/6 |
| dewey-search | 621.36/6 |
| dewey-sort | 3621.36 16 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik Fertigungstechnik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV000698097 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T15:17:59Z |
| institution | BVB |
| isbn | 3540179518 0387179518 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-000435627 |
| oclc_num | 16404257 |
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| owner_facet | DE-12 DE-91G DE-BY-TUM DE-384 DE-29T DE-522 DE-634 DE-11 DE-188 DE-706 |
| physical | VIII, 320 S. Ill., graph. Darst. |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| publisher | Springer |
| record_format | marc |
| series | Springer series in materials science |
| series2 | Springer series in materials science |
| spelling | Boyd, Ian W. Verfasser aut Laser processing of thin films and microstructures oxidation, deposition and etching of insulators Ian W. Boyd Berlin [u.a.] Springer 1987 VIII, 320 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Springer series in materials science 3 Lasers Industrial applications Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Laserbearbeitung (DE-588)4139080-5 gnd rswk-swf Halbleiterwerkstoff (DE-588)4158817-4 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Mikrostruktur (DE-588)4131028-7 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 s Laserbearbeitung (DE-588)4139080-5 s DE-604 Mikrostruktur (DE-588)4131028-7 s Dünnschichttechnik (DE-588)4136339-5 s Halbleiterwerkstoff (DE-588)4158817-4 s Springer series in materials science 3 (DE-604)BV000683335 3 |
| spellingShingle | Boyd, Ian W. Laser processing of thin films and microstructures oxidation, deposition and etching of insulators Springer series in materials science Lasers Industrial applications Dünne Schicht (DE-588)4136925-7 gnd Laserbearbeitung (DE-588)4139080-5 gnd Halbleiterwerkstoff (DE-588)4158817-4 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Mikrostruktur (DE-588)4131028-7 gnd |
| subject_GND | (DE-588)4136925-7 (DE-588)4139080-5 (DE-588)4158817-4 (DE-588)4136339-5 (DE-588)4131028-7 |
| title | Laser processing of thin films and microstructures oxidation, deposition and etching of insulators |
| title_auth | Laser processing of thin films and microstructures oxidation, deposition and etching of insulators |
| title_exact_search | Laser processing of thin films and microstructures oxidation, deposition and etching of insulators |
| title_full | Laser processing of thin films and microstructures oxidation, deposition and etching of insulators Ian W. Boyd |
| title_fullStr | Laser processing of thin films and microstructures oxidation, deposition and etching of insulators Ian W. Boyd |
| title_full_unstemmed | Laser processing of thin films and microstructures oxidation, deposition and etching of insulators Ian W. Boyd |
| title_short | Laser processing of thin films and microstructures |
| title_sort | laser processing of thin films and microstructures oxidation deposition and etching of insulators |
| title_sub | oxidation, deposition and etching of insulators |
| topic | Lasers Industrial applications Dünne Schicht (DE-588)4136925-7 gnd Laserbearbeitung (DE-588)4139080-5 gnd Halbleiterwerkstoff (DE-588)4158817-4 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Mikrostruktur (DE-588)4131028-7 gnd |
| topic_facet | Lasers Industrial applications Dünne Schicht Laserbearbeitung Halbleiterwerkstoff Dünnschichttechnik Mikrostruktur |
| volume_link | (DE-604)BV000683335 |
| work_keys_str_mv | AT boydianw laserprocessingofthinfilmsandmicrostructuresoxidationdepositionandetchingofinsulators |